VR4151/4152

No. w q Description Brass Material Note q Description Aluminum alloy Material Note Body Body Indicator window Acrylic Piston Piston A e POM Plug w e r POM Spring r PE Spring t Stainless steel NBR Packing t Stainless steel NBR O-ring Dimensions Dimensions Panel mounting Stroke 2 mm M22 x 1 Panel 5-7-12 CAT.ES12-7 A Two Hand Control Valve An output is available through synchronized, twohanded

Digital Flow Switches Series PF2A

equipment such as a voltmeter.

LEC-OM07605CN

A b . A b . A 1 2 3 1 b012 Ab. 0 1 b b . A b .

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Molded-case circuit breaker (Note 1, 3) Fuse Frame, rated current Magnetic contactor Driver Voltage Voltage AC [V] Class Current Power factor Power factor (Note 2) [A] AC [V] Improving reactor is Improving reactor is not used used LECSS2-T5 30 A frame 5 A S-N10 10 LECSS2-T7 LECSS2-T8 30 A frame 10 A 30 A frame 5 A 15 Mitsubishi 240 T 300 Electric Corporation LECSS2-T9 30 A frame 15 A 30 A

NCG/CG1

D-M9 A/D-M9 AV (With indicator light) D-M9NAV V A B 9 M D A B 9 M D A N 9 M D D-M9PAV D-M9PA Auto switch part no.

Compact and Lightweight

Set of long clamping screws ZH2-TB203-A 3 M4 x 70 2 pcs. ZH13DA ZH15DA ZH2-TB204-A 4 M4 x 90 2 pcs. ZH2-TB206-A 6 M4 x 130 2 pcs. Hexagon nut (M4) 2 pcs. ZH2-TB208-A 8 M4 x 170 2 pcs. (ZH2-TB201-A)3 1 M4 x 30 2 pcs. Flat washer (for M4) 2 pcs. ZH2-TB302-A 2 M4 x 55 2 pcs. ZH2-TB303-A 3 M4 x 80 2 pcs. ZH18DA ZH20DA ZH2-TB304-A 4 M4 x 100 2 pcs. ZH2-TB306-A 6 M4 x 145 2 pcs.

Smooth Cylinder

Vertical actuation (Speed control) I II P2 W A P1 a B A P0 P0 a A W (1) Basically, meter-out control is used. Combine meter-in control to reduce sudden movement. (1) Basically, meter-out control is used.

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Residual Pressure Release Valve

17 19 Weight (g) Connection thread D L1 L2 Q KEC-02 KEC-03 665

Quick Exhaust Valve Series AQ 1

Description Material Note q No.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-01-06S ASV310F-01-08S ASV310F-02-06S ASV310F-02-08S ASV410F-01-08S ASV410F-01-10S ASV410F-02-08S ASV410F-02-10S ASV410F-03-08S ASV410F-03-10S ASV510F-02-10S ASV510F-02-12S ASV510F-03-10S ASV510F-03-12S ASV510F-04-10S ASV510F-04-12S 71.9 73.8 71.9 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.8 90.2 91.8 90.2 91.8 16.8 19.3 16.8 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3

Series 12-REA Sine rodless cylinder

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2201F-02-06-X214 10-AS2301F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 Although speed adjustment is possible with

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

IS3000

Non inductive (A) Non inductive (A) IS3 10 Model Load Load resistance Light load Inductive load Motor load Load resistance IS3100 (Gasket piping) IS3000-02 (Rc 1/4 thread) Circuit Rated voltage (V) N.O.

Lock-Up Valve IL201/211/220 Series

0 Exhaust portr Adjusting springe Upper diaphragmw Upper diaphragm chamberq SIG Lower diaphragmy Lower diaphragm chambert OUT IN1 Springo Valvei Pistonu IN2 171 A IL201/211/220 Series Construction 2 12 IL211 IL201 1 r r e t e !2 !2 u t u w w i !9 i !9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Note 2) Do not use in a line where a pressurized condition is maintained since the body may be damaged. Note 3) Polyurethane is only applicable for the ZFC050-02. SP ZCUK Made to Order (Refer to page 1115 for details.)

CL

is locked without a load.

ZX

Stabilize the source pressure by providing a tank and a vacuum regulator. Provide a vacuum switch valve to individual lines.

CL

If there is a risk of contact, provide safety measures such as a cover or a system that uses sensors that will activate an emergency stop before contact is made. 2. Use a balance circuit in which lurching of the piston is taken into consideration.

VXZ

Normally open VXZ 2232 02 1 G N.O.