specifications-table td { padding: 8px 4px; margin: 3px; border: 1px solid #b6b6b6; text-align: center; } .specifications-table th { padding: 8px 4px; background-color: #ab1a14; color: #FFF; font-weight: bold; text-align: center; } OCP EDI: F2815401B85 NORYL Precision molded orifices feature accuracy comparable to jewel orifices at a

specifications-table td { padding: 8px 4px; margin: 3px; border: 1px solid #b6b6b6; text-align: center; } .specifications-table th { padding: 8px 4px; background-color: #ab1a14; color: #FFF; font-weight: bold; text-align: center; } OCP EDI: F2815050B80 NORYL Precision molded orifices feature accuracy comparable to jewel orifices at a

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

SQ1000/2000

SUP/EXH block Note 1) SSQ1000-PR-3-C8-(S) Back pressure check valve Note 2) SSQ1000-BP SUP block plate SSQ1000-B-P EXH block plate SSQ1000-B-R Port plug Note 3) P R A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B Note 4) C3 (N1) With 3.2 (1/8") One-touch fitting C4 (N3) With 4 (5/32") One-touch fitting C6 (N7) With 6 (1/4") One-touch fitting

Air Cylinder Series CM2

R1 ND MM ND MM R1 MM E1 ND NX1 A U1 R2 H Z E1 NX U1 L1 A A NX A1 (Min.) A1 U1 L1 Applicable bore size 20 25, 32 40 MM NDH10 R1 L1 NX E1 MM NX1 U1 A1 U1 A R2 Y Z A H NDH10 Part no.

Vacuum Pad

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

Vacuum Pad

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

Vacuum Pad

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

Vacuum Pad

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

Hydraulic

MA a A MA a Air release R (max.)

Fieldbus System

valve (A) (A) 4 (B) 2 (A) 4 (B) 2 Note) A 1 5 (R1) 3 (R2) 1 (P) 3 (R2) 5 (R1) 1 (P) N.C.

ITV

-A B310L B410L Y30 Y40 189 Y30L Y40L 133 Y40T For ITV10, use a modular adapter (Refer to page 585 for details). eL-bracket Accessories (Option)/Part No. 178 [Bracket] qAF30-A wAFM30-A Part No.

Thermo-chiller

With functions narrowed down, 2 independent temperature control systems have been achieved with only a single compressor , a single pump , and a single tank .

Pilot Operated Regulator AR425 to 935 Series

Note 2) Use caution not to tighten excessively when mounting a pressure gauge, otherwise it may result in a breakdown. Use a sealant tape for sealing.

SL5200

[Check valve] A check valve is a safety device intended to prevent reverse flow. The AP 64 is a unique design with only one moving part in the gas stream, an O-ring. It is a springless design, free of springs and poppets. [Vacuum generator] A venturi device that creates vacuum by flowing gas through a nozzle.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

0 B 101 kPa C 10.1 kPa Rated pressure range Range Analog output [mA] 5 20 Analog output [V] For vacuum For compound pressure 100 kPa to 100 kPa 100 kPa 100 kPa 0 to 1 MPa 0 1 MPa 0.1 MPa For positive pressure 0 to 500 kPa 0 500 kPa 50 kPa 1 0.6 4 ZSE ISE A C B A B Pressure Pressure ZSP Dimensions PS PSE56, PSE5601 02 N01 N02 ISA A 11.5 3025 37.5 24 5.5 30 24 PSE 14 B 5.1 20 5 IS ISG Air

VCA

Blanking block assembly (VCA30, 40) VVCA 3 0 2A 00 3 4 Series VCA30 Series VCA40 This is used when a blanking block is mounted on a manifold as preparation for a planned valve installation.

A

Using a regulator on the secondary side When mounting a regulator on the secondary side (A port side), use a residual pressure relief regulator (AR2550 to 4050) or a check type regulator (AR2560 to 6060). With a standard regulator (AR1000 to 6000), the secondary side pressure may not be released when this valve is exhausted. 5.

Soft Start-up Valve AV2000/3000/4000/5000 1

bore 1/8 R 4-R 4-R 36.8 E 36.8 E R P VEX P D D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000

Series VS

(A) + 14 (A) + PIN 2 PIN 2 12 (B) + 12 (B) + PIN 2 PIN 2 PIN 3 PIN 3 COMMON COMMON PIN 3 PIN 3 PIN 3 PIN 3 COMMON COMMON COMMON COMMON COMMON COMMON PIN 3 PIN 3 PIN 4 PIN 4 14 (A) + 14 (A) + 12 (B) + 12 (B) + PIN 4 PIN 4 12 (B) + 12 (B) + PIN 4 PIN 4 14 (A) + 14 (A) + PIN 4 PIN 4 NOT USED NOT USED X17 X17 PIN 1 PIN 1 X6 X6 PIN 1 PIN 1 NOT USED NOT USED X53 X53 14 (A) + 14 (A) + PIN 1 PIN