Water-cooledThermo-chiller Specific heat C [kg/m 3] [g/L] ([kcal/kgC]) [J/(kgK)] 10C 1.10 x 10 3 3.02 x 10 3 0.72 20C 1.08 x 10 3 3.15 x 10 3 0.75 50C 1.06 x 10 3 3.27 x 10 3 0.78 80C 1.04 x 10 3 3.40 x 10 3 0.81 Water Density : 1 x 10 3 [kg/m 3] [g/L] Specific heat C: 4.2 x 10 3 [J/(kgK)] (1.0 [kcal/kgC]) 107 Thermo-chiller Series HRW Fluorinated Fluid Type SEMI How to Order 002 H HRW Fluorinated FluidType Option
Electromagnetic brake interlock MBR CN3-13 DO-1 PD07 0005 Electromagnetic brake interlock ' MBR CN3-13 DO-1 PD07 0005 0002 In-position (Positioning completed) INP CN3-9 DO-1 PD08 0004 In-position (Positioning completed) INP CN3-9 DO-1 PD08 0004 Trouble ALM CN3-15 DO-1 PD09 0003 Trouble ALM CN3-15 DO-1 PD09 0003 0 2 -33- (2) Symbol allocation using the setup software: Changing pins CN1-13
Note) Please do not use an electric driver or pneumatic driver. 32 3 4050 5 63 6 Release bolt (Unlock) 80 8 100 10 Rod end nut Check that the cylinder is locked and confirm that the lock is released when air pressure of 0.3MPa or more is applied to the lock unit release port. In addition to this, the piston rod should operate smoothly with the minimum operating pressure.
Warning If any error occurs, do not start operating the product.
Do not stare into beam visible at XF1/2.
Note) If an AC specification without DIN terminal (DO) is selected, always use a DIN connector with surge voltage suppressor as the connector. 1 Series SGH How to Order 3-Port Type Note) Filter is installed on PE port as standard. External pilot solenoid SGH 1 Y A G 1 T Z B1 10 0 30 3 SGHA 1 A G B1 10 0 3 30 Air operated q w e r t y u i o !0 !1 !
B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.
N 10 04 Symbol Applicable tube O.D.
N 10 04 Symbol Applicable tube O.D.
N 10 04 Symbol Applicable tube O.D.
Selection of Dip Switch 10. Driving 45 10-1. Setting of Origin Direction 10-2. Adjustment of Air Balance 11. Error Messages & Countermeasures 46 11-1. Controller 11-2. Brake Units Life Span 12. Appendix 50 12-1.
) 10 [V] 10 [V] 10 [pulse] 10 [pulse] 0 0 10 [pulse] 10 [pulse] -10 [V] -10 [V] CW CW 21 CCW CCW 0A (123) (10V/1Mpulses) 0B (123) (10V/10Mpulses) 10 [V] 10 [V] 1 [Mpulse] 10 [Mpulse] 0 0 1 [Mpulse] 10 [Mpulse] -10 [V] -10 [V] CW CW CCW 0C (123) (10V/100Mpulses) 0D 8[V] 10 [V] 100 [Mpulse] 0 400[V] 0 100 [Mpulse] -10 [V] CW CCW CCW 0E 2(3) 15 (345) (10V/10 pulses) 8 [V] 10
(kPa) Pressure loss (kPa) 0.8 0.25 0.6 0.20 0.15 0.4 0.10 0.2 0.05 1 2 4 6 8 10 0 5 10 15 20 25 0 Flow rate (l/min) Flow rate (l/min) PFM750, 550 / For 50 (l/min) PFM711, 511 / For 100 (l/min) 4 14 12 Pressure loss (kPa) Pressure loss (kPa) 3 10 8 2 6 4 1 2 5 10 20 30 40 50 0 10 20 40 60 80 100 0 Flow rate (l/min) Flow rate (l/min) Flow Characteristics PFM710, 510 / For 10 (l/min) PFM725
0 to 0.6 0 to 1.0 0 to 0.2 0 to 0.4 0 to 0.7 0 to 1.0 10 Hex. width across flats 1 8 R MPa 30 R 1/8 9 Note) Do not apply pressure more than the maximum display pressure.
ZS-10-5A-50 . 1 pc.
, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MXQ6-20 MXQ6-20 0.010 0.02 MXQ6-20 MXQ6-20 MXQ6-40 MXQ6-40 0.03 MXQ6-40 MXQ6-40 0.02 MXQ6-10 MXQ6-10 0.01 0.005 MXQ6-10 MXQ6-10 0.01 0 0 40 80 120 10 20 30 10 20 30 0 Load (N) Load (N) Load (N) 8 8 8 Lr = 70 mm MXQ8-75 MXQ8-75 MXQ8-75 MXQ8-10 MXQ8-10 MXQ8-20 MXQ8-20 MXQ8-30 MXQ8-30 MXQ8
8 Do all cables correspond to the specifications? Does the power supply correspond to the specifications for the protective extra-low voltage (PELV) or safety extra-low voltage (SELV)? 9 10 Have the voltage supply of PWR and PWR(V) from a power supply unit been correctly implemented?
) 2) 1) 14 to 194F (10 to 90C) for Vespel and PEEK seat.
*10 *10 *10 *10 *10 *7 For pipe thread type: NPT.