Air Slide Table Series MXS

With shock absorber at extension end (BS) With shock absorber at retraction end (BT) With shock absorber at both ends (B) Buffer mechanism Air gripper Workpiece NG Shock absorber at retraction end Speed controller DShock absorber at extension end -X Individual -X 51 Series MXS Model Selection Model Selection Steps Formula/Data Selection Examples Operating Conditions 1 Cylinder: MXS16-50 Cushion

MXS Series Air Slide Table

Q Q MXS Series Q Q Q Product Features .pages 42-43 Q Q MXS Series Q How to Order .page 44 Specifications.pages 45-46 Q How to Select .pages 47-48 Q Table Deflection .pages 49-50 Q Stroke Adjuster .pages 51-52 Construction/ Parts List, Seal Kits .page 53 Q Dimensional Drawings.pages 54-65 Q How to Order MXS L (Symmetric type) .page 66 Dimensional Drawings MXS L (Symmetric

Manifold Specifications

-061-011 (2 position single) VZS3150-5G5 (3 position exhaust center) VZS3450-5G1 (Individual EXH spacer) VVZS3000-R-02-21 G L M KZ D Side Grommet L plug connector M plug connector K plug connector DIN terminal 1 4 C4 2 to 24 stations Non plug-in type VV5ZS3-51 VZS350C6 With attachment plug lead wire teminal: 15 stations max.

Fieldbus Device Handheld Terminal

When the power supply of the SI unit is turned off, the time is reset. g) Error code (Refer to page 51) h) Error code details (Refer to page 51) -26No.EX-OML0011-C 3. Sys. Configuration Mode levels The system operation setting mode is composed as shown in the figure below. 1. Select [3. Sys. Configuration] and press the button. 2. Enter the password. 3.

MXS

(Unit: N) Operating pressure (MPa) Bore size (mm) Rod diameter (mm) Piston area (mm2) Operating direction MXP 0.2 0.3 0.4 0.5 0.6 0.7 11 17 23 29 34 40 OUT 57 6 MG 3 8 13 17 21 25 29 42 OUT IN 20 30 40 51 61 71 101 8 4 MGP Standard Stroke 15 23 30 38 45 53 75 OUT IN 45 68 90 226 113 136 158 Model Standard stroke (mm) 12 6 MGQ 34 51 68 85 IN 170 102 119 MXS 6 10, 20, 30, 40, 50 80 121 161

C95

L3 d1 H9 MB1 Part no. d3 h KJ30D KJ35D KJ40D M27 x 2 M36 x 2 M42 x 2 110 125 142 70 80 90 37 43 49 51 56 60 4 4 4 36 41 46 125 160/200 250 30 35 40 CA2 CS1 C76 C85 C95 CP95 NCM NCA D-X 20Data 6-12-39 Refer to Page 6-16-1 for details on auto switches.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

B A NN x M5 x 0.8 thread depth 10 4H9 ( ) depth 3.5 +0.030 0 HA GA Section AA Section BB (mm) Model F 35 35 35 50 35 55 65 ZZ 99 99 99 111 131 177 231 M 71 71 71 83 103 149 203 Z 70 70 70 82 102 148 202 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 H 40 40 40 25 36 36 38 HA 40 40 40 25 36 72 76 G 15 15 15 17 15 25 35 GA 15 15 15 42 51

SMC

A 5 1 20 9 9 8.5 4.2 B A 8.5 18.5 8.5 18.5 H (NN1) x H G Section AA Section BB (mm) Model F 35 35 35 50 35 55 65 ZZ 99 99 99 111 131 177 231 M 71 71 71 83 103 149 203 Z 70 70 70 82 102 148 202 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 H 40 40 40 25 36 36 38 G 15 15 15 17 15 25 35 N 4 4 4 4 6 6 6 NA 2 2 2 2 2 4 4 GA 15 15 15 42 51

CV/MVGQ

H2 I D A N 20 25 32 40 26 M8 x 1.25 55 70.5 40 3.2 25 6.8 4 41 40 5 13 15.5 24 28 8 18 15 13 5 8 C J G5-S 32 M10 x 1.25 55 76.5 40 3.2 28 6.8 4 45 47 5.5 13 19.5 30 33.5 10 22 15 17 6 8 32 M10 x 1.25 55 78.8 40 3.2 28 6.8 4 45 47 5.5 13 19.5 34.5 37.5 12 22 15 17 6 8 CV 41 75 84.8 55 3.2 30 7 4 50 54 7 16 21 42.5 46.5 14 24 21.5 22 8 10 M14 x 1.5 Dimensions by Stroke MVGQ Stroke 1 to 50 51

C95

L3 d1 H9 MB1 Part no. d3 h KJ27D KJ36D KJ42D M27 x 2 M36 x 2 M42 x 2 110 125 142 70 80 90 37 43 49 51 56 60 4 4 4 36 41 46 125 160/200 250 30 35 40 CA2 CS1 C76 C85 C95 CP95 NCM NCA D-X 20Data 6-12-39 40 Refer to Page 6-16-1 for details on auto switches.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

switch mounting groove dimensions (4 locations) MHZ MHF MHL 10 10 MHR 40 MHK 40 MHS 5 Y 6.4 MHC MHT MHY MHW (mm) -X Model MHS3-32D MHS3-40D MHS3-50D MHS3-63D MHS3-80D L K 9 9 10 11 12 J 20 21 24 28 32 G 30.5 32 37.5 44 56 FZ 5 6 6 7 8 FY 19.5 23.5 28 34.5 43.5 FX 22 26.5 31 38 47.5 CB 16 17 20 22 27 CA 8 9 9 12 13.5 EC 8 10 11 15 21.5 EO 12 14 17 23 31.5 DC 28 31 35 43 53.5 DO 32 35 41 51

CQS

Rear flange Long stroke Standard stroke (mm) Without auto switch With auto switch Without/with auto switch Long stroke (mm) Bore (mm) Standard stroke (mm) B L L1 A B L L1 A B L L1 17 17 19.5 22.5 A 12 16 20 25 24 25.5 28.5 32.5 13.5 13.5 14.5 15 32 32 41 44 51 51 63.5 67 14 15.5 18.5 22.5 3.5 3.5 4.5 5 22 22 29.5 32.5 31 31 42 45.5 14 15.5 18.5 22.5 3.5 3.5 4.5 5 26 26 32 35.5 35 to 100 35

MGP

FB 50 Stroke 66 67.5 109 109 117.5 117.5 121 141 51 Stroke or more 97.5 99 114 114 129 129 148 166 20 25 32 40 50 63 80 100 66 67.5 71.5 78 83 88 102.5 120 19 20 22 22 23 23 24 29 * Other dimensions are same as standard.

TABLE OF CONTENTS

All Models STRAIN RELIEF CONNECTOR BOTTOM CAVITY PORT .20 (5.1) .30 (7.6) SPADE TERMINAL COIL MOLDED All Models All Models * Models 21, 31, 51 ADD .232 (5.9) FOR SPADE TERMINAL COIL OPTION SINGLE AUTOMOTIVE MANIFOLD MOUNT HIGH TEMPERATURE MOLDED COIL All Models except 51 All Models All Models DOUBLE AUTOMOTIVE FLANGE MOUNT EUROPEAN DIN STYLE COIL All Models except 51 Models 21, 71 Models

CP95

13 27 16 105 4 4 4 9 30 163 213 52 38 17 4 M16 x 1.5 50 32 40 20 G 1/4 15.5 M8 x 1.25 8 16 31.5 16 106 6 4 5 10.5 37 179 244 65 46.5 24 5 M16 x 1.5 63 32 45 20 G 3/8 16.5 M8 x 1.25 8 16 31.5 16 121 6 4 9 12 37 194 259 75 56.5 24 5 M20 x 1.5 80 40 45 25 G 3/8 19 M10 x 1.5 10 21 38 16 128 8 4 11.5 14 46 218 300 95 72 30 5 M20 x 1.5 100 40 55 30 G 1/2 19 M10 x 1.5 10 21 38 16 138 8 4 17 15 51

CP95

M6 x 1 4 17 4 4 4 9 30 163 213 52 38 M16 x 1.5 50 8 16 106 32 16 40 20 31.5 G 1/4 15.5 M8 x 1.25 6 24 5 4 5 10.5 37 179 244 65 46.5 M16 x 1.5 63 8 16 121 32 45 16 20 31.5 G 3/8 16.5 M8 x 1.25 6 24 5 4 9 12 37 194 259 75 56.5 M20 x 1.5 80 10 16 128 40 45 21 38 25 G 3/8 19 M10 x 1.5 8 30 5 4 11.5 14 46 218 300 95 72 M20 x 1.5 100 10 16 138 40 55 21 38 30 G 1/2 19 M10 x 1.5 8 32 5 4 17 15 51

MY1

However, add -XB10 to the end of the part number for non-standard strokes from 51 to 599. Also when exceeding a 600 mm stroke, specify -XB11 at the end of the model number. (Except 10) 1 mm or less Backlash Possible (Non-lock type) Manual release Made to Order Specifications (For details, refer to page 8-31-1.)

LEH_C

/77 246/53 243/48 242/39 254/43 614 1640 52130 84210 (N) 40100 1) 3) 26 38 1128 /(mm/s) 2)3) 580 /550 5100 /550 5120 /550 + () (mm) 4) 0.02 (mm)5) 0.05 /(mm) 6) 0.5 1.0 / (m/sec 2) 7) 150 / 30 (c.p.m) 60 () 540 (%RH) 90 () 165 220 430 585 1120 1760 (g) 135 190 365 520 20 28 42 (DC24V) () A/B (800 /) (V) DC2410% 11/7 28/15 34/13 36/13 / (W) 8) 8/7 22/12 (W) 9) 14 42 19 51

Process Pump

-1S19 1S25 10 204 255 120 4 x 9 AIR SUP (P1) Rc, NPT, G 1/4" FLUID OUT With nut 249 A 8 8 195 157 118 91 51 18 FLUID IN With nut AIR SUP (P2) Rc, NPT, G 1/4" Tube Size Applicable for Nut Size (Tube size can be altered, using a reducer even within the same nut size.)

MXQ

With end lock (12): MXQ12-R Operating port 2-M5 x 0.8 5 22 22 51 3 Other dimensions are the same as basic style.