Cylinder

II NN I Rod end without '~uto switch illG i ;:xI I ~ 2.FC thread Bore size S z I With 'al:lw switch I wi (mm) 30 51 I 5st 2051 1551 I 20st ~ ~ H 5" 10" 10 st 1 15 51 i 30" P I 6 30.5 35.5 40.5 45.5 3 47.5 52.5 57.5 62.5 18.5 20 , 22. 10 30.5 35.5 40.5 1 45.5 65.5 55.5 1 3 i 50.5 55.5 1 60.5 ;:5:5 1 21 f 30.5 15 35.5 40.5 145.5 26.5 55.5 1 4 54.5 59.5 I 64.5 69.5 79.5 1 23 ~F .Ot ~ .

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

13 15 25 24 HA 17 24 30 36 41 52 62 80 92 G 3 4 5 6 6 7 7 8.5 8.5 HT 10.5 14 17 24 23.5 29 36 45 51 J x E M4 x 0.7 x 6 M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 B 6.5 8 9.5 9.5 11 11 14 14 GP 20 27 33 39 44 55 65 83 95 HB 10.5 14 17 21 23.5 29 36 45 51 C 3.2 4.2 5.2 5.2 6.5 6.5 8.2 8.2 GW 18.5 25.5 31.5 37.5 42.5 53.5 63.5

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

15.5 Stroke (mm) Auto switch operating range 10 30.5 31.5 18.5 19.5 Model Model 5 25.5 26.5 13.5 14.5 A B C D A B C D 11-/22-MXP6 5 11-/22-MXP6 3 11-/22-MXP10, 12, 16 Electrical entry from outside Electrical entry from inside Parallel electrical entry B A B B A A Solid state auto switch D-M9B, D-M9N Reed auto switch D-A93 (mm) (mm) Stroke (mm) 20 41 29 47 35 Stroke (mm) 20 45 25 51

CL

CNA Head Side Flange Style CNS Without rod boot With rod boot Bore size (mm) ZZ 182 198 201 227 ZZ 202 220 223 247 CLS 20 25 32 40 CLQ MLGP Rod Side Trunnion Style Rod side trunnion style: CLG1UN RLQ Without rod boot With rod boot Bore size (mm) BZ TDe8 TE TF TH TR TS TV TW TX TY TZ Z Z TT MLU 8 0.025 0.047 10 0.025 0.047 12 0.032 0.059 14 0.032 0.059 66 73 73 82 46 51 51 62 10 10 10 10 5.5

Rotary Actuator/Vane Type

Dimensions Page 73 V Free Mount Type Rotary Actuator with Angle Adjuster/Vane Type CRBU2WU Series How to Order Page 78 Construction Page 79 Dimensions Page 80 V Simple Specials Shaft Pattern Sequencing1 -XA1 to -XA24 Page 84 Shaft Pattern Sequencing2 -XA31 to -XA58 Page 90 DV Made to Order Page 96 V Component Unit Page 99 V Angle Adjustment Setting Page 100 V Auto Switch Mounting Page 102 51

Slide Unit Series CX2/CXWM/CXWL

CXS Theoretical Output Symbol Specifications XB11 Long stroke type (N) XB13 Low speed cylinder (5 to 50 mm/s) DOperating pressure (MPa) Model Rod size (mm) Piston area (mm 2) X146 Hollow piston rod 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 X138 Adjustable stroke -X CX2N10 CX215 CX225 91 81 71 61 51 40 30 6 101 20 X168 CX helical insert thread 186 166 145 124 104 83 62 8 207 41 X169 Individual -X 2

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Stroke Range Bore size (mm) Stroke range (mm) 10 51 to 299 15 51 to 499 25 101 to 599 CY1F XB10 Bore size Piping thread type Piping direction Stroke Auto switch Symbol Adjustment bolt symbol (Example) CY1F10R237ALA93XB10 Symbol 2 Long Stroke -XB11 Available with long strokes exceeding the standard strokes. The stroke can be set in 1 mm increments.

VK300

VK300-82-2-01 VK300-82-2-03 110 VAC 110V VK300-82-2-02 200 VAC 200V VK300-82-2-04 220 VAC 220V 240 VAC 240V 6 VDC 6V 12 VDC 12V 24 VDC 24VD 48 VDC 48VD VK300-82-2-07 VK300-82-4-51 VK300-82-4-06 VK300-82-3-05 VK300-82-3-53 DIN terminal type Indicator light (Built-in connector) Marking Circuit with indicator light AC circuit diagram 12 VDC or less circuit diagram 24 VDC or more circuit diagram

Aluminum High Vacuum Angle Valve

type of heater.For further details, refer to mounting positions under Replacement Heaters on page 465. 423 B XLC/XLCV Series Dimensions XLCV/With solenoid valve R N P In case of double solenoid valve Port R (Exhaust port) Q K L M Port P (Pressure port) In case of single solenoid valve (mm) P K L M N Q R Model XLCV-16 XLCV-25 XLCV-40 36 14.3 9.2 6.4 3.5 2.7 17.3 41 15.8 9.2 6.4 3.5 2.7 15.8 51

High Vacuum Angle Valve

details, refer to mounting positions under Replacement Heaters on page 465. 439 B XLG/XLGV Series Dimensions XLGV/With solenoid valve R N P Port R In case of double solenoid valve (Exhaust port) Q K M L Port P (Pressure port) In case of single solenoid valve (mm) N K L M P Q R Model XLGV-16 XLGV-25 XLGV-40 6.4 14.3 9.2 3.5 2.7 17.3 36 6.4 15.8 9.2 3.5 2.7 15.8 41 6.4 29 9.2 3.5 2.7 2.6 51

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Refer to back page 50 for Safety Instructions and pages 49 to 51 for Vacuum Equipment Precautions. 1. Use the product while strictly observing the precautions on vacuum equipment and taking the safety into consideration. Additionally, select a pad size and material suitable for the workpiece to be adsorbed and the atmosphere.

Ejector Valve Unit Series ZYY/ZYX

Silencer (AN203-KM81 pc) 51 26 16 2. Mounting bolt nut (M2 x 0.4 x 254 pcs.) 1095 Series ZYY/ZYX Ejector Valve Dimensions ZYX3L-S1-EC-MN Silencer Vacuum switch Ejector unit V Release flow rate adjusting needle Supply/Release valve P1 Circuit diagram 6.8 7.4 85 Accessory (packed together) 1. Silencer (AN203-KM81 pc) 51 26 16 2.

Clean Regulator/Fluororesin Type

54 26 28 51 28 51 31 48 28 52 28 52 27 55 5.5 27 55 A1 A2 27 55 28 52 B1 B2 Tube extensions 23 Pilot port Rc, NPT 1/8 R 12 32 54 26 48 40 1 2 SMC 4 x 3.5 (Mounting hole) 23 5/32" OUT IN 1/4" 5.5 32 30 30 884 Clean Regulator/Fluororesin Type SRF Series Dimensions/SRF30 Integrated fittings 41.7 Pilot port Rc, NPT 1/8 12 R ARJ 75 52 67.7 32.3 64 1 2 AR425 to 935 SMC ARX 4 x 5.5 (Mounting

NCA1

Male threads 17 : 3/8-16 45 : 2-12 78 : M18 x 1.5 cannot be specified equal to, but 18 : 3/8-24 46 : 2 1/4-12 79 : M18 x 2.5 19 : 7/16-14 47 : 1 7/8-12 80 : M20 x 2.0 not, greater than the rod diame20 : 7/16-20 48 : 2 3/4-12 81 : M20 x 2.5 ters as standard. 21 : 1/2-13 49 : 3-12 82 : M22 x 1.5 22 : 1/2-20 50 : 3 1/4-12 83 : M22 x 2.5 23 : 9/16-12 51 : 3 1/2-12 84 : M24 x 2.0 24 : 9/16-18

CNG

193 30 17 62 73 215 40 51 196 35 17 62 73 218 50 62 221 (230) 35 17 70 82 241 (250) Note) ( ): Denotes the dimensions for long stroke.

RLQ

Hs A B A B Proper Auto Switch Mounting Position (mm) D-A7H, A80H, A73C, A80C D-F7, F7V, F79F, J79 D-J79C, F7W, F7WV D-J79W, F7BAL, F7BAVL D-A7 D-A80 D-F7NTL D-A79W Bore size (mm) B B A A B A B A 32 3 11 51 43 6 46 5.5 45.5 40 5.5 13.5 49.5 57.5 8.5 52.5 8 52 50 19 11 53.5 61.5 14 56.5 13.5 56 63 22 14 59 67 17 62 16.5 61.5 Auto Switch Mounting Height (mm) D-A7H, A80H D-F7, J79, F7W D-J79W

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Stroke Range Bore size (mm) Stroke range (mm) 10 51 to 299 15 51 to 499 25 101 to 599 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CY1F XB10 Bore size Piping thread type Piping direction Stroke Auto switch Symbol Adjustment bolt symbol (Example) CY1F10R237ALA93XB10

PROFINET Compatible Fieldbus System

(for M12 connector socket) For unused branch connector (OUT). 1: Refer to page 12 for wiring. 2: Refer to page 51 for display -46No.EX-OMT0009 Mounting and Installation Installation Refer to the drawing below. NOTE Tighten the screws while holding the SI unit and the supply/exhaust block assembly so that there is no gap between them.

EXxx-OMY0004

Specifications . 51 10.3. Wiring . 53 10.4. Safe digital I/O Safe digital inputs . 53 10.5. Safe digital I/O Safe power supply (outputs). 54 10.6. Safe parameter values . 54 10.7. Process data for valves . 59 10.8. Output status unit . 59 10.9. LED indicators . 61 10.10. Production label . 65 2 No.EX##-OMY0004 10.11. DIP Switches . 65 10.12. Block diagram . 68 11.

Multi-channel Digital Sensor Monitor ( compatible)

ON When errors are generated (when Er is displayed). 16 to 31 CH4: Measurement value With symbol 16 bit 32 to 47 CH3: Measurement value With symbol 16 bit 48 to 63 CH2: Measurement value With symbol 16 bit 64 to 79 CH1: Measurement value With symbol 16 bit Bit offset 79 78 77 76 75 74 73 72 71 70 69 68 67 66 65 64 Item CH1: Measurement value Bit offset 63 62 61 60 59 58 57 56 55 54 53 52 51