JXCx-OMT0005CN

(P.12) ) 84 - 21. 1byte 2byte 4byte 2byte 4byte (1)2byte 2byte Output Byte6,Byte7 100mm/s IO Output 12byte 100mm/s 16 0064h 00 64 h (2)4byte 64h 00h Byte6 Byte7 Bit7 Bit0 4byte Output Byte8Byte11 700.00mm IO Output 12byte 0.01mm 700.00mm 10 7016 00011170h 00 01 11 70 h (3) 11h 70h Byte8 Byte9 (6) 01h 00h Byte10 Byte11 ALM Bit7 Bit0 4byte Output Byte8Byte11 -700.00mm IO

AWG

Flow Characteristics (Representative values) Condition: Inlet pressure 0.7 MPa AWG20 Rc1/4 AWG30 Rc3/8 AWG40 Rc1/2 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 00 200 400 600 800 00 0 500 1000 1500 0 1000 2000 3000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Conditions:

ZSE1/ISE1

Connector Socket Lead wire Hook 16-6-4 5 Compact Pressure Switch Series ZSE1/ISE1 Dimensions Grommet type: ZSE1-00-14/-15/-18/-19 Connector type: ZSE1-00-14C/-15C/-18C/-19C 23.4 Indicator light (Red) Indicator light (Red) 23 23 15 15 H HYS SET L H L H HYS SET L H Hysteresis setting trimmer Pressure setting trimmer Pressure setting trimmer Hysteresis setting trimmer ZSE ISE 23.4 23.4 Indicator

VQC

-A-1 Interface regulator (B regulator) ARBQ4000-00-B-1 Interface regulator (P regulator) ARBQ4000-00-P-1 P R1 R2 SUP/EXH block plate VVQ4000-16A 02 Rc 1/4 Cylinder port sizes Fill out in case of mixed sizes (CM/LM/NM). 03 Rc 3/8 C8 (N7) C10 (N9) With 8 (1/4") One-touch fitting With 10 (5/16") One-touch fitting With 12 (3/8") One-touch fitting C10 (N11) Bottom ported Rc 1/4 Single wiring Special

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

5 10 15 20 25 30 kPa Pressure loss [kPa] Pressure loss [kPa] 750 kPa 50 kPa 30 0 kPa 0 kPa 20 30 kPa 50 kPa 70 kPa 750 kPa 350 kPa 10 70 kPa 350 kPa 00 10 20 30 40 50 Flow [L/min] Flow [L/min] PF2M711(-L) 100 L/min PF2M721(-L) 200 L/min 40 90 80 70 60 50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa 20 750 kPa 30 kPa 50 kPa 50 kPa 350

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

Connector Socket Lead wire Hook 776 Compact Pressure Switch Series ZSE1/ISE1 Dimensions Grommet type: ZSE1-00-14/-15/-18/-19 Connector type: ZSE1-00-14C/-15C/-18C/-19C 4 . 23 4 . 23 Indicator light (Red) Indicator light (Red) 23 23 15 15 H HYS SET L H L H HYS SET L H Pressure setting trimmer Hysteresis setting trimmer Hysteresis setting trimmer Pressure setting trimmer 4 . 23 4 . 23 Indicator

AC Servo Motor Driver (CC-Link Type)

Please select the station 00, if you want to use for the first time.

LC-OM089xx

64 76 10 00 Spain (34) 945-18 41 00 Belgium (32) 3-355 14 64 Netherlands (31) 20-531 8 Germany (49) 6103 4020 Sweden (46) 8-603 12 00 (420) 5-414 24611 Norway (47) 67 12 90 20 Austria (43) 2262-62 280 Italy (39) 02-927 11 Fig.2-1 P-clip Fig.2-2 U-clip Fig.2-3 Soldering Country Telephone Country Telephone *Websites Kingdom Ireland (351) 1-403 9000 United SMC Corporation www.smcworld.com SMC

EXxx-OMA1018_Eng

(Recommended torque: 0.9 10% Nm) Summary of Product parts LATVIA (371) 781 77 00 Environment Dzelzavas str. 120g, Riga, LV-1021, Latvia Warning This device complies with Part 15 of the FCC Rules.

ø2 One-touch Fittings Series KJ

(mm) Applicable fitting size Model KJY02-M3 KJY02-M5 2 M3 x 0.5 M5 x 0.8 KJR02-04 4 2 KJU02-00 2 KJU02-23 KJU02-04 2 Bulkhead union KJE Plug KJP Applicable tubing O.D. (mm) Model Applicable fitting size Model KJE02-00 2 KJP-02 2 2 Polyurethane tubing Series TU 2 Miniature fittings Series M

Modular Style Regulator with Built-in Pressure Gauge Series ARG

Flow Characteristics (Representative values) Condition: Inlet pressure 0.7 MPa ARG20 Rc1/4 ARG30 Rc3/8 ARG40 Rc1/2 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 00 200 400 600 800 00 500 1000 1500 0 1000 2000 3000 0 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Conditions:

LZ-OM003xx

Spain (34) 945-18 41 00 Denmark (45) 70 25 29 00 Poland (48) 22-548 50 85 Greece (30) 1-342 60 76 Switzerland (41) 52-396 31 31 Belgium (32) 3-355 14 64 Netherlands (31) 20-531 8 Germany (49) 6103 4020 Sweden (46) 8-603 12 00 Protection ground terminal (420) 5-414 24611 Norway (47) 67 12 90 20 Austria (43) 2262-62 280 Italy (39) 02-927 11 terminal on the end of motor, using a metal P-clip

LZ-OM004xx

B C D 44 Mounting J ig to the piston 43 Mounting to workpiece Fem ale thread type Male thread type D o No.LZ-OM00401 B (3/3) (44) 1908-56 38 88 Hungary (36) 1-371 1343 Turkey (90) 212 221 15 12 Finland (358) 9-859 580 Portugal (351) 22 610 89 22 Denmark (45) 70 25 29 00 Poland (48) 22-548 50 85 Greece (30) 1-342 60 76 Switzerland (41) 52-396 31 31 France (33) 1-64 76 10 00 Spain (34) 945-

Series AP3100

Manually operated type (For high pressure and high flow) Diaphragm Valve for Ultra High Purity Series AP3100 Suitable for UHP gas supply line Body material: 316L SS secondary remelt High pressure type: 20.7 MPa and 9 MPa Designed for bulk specialty gas (BSGS) delivery LOTO standard with AP3157, optional AP3125 How to Order (Inlet) (Outlet) AP31 00 2PW MV8 MV8 S Model Ports Code Maximum operating

HRX-OM-X084

INP1 ALARM READY START REF PRSLO / / / / TEMP READY Time when it goes away Contact input signal 1Delay timer of reading / 40 Offset mode OFF Setting of low flow rate alarm 4 5 0 LOFL OFSET MODE READY OVER INP2 INP1 DELAY Upper limit of circulating fluid temperature monitoring function 400 / / / / Contact input signal 1 OFF Detection timer Detection time of low flow rate alarm 4 5 00

HRX-OM-W002

INP1 ALARM READY START REF PRSLO / / / / TEMP READY Time when it goes away Contact input signal 1Delay timer of reading / 40 Offset mode OFF Setting of low flow rate alarm 4 5 0 LOFL OFSET MODE READY OVER INP2 INP1 DELAY Upper limit of circulating fluid temperature monitoring function 400 / / / / Contact input signal 1 OFF Detection timer Detection time of low flow rate alarm 4 5 00

HRX-OM-X071

INP1 ALARM READY START REF PRSLO / / / / TEMP READY Time when it goes away Contact input signal 1Delay timer of reading / 40 Offset mode OFF Setting of low flow rate alarm 3 5 0 LOFL OFSET MODE READY OVER INP2 INP1 DELAY Upper limit of circulating fluid temperature monitoring function 400 / / / / Contact input signal 1 OFF Detection timer Detection time of low flow rate alarm 3 5 00

CEx-OMG0106

ML2B / W1 ML2B / M1 0 0 0 0 Momentum Nm 0 0 Load N 0 Piston Speed m/s Piston Speed m/s ML2B / W2 ML2B / M2 Momentum Nm Load N Piston Speed m/s Piston Speed m/s ML2B / W3 ML2B / M3 20 10 Momentum Nm 5 Load N 3 2 1 Piston Speed m/s Piston Speed m/s ML2B / W4 Allowable Kinetic Energy 00 H or izontal M ounting 100 5 00 Ver tical M ounting 50 Load N 0 0 1 00 Load N 0 50 5 Piston Speed

LEY-OM007

/ / INC()/ / b c 2mm d e f / P.41 7.2 / P.43 7.2 g INP ON INP INP ON / P.41 7.2 h / P.41 7.2 / P.42 7.2 i 100 % 150 % LEY16A 200 % LEY25A / P.42 7.2 j 12AREA ON 12 INC ABS() No.1 148 250 AREA k INP No.0 50+20 = 70 -24- 1 -IN INPAREA a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 100 100.00 3000 3000 0 0 0 100 80.00 90.00 0.50 No.00

JXCx-OMU0026

When the controller is turned ON next time, the default value (January 1st, 2000. 00:00:00) will be set. Therefore, set the date and time again. -13No. JXC-OMU0026 (a) Change to remote mode Change the mode to remote mode in the main window. When the mode is changed to the remote mode, the motors of the connected actuators will turn ON.