VNB

cable O.D. 6 to 8 (D, DL) Pilot port B (Air operated) L (Terminal with indicator light: DL) M (Conduit terminal: T) K (DIN terminal: D) I (Grommet: G) J (Conduit: C) 4 x 2-18 mounting hole Applicable flange Pilot port Rc A B C D E F G H I J K L M Model VNB5-32F VNB6-40F VNB7-50F 1 8 1 4 1 4 130 150 180 210.5 226 250 135 140 155 134 146 162.5 20 24 24 100 105 120 36 42 54 12 12 14 244 259.5

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

EXH Diagrams (a) to (d) show the combination with peripherals. 13-5-9

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 2 x P (Rc, NPT, G) H2 Width across flats B2 2 x NN G Relief port M5 x 0.8 G H1 Width across flats B1 Standard port I Relief port 2 x Eh8 D MM AL A F K NA N N H S + Stroke F ZZ + Stroke (mm) ZZ S P N I E D A 12.5 11 10 10 13 F Bore size Stroke range AL K MM NA NN G H2 41 32 32 26 B2 H H1 22 17 17 13 B1 0 6 6 5 8 8 8 50 45 45 41 200 to 1000 150

VQZ1000/2000/3000

Insert D at the end of the manifold part number.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 707 Series ARP20/30/40 Dimensions 2 x P1 (Port size) A Pressure gauge (Option) Q C OUT IN K V P2 (Pressure gauge port size) B R Bleed port F S U D N Bracket (Option) J M T Panel fitting dimension Y W Plate thickness ARP20(K), ARP30(K): Max. 3.5 ARP40(K): Max. 5 OUT IN Z Pressure Gauge Option

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 765 ARP20/30/40 Series Dimensions 2 x P1 (Port size) A Pressure gauge (Option) Q C OUT IN K V P2 (Pressure gauge port size) B R Bleed port F S U D N Bracket (Option) J M T Panel fitting dimension Y W Plate thickness ARP20(K), ARP30(K): Max. 3.5 ARP40(K): Max. 5 OUT IN Z Pressure Gauge Option

Serial Transmission System Series EX250 Series EX500

PWR COM D D D D D D 3 2 1 Station D side How to Order Solenoid Valves SV 1 1 0 0 F 5 Note) Note) Available with manifold block for station addition. Refer to pages 77 and 81 of SV catalog (ES11-81A).

Flow Control Equipment

How to Order F S K 1 0 03 06 3 2 AS Sealant Option Speed controller None Component Parts Hexagonal lock nut Nickel plated K N No.

5 Port Solenoid Valve Series SQ1000/2000

D Note 1) C Note 2) Note 1) Except double (latching) Note 1) The function symbol is D for double solenoid specifications.

HRL

Users system side To the thermo-chiller 24 VDC +24 VDC (Output) 1 2 +24 VDC (Input) EXT 24 VDC EXT 24 COM Power supply 14 24 COM (Output) 24 COM Run/Stop When using a user s power supply, connect the 24 VDC + side to pin 2 and the COM side of each contact input signal to the users power COM. 3 4.7 k External switch 16 4.7 k Operation mode request (Momentary) 4 4.7 k 24 VDC 6 Power supply

PSxx-OMM0006CN

X X E ZS-35-D X X ZS-35-F X X X X X + F ZS-35-G X X 1/ 1 ZS-24-A A M35 L,M45 L 2 ZS-24-B B M45 L, 2 ZS-24-D D M35 L,M45 L 2 ZS-35-C (01,N01) ZS-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A D D N NPN1 M8 P PNP1 /M8

VCA

D U 25 Approx. 44 R C C R G1/2 E E G1/2 B B 2-P Port size A A D 2-P Port size (S) Port size G1/2 Compatible heavy duty cord Cable O.D. 6.8 to 10 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B C Model A D E F K L M Grommet: G Conduit: C DIN connector: D Conduit terminal: T U 81 91.5 101 103.5 Q 98 101 104 104 R 36 44 53 55.5 S 68 71 74 74 Q 46 50 52 52 R

VCA

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 VX3 L VXA K 2-M Thread depth 6 2-M Thread depth 6 K VN LVC LVA LVH DIN terminal: D Conduit terminal: T LVD F F (Q) Q S 34 LVQ D LQ LVN U 25 R C 44 TI/ TIL C R G1/2 PA E E G1/2 PAX B B 2-P Port size A A D 2-P Port

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D-B5/B6, D-B59W, D-A3/A44 Band mounting Reed switch Tie rod mounting D-A5/A6, D-A59W, D-A3C/A44C D-G5/K59, D-G5NTL, D-G5W/K59W D-G5BAL, D-G59F, D-G39/K39 D-F5/J5, D-F5NTL, D-F5W/J59W D-F5BAL, D-F59F, D-G39C/K39C D-H7, D-H7W, D-H7F, D-H7BAL, D-H7C, D-G5NTL, D-G39A/K39A Band mounting Solid state switch Tie rod mounting 3.4-1 Series CB Prior to Use Precautions Be sure to read before handling

7

Type Applicable cylinder series Auto switch model Applicable magnetic field Electrical entry Wiring (Pin no. in use) Lead wire length Applicable load Indicator light Load voltage D-P3DWASC D-P3DWASE D-P3DWA D-P3DWAL D-P3DWAZ D-P4DWSC D-P4DWSE D-P4DWL D-P4DWZ D-P79WSE D-P74L D-P74Z 2-wire (34) Pre-wired connector 0.3 m 2-wire (14) 0.5 m AC magnetic field (Single-phase AC welding magnetic field

CLQ

Minimum Stroke For Auto Switch Mounting (mm) D-A7 D-A80 D-A73C D-A80C D-A9V D-A7H D-A80H D-F7 D-J79 D-F9W D-F7W D-J79W D-F7BAL D-F79F D-F9BAL D-F7WV D-F9WV D-F7BAVL D-F7V D-J79C D-M9V No. of auto switches mounted D-A9 D-M9 D-A79W 1 pc. 2 pcs. 5 5 5 10 10 15 15 15 15 20 20 20 10 10 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

Integrated Controller

Width across fats B1 Width across fats K L1 L2 C1 H1 End Male Thread [mm] Size B1 C1 D H1 K L1 L2 MM Refer to the Web Catalog for details on the rod end nut and mounting bracket.

Compact Vacuum Ejector Series ZQ

Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Note 1) The above dimensions are for ZZQ1-BSB.

ZQ

Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Dimensions Note 1) The above dimensions are for ZZQ1-BSB.

MK

Note D-F7/J79 D-F7V D-J79C D-F7W/J79W D-F7WV D-F7BAL/F7BAVL D-F79F D-F7NTL Switch mounting screw RS H A 20, 25 BQ-1 (M3 x 0.5 x 8l) Square nut D-A7/A8 D-A73C/A80C D-A7H/A80H D-A79W RZQ Switch mounting screw 32, 40 50, 63 Magnetic body (Steel plate, etc.)