Speed Controller: Standard Type Series AS In-line Type 1

Free flow Controlled flow Model Port size Applicable cylinder bore size (mm) Effective area (mm2) Effective area (mm2) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Weight (g) 4.7 AS1000-M3 M3 x 0.5 20 0.3 20 0.3 2.5, 4, 6 33 AS1000-M5 M5 x 0.8 90 1.4 80 1.2 6, 10, 16, 20, 25 90 AS2000-01 1/8 340 5.2 250 3.8 20, 25, 32, 40 115 AS2000-02 1/4 340 5.2 250 3.8 130 AS3000-02 1/4 810 12.3 810 12.3

Hand Valve Series VH 1

-02/03 3 (Exhaust center) Rc 1/4: 17 VH302-02/03 VH312-02/03 2 (Position) 1 (P) 3 (R) 2 1 VH3 0.71 1/4, 3/8 VH320-02/03 VH330-02/03 3 (Closed center) Rc 3/8: 20 Exhaust center VH321-02/03 VH331-02/03 3 (Exhaust center) (A) 2 (B) 4 VH322-02/03 VH332-02/03 2 (Position) 12 3 4 VH400-02 to 06 VH410-02 to 06 3 (Closed center) 1 (P) 3 (R) Rc 1/4: 45 4 3 VH401-02 to 06 VH411-02 to 06 3 (Exhaust

Hand Valve Series VH

3 (R) 4 3 3 (Exhaust center) VH301-02, 03 VH311-02, 03 Rc1/4: 17(0.9) Exhaust center 2 (Position) VH302-02, 03 VH312-02, 03 2 1 (A) 2 (B) 4 VH3 1/4, 3/8 0.71 3 (Closed center) VH320-02, 03 VH330-02, 03 Rc3/8: 20(1.1) 1 (P) 3 (R) 3 (Exhaust center) VH321-02, 03 VH331-02, 03 2 (Position) VH322-02, 03 VH332-02, 03 12 3 4 3 (Closed center) VH400-02 to 06 VH410-02 to 06 Rc1/4: 45(2.5) 4 3 3 (Exhaust

VKF300

terminal 4 5 6 7 9 Order made Port size M5 01 M5 x 0.8 Rc(PT) 1/8 (port A) VKF332 (with bracket) Body ported (single type) 5 G M5 Body ported (for manifold) 5 G M5 VKF333 5 G 01 VKF334 Base mounted Light/Surge voltage suppressor Valve option Port size For vacuum For low power consumption For vacuum/low power consumption For long loading time 01 Nil V Y Rc(PT) 1/8 (with sub plate) Without

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Type AS1200-M3 Direct cylinder elbow type 2 Bore size JIS Symbol Direct cylinder flat elbow type 4 Symbol Bore size Applicable series Control type AS1200-M3 AS1400-M3 M3 M3 x 0.5 Meter-out Meter-in 0 1 AS120-M5 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 M5 x 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 P.15-11-3 Thread type Cylinder side R Tube side Rc Symbol Metric thread (M3

Drain Separator for Vacuum Series AMJ 1

3/8 F Flow: Right Left R G 04 1/2 N If ordering two options or more, indicate symbols numerically and alphabetically.

Heatless Air Dryer Series ID 1

(Inlet air pressure: 0.7 MPa, Inlet air temperature: 20C) HA How to Order AT ID 20 02 0 ID AMG ID400 Option B Bracket Z Adsorbent for low dew point Basic size AFF 20 30 40 60 Port size AM ID200 02 B 04 06 1 4 B 1 2 B 3 4 Nil Rc Thread type Misc.

PSxx-OMH0002CN

CEUL/CSARoHS C3604() PBT ONBR SUS630SUS304 ( Rc1/4) SUS630SUS430 ( NPT1/4G1/4) 02Rc1/4N02NPT1/4F02G1/4(ISO1179) 3 M12 4 4 45 m 0.72 mm 1.14 mm 225 g( Rc1/4) 210 g( NPT1/4G1/4) (M12 4) () 190 g (M12 4) 3G1/4ISO1179-1 -35No.PS-OMH0002CN-D -36No.PS-OMH0002CN-D Revision history Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

VND

40F, 50F LVQ J (Valve open) LQ Indicator (Option) LVN Pilot port TI/ TIL PA PAX PB 4 x 2-18 mounting hole Applicable flange Pilot port Rc A B C D E F G H J Model 8 10 12 50 40 32 1 8 1 4 1 4 VND50D-32F VND60D-40F VND70D-50F 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24 100 105 120 36 42 54 12 12 14 17-4-41 6 Series VND Precautions Be sure to read before handling.

S Couplers

R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 1/8 1/8 1/4 1/4 With check valve 1/2 1/2 3/4 3/4 Without check valve 1 1 1 1/4 1 1/4 Female thread type Female thread type Body size Port size Part no.

33

4 Allowable operating range Allowable operating range Return port Return port 0.02 0.02 2 2 0.00 0.00 0 2 4 6 8 10 12 14 16 0 2 4 6 8 10 12 14 16 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] Option (-T): High Pressure Pump Mounted HRSE -A-10-T 012 018 012 018 024 Option (-T): High Pressure Pump Mounted HRSE -A-20/23-T 0.3 0.3 Circulating fluid pressure [MPa] Circulating

Speed Controller: Standard Type Series AS In-line Push Locking Type 1

Needle Valve/Flow Characteristics AS3500 Inlet pressure: 0.5 MPa Flow rate (/min (ANR)) Effective area (mm2) Metal handle Resin handle Number of needle rotations JIS Symbol How to Order 02 AS3500 Thread type Material for handle Nil N F Resin Metal Nil 2 Rc NPT G Port size 1/4 3/8 02 03 Caution Be sure to read before handling.

Speed Controller: Standard Type Series AS In-line Push Locking Type 1

Needle Valve/Flow Characteristics AS3500 Inlet pressure: 0.5 MPa Flow rate (/min (ANR)) Effective area (mm2) Metal handle Resin handle Number of needle rotations JIS Symbol How to Order 02 AS3500 Thread type Material for handle Nil N F Resin Metal Nil 2 Rc NPT G Port size 1/4 3/8 02 03 Caution Be sure to read before handling.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

B C D H SNKJ-016B SNLJ-016B SN-020B SN-032B NTJ-010A NTJ-015A NT-02 NT-03 19.6 M12 x 1 4 8.1 M4 x 0.7 3.2 6, 10 17 6, 10 7 21.9 M14 x 1 5 9.2 M5 x 0.8 4 16 19 16 8 30 M20 x 1.5 8 15 M8 x 1.25 5 20 26 20 13 37 M26 x 1.5 8 19.6 M10 x 1.25 6 25 32 25 17 T-bracket 4-TC TH 7 +0.2 0 TU -0.1 -0.3 TN TK TX TV 12 TD H10 TT TY TW Part no.

Quick Exhaust Valve Series AQ

30 to 60C) 1 4 8 3 Note) AQ1500 and AQ1510 are not available. 3 4 Type Port size Symbol 0 5 Type Applicable model Diaphragm Lip AQ2 to AQ5 AQ1 Only Port size Applicable series M5 01 02 03 04 06 M5 x 0.8 AQ1500 AQ1510/2000 AQ2000/3000 AQ3000 1 8 Standard 1 4 0 1 M5 x 0.8 8 3 1 8 Note) AQ150 only 1 2 AQ5000 3 4 Thread type Metric thread (M5) Rc NPT G Nil N F Caution Be sure to read before handling

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Molded, Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: Brass Body, EPDM Seal, Class B Coil, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Molded, Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Molded, Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Molded, Orifice: 4 [350 (3 Port) ø4], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -