Compact Manifold Regulator Series ARM5

ARM Fitting size 18.5 C4 C6 N3 N7 4 6 5/32 1/4 ARP 8.5 14 IR IRV Straight type VEX1 SRH SRP V SRF ARX20 Elbow type VCHR ITV IC W X PVQ Y VEF VEP VER One-touch fittings for regulator VEA Fitting size Straight V Elbow W Elbow X Elbow Y VY2 4, 5/32 2.5 6 11 35.5 6 3 6.5 11 36 VBA VBAT 1/4 6.5 6 11.5 38.5 8, 5/16 AP100 Note) The O-ring is attached.

5 Port Solenoid Valve Series VQZ1000/2000/3000

VQZ Thread type (Cylinder port and 1(P), 3(R2), 5(R1) ports) Cylinder port N1 N3 N7 N9 N11 M5 02 M5 thread Symbol SQ 1/4 thread Nil N T F Applicable tubing O.D. (Inch) 1/8" 5/32" 1/4" 5/16" 3/8" Rc VFS VQZ1000 NPT A, B port NPTF VQZ2000 VFR G VQZ3000 Note 1) 3(R2), 5(R1) port of the VQZ2000 is only G1/16. Note 2) Except VQZ1000.

Modular F.R.L. Pressure Control Equipment

B Port plug PBT, HNBR 1 See below 136010 C Clip Stainless steel 3 136010 One-touch Fittings for Regulator Block Port Plug VVQ0 58A VVQ1000 50A C4 Single unit regulator/ Port plug for regulator block Fitting type One-touch fittings for regulator block Nil L1 Straight Elbow Fitting size 10 Size 4 6 5/32 1/4 Symbol C4 C6 N3 N7 Note) The O-ring is attached.

5 Port Solenoid Valve Series SV

Specification SV1000 SV2000 Applicable series Stacking type cassette base manifold Manifold type Common SUP, EXH 1 (P: SUP)/3, 5 (E: EXH) type Valve stations (maximum) 18 stations 20 stations Max. number of solenoids 18 points 26 points 1(P)/3, 5 (E) port C8, N9 C10, N11 Port size C3, C4, C6 N1, N3, N7 C4, C6, C8 N3, N7, N9 4(A)/2(B) port Flow Characteristics Flow characteristics Port size

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Fittings & Tubing Air Cylinders Rotary Actuators 5 1 C6 LOZ 60 10 SZ3 Clean series CE-compliant CE-compliant Nil Q Actuation type 2 position single solenoid A, B port size (A)4 2(B) 1 C4: 4 One-touch fitting C6: 6 One-touch fitting N3: 5/32" One-touch fitting N7: 1/4" One-touch fitting 1 (P) (EA)5 3(EB) Rated voltage Switch 2 position double solenoid 5 6 24 VDC Nil: Without switch 2(B) (

Secondary Batteries

CE-certified Symbol EX124D-SDN1-X188 DeviceNet (Negative common) Q A, B port size (Inch) A, B port size (Metric) P, E port Applicable series P, E port Applicable series A, B port Symbol C4 C6 C8 M A, B port Symbol N3 N7 N9 M One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 A, B ports mixed One-touch fitting for 5/32" One-touch fitting for 1/4" One-touch fitting for

Table of Contents

Controller model Mounting screw Mounting bracket assembly LC1-1H-N3 M3 x 0.5 LC1-1-N3 Power terminal: TB LC1-1H-N5 M5 x 0.8 LC1-1-N5 LC1-1H-L3 M3 LC1-1-L3 LC1-1H-L5 M5 LC1-1-L5 Communication connector: CN3 Motor power line connector: CN5 Mounting with T-nuts Regenerative absorption unit connector: CN6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

Dedicated Controller

Controller model Mounting screw Mounting bracket assembly LC1-1H-N3 M3 x 0.5 LC1-1-N3 Power terminal: TB LC1-1H-N5 M5 x 0.8 LC1-1-N5 LC1-1H-L3 M3 LC1-1-L3 LC1-1H-L5 M5 LC1-1-L5 Communication connector: CN3 Motor power line connector: CN5 Mounting with T-nuts Regenerative absorption unit connector: CN6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

Electric Actuators

General purpose input/output connector: CN2 LJ1 LG1 LC1 LX LC6D/LC6C Switches Controller model Mounting screw Mounting bracket assembly M3 x 0.5 LC1-1-N3 LC1-1-N3 Power terminal: TB M5 x 0.8 LC1-1-N5 LC1-1-N5 M3 LC1-1-L3 LC1-1-L3 M5 LC1-1-L5 LC1-1-L5 Communication connector: CN3 Motor power line connector: CN5 Mounting with T-nuts Regenerative absorption unit connector: CN6 Controller Command

Electric Actuator with Integrated Guide

Controller model Mounting screw Mounting bracket assembly LC1-1H-N3 M3 x 0.5 LC1-1-N3 Power terminal: TB LC1-1H-N5 M5 x 0.8 LC1-1-N5 LC1-1H-L3 M3 LC1-1-L3 LC1-1H-L5 M5 LC1-1-L5 Communication connector: CN3 Motor power line connector: CN5 Mounting with T-nuts Regenerative absorption unit connector: CN6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

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PSE200

release verification P2(n1) > P1(n2) P2(n2) P1(n1) 101.0 to 101.0kPa MPa kPa P2(n1) < P1(n2) P2(n2) P1(n1) 10.0 to 101.0kPa Adsorption verification OUT1 OUT2 Supply pressure verification Leak test P2(n1) > P1(n2) P2(n2) P1(n1) 10.0 to 101.0kPa CH Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n1) > P1(n2) P2(n2) P1(n1) 0.1 to 1000.0MPa Decreases the set value SET P3(n3

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com OUT2 CH Increases the set value Decreases the set value 1 2 3 4 n2 n1 n4 n3 High pressure:Compound pressure type Positive pressure type High vacuum: Vacuum type PRESSURE For normally closed ZSP SET ISA2 Note) If the hysteresis is set for less than 2 digits

PSE530/200

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com OUT2 CH Increases the set value Decreases the set value 1 2 3 4 n2 n1 n4 n3 High pressure:Compound pressure type Positive pressure type High vacuum: Vacuum type PRESSURE For normally closed ZSP SET ISA2 Note) If the hysteresis is set for less than 2 digits

Series SY3000/5000 Valve Replacement Parts 1 How to Order Port Block Assembly Mounting screw 0V 6A SY One-touch fitting Series Thread type 3 3000 Nil Rc 5 F 5000 G N NPT T NPTF Pilot type ∗ Except M5 Nil Internal pilot R External pilot A, B port size Thre

SY3000 SY5000 Port size 2 One-touch fitting 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 1/8" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting VVQ1000-50A-C2 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VVQ1000-51A-N3 VVQ1000

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Dedicated Controller Series LC1 Uniaxial Type

Mounting bracket Ass'y Mounting screws Controller model M3 x 0.5 LC1-1-N3 LC1-1B-N3 M5 x 0.8 LC1-1-N5 LC1-1B-N5 M3 LC1-1-L3 LC1-1B-L3 M5 LC1-1-L5 LC1-1B-L5 Note) This controller comes with either the T-nuts or T-brackets as accessories.

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

release verification P2(n1) > P1(n2) P2(n2) P1(n1) 101.0 to 101.0kPa MPa kPa P2(n1) < P1(n2) P2(n2) P1(n1) 10.0 to 101.0kPa Adsorption verification OUT1 OUT2 Supply pressure verification Leak test P2(n1) > P1(n2) P2(n2) P1(n1) 10.0 to 101.0kPa CH Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n1) > P1(n2) P2(n2) P1(n1) 0.1 to 1000.0MPa Decreases the set value SET P3(n3

5 Port Solenoid Valve Series SQ1000/2000

N1: 1/8 N3: 5/32 N7: 1/4 Top ports are indicated by LN.

Dedicated Controller

Controller model Mounting screw Mounting bracket assembly LC1-1H-N3 M3 x 0.5 LC1-1-N3 Power terminal: TB LC1-1H-N5 M5 x 0.8 LC1-1-N5 LC1-1H-L3 M3 LC1-1-L3 LC1-1H-L5 M5 LC1-1-L5 Communication connector: CN3 Motor power line connector: CN5 Mounting with T-nuts Regenerative absorption unit connector: CN6 Controller Command Setting List Actuator control commands Parameter value Classification