ELECTRO-PNEUMATIC POSITIONER

100 Rotary type Connection Applicable model Pressure gauge Air Electric Symbol IP800-00 IP800-01 Symbol Pressure Nil Rc1/4 G1/2 0 None M Rc1/4 M201.5 1 0.2 MPa N Rc1/4 1/2NPT 2 0.3 MPa 1 1/4NPT G1/2 3 1.0 MPa 2 1/4NPT M201.5 3 1/4NPT 1/2NPT 4 G1/4 G1/2 Construction Note 1) 5 G1/4 M201.5 0 No terminal box 6 G1/4 1/2NPT With terminal box (Exsd BT5) TIIS (Japan) explosion-proof

10

RJ2725U Model With cap H L L H L H H L H L Collision speed range 0.5 Max. absorbed energy (J) Note) 1 3 10 30 70 6 x 0.75 O.D. thread size (mm) 8 x 1 10 x 1 14 x 1.5 20 x 1.5 27 x 1.5 4 Stroke (mm) 6 7 12 15 25 0.05 to 1 Collision speed (m/s) 0.05 to 2 0.05 to 1 0.05 to 2 0.05 to 1 0.05 to 2 0.05 to 1 0.05 to 2 0.05 to 1 0.05 to 1.5 0.05 to 1 80 Max. operating frequency (cycle/min) Note

Cylinder with Lock Series CLS

M30 x 1.5 35 1/2 98 45 20 110 383 to 1400 112 246 27 M30 x 1.5 35 1/2 98 45 30 8 110 393 to 1400 118 275 30.5 M36 x 1.5 39 3/4 106 50 25 9 120 433 to 1400 For long strokes (mm) With rod boot (mm) Stroke range (mm) Bore size (mm) 125 140 160 Bore size (mm) 125 140 160 Stroke range (mm) RT l ZZ1 h RY 1/5 stroke 30 to 1400 133 406 1401 to 1600 36 164 1/5 stroke 30 to 1400 133 416 1401 to 1600

Series H, DL, L, LL Self-align Fittings

Weight (g) M L2 L1 A 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 DL04-01 15 3.5 23 DL04-02 17 19 4 10 10 23.5 19.6 30 DL06-01 9 25 17 10 19.6 23.5 6 DL06-02 16 19 31 14 12 DL06-03 22 53 26.5 24.5 21.6 22.6 24.5 25.8 24.5 29.4 29.6 30.3 29.4 91 DL08-01 18 32 19 8 14 DL08-02 16 21 38 14 12 24.5 DL08-03 22 54 26.5 31 10 17 DL10-02 23 51 14 26.5 DL10-03 17 22 57 DL10-04 27 28.5 100

Ejector Valve Unit Series ZYY/ZYX

Y 3 X 3 ZZY 45 J 1 U Note 1) With ejector Number of ejectors 1 to 10 Enter the following together with the manifold number: 1. Part no. of solenoid for SY3000/SX3000 2. Part no. of ejector valve for ZYY3000/ZYX3000.

ZU

93 93 93 Vacuum pressure Air consumption 80 80 80 80 Suction flow rate N (l/min(ANR)) Suction flow rate N (l/min(ANR)) Suction flow rate Air consumption N (l/min(ANR)) Air consumption N (l/min(ANR)) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure kPa 67 67 20 67 10 67 Air consumption 53 53 53 53 40 40 40 40 10 5 27 27 27 27 Suction flow rate Vacuum pressure

Air Cylinder

8 63 109 40 Up to 300 24 21 48 22 37 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 45 Up to 300 24 21 52 22 41 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 50 Up to 400 35 32 60 27 45 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 56 Up to 400 35 32 65 27 50 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 63 Up to 400 35 32 70 27 55 18 38 6 11 51 11 M6

Power Clamp Cylinder

Bore size (mm) Tightening torque Description Ibfin Nm 27 to 35 44 to 62 44 to 62 44 to 62 13 to 18 27 to 35 27 to 35 27 to 35 110 to 150 1150 to 1327 1416 to 1770 4248 to 4600 13 to 18 22 to 27 22 to 27 27 to 44 40 50 63 80 40 50 63 80 40 50 63 80 40 50 63 80 3.0 to 4.0 5.0 to 7.0 5.0 to 7.0 5.0 to 7.0 1.5 to 2.0 3.0 to 4.0 3.0 to 4.0 3.0 to 4.0 12.5 to 17.0 130 to 150 160 to 200 480 to 520

CS1

1 !2 !3 !4 !5 !6 !7 !8 !

KN Series Nozzles for Blowing

Weight (g) Connection thread KN-R01-100 KN-R01-150 KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 KN-R02-600 KN-R03-400 KN-R03-600 KN-R04-400 KN-R04-600 KN-R06-600 KN-R06-800 KN-R10-800 1 1.5 1 1.5 2 2.5 6 4 6 4 6 6 8 8 R 1/8 R 1/8 R 1/4 R 1/4 R 1/4 R 1/4 R 1/4 R 3/8 R 3/8 R 1/2 R 1/2 R 3/4 R 3/4 R 1 10 10 14 14 14 14 14 17 17 22 22 27 27 36 21.4 21 31.4 31 30.5 30.1 27.1 31.8 30.1 41.8 40.1

High Vacuum Slit Valve

Application Remarks Body ASSY XGT300-1-1AS XGT313-50336Special parts B Name Order No. Application Remarks Body ASSY XGT300-1-1-3AS Common exchange parts Name Order No.

XG_-OMV0028

XGT 3 1 2 50336 1 C O 1:FKM 2:Kalrez R 4079 Kalrez R DuPont Performance Elastomers 50336 50mm 336mm 2: 3: 1:1 3:300mm A :0.5m D-A93 C 6 (C016 30C006 100 12:AMP ) (2 ) F 9 D CDE-9PF05 5 - 3. 6 - 3-1 1AB 23 2 3 19 2A 21 23 2B 1B 2C 2 2 3 19 3-2 1A 1B 26 8 9 22 13 12 18 9 27 12 13 18 9 18 , 21O 5 6 7 ASSY O 4 3-3 2A2B CLOSEOPEN 8 9 9 13 12 18

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

(mm) U H I J K L O Z M N P S A C D E F B Bore size (mm) 32 31.5 M10 x 1.5 60 4.5 14 8.5 9 depth 7 14 34 5.5 Rc 1/8 58.5 73.5 12 16 45 20 65 40 35 M10 x 1.5 69 5 14 8.5 9 depth 7 14 40 5.5 Rc 1/8 66 75.5 12 16 52 22 67 50 41 M12 x 1.75 86 7 18 11 11 depth 8 19 50 6.6 Rc 1/4 80 87 15 20 64 25 76 63 47.5 M12 x 1.75 103 7 18 11 14 depth 10.5 19 60 9 Rc 1/4 93 91 15 20 77 27 80 80 57.5 M16 x 2

ISE70_75.eng

SET 1. 3) OUT2 operation mode setting *: Only for the output specifications -27 and -67 Error Indication Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system.

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

High performance type Step Motor Controller (Servo/24 VDC)

0 1 22 0 1 0 1 1 0 22 0 1 0 1 1 0 23 0 1 0 1 1 1 23 0 1 0 1 1 1 24 0 1 1 0 0 0 24 0 1 1 0 0 0 25 0 1 1 0 0 1 25 0 1 1 0 0 1 26 0 1 1 0 1 0 26 0 1 1 0 1 0 27 0 1 1 0 1 1 27 0 1 1 0 1 1 28 0 1 1 1 0 0 28 0 1 1 1 0 0 29 0 1 1 1 0 1 29 0 1 1 1 0 1 30 0 1 1 1 1 0 30 0 1 1 1 1 0 31 0 1 1 1 1 1 31 0 1 1 1 1 1 33 No.JXC-OMY0002-A 0OFF 1ON 0OFF 1ON Step No IN5 IN4 IN3 IN2 IN1 IN0 Step OUT OUT OUT

0.4

VQ 0 5 1 1 0 1 VP4 CE-compliant Series VQ 1/2 VQ 1/2 VV5Q11-08C6SV VQ1100-51 VQ1200-51 VQ1300-51 VVQ1000-10A-1 1 setManifold base part no. 2 setsValve part no. (Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

0.50 0.51 0.50 0.38 0.46 2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Type 10-SS5YJ7-20 Body ported Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 10-SYJ723

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

0 19 0 1 0 0 1 1 19 0 1 0 0 1 1 20 0 1 0 1 0 0 20 0 1 0 1 0 0 21 0 1 0 1 0 1 21 0 1 0 1 0 1 22 0 1 0 1 1 0 22 0 1 0 1 1 0 23 0 1 0 1 1 1 23 0 1 0 1 1 1 24 0 1 1 0 0 0 24 0 1 1 0 0 0 25 0 1 1 0 0 1 25 0 1 1 0 0 1 26 0 1 1 0 1 0 26 0 1 1 0 1 0 27 0 1 1 0 1 1 27 0 1 1 0 1 1 28 0 1 1 1 0 0 28 0 1 1 1 0 0 29 0 1 1 1 0 1 29 0 1 1 1 0 1 30 0 1 1 1 1 0 30 0 1 1 1 1 0 31 0 1 1 1 1 1 31 0 1 1 1 1 1

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Configuration format (EX600-SEN3-X80) EX600-SEN3-X80 (27 byte) Byte Bit Parameter Setting value 0..3 Unit No. 0..9 0 4..7 Parameter type 1 1 0..7 Unit ID 9B (Hex) Unit parameter 0 Reserved 0 1 Monitor short circuit (Output) 0: disable, 1: enable 2 Reserved 0 3 Restart after short circuit 0: manual, 1: auto 2 4 Power supply voltage monitor (Control/Input) 0: disable, 1: enable 5 Power supply