4/5 Port Air Operated Valve SYJA3000 Series

B M3 x 0.5 (Piping port) 1.5 1.5 33 36 Manual override B P R R (35) 7 7 36 (2) 7 (13.5) 28.5 15 A 1 (Bleed port) 21 R2 P R1 13 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14 14 15 (Bracket) 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 10 9 36 7.1 2 x M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2 x 3.2 1.5 1.5 22 7 8.2 2.5 (For manifold mounting) 2 x 1.8 2 x M3 x

3

M A Rated flow range Calibration certificate 501 5 to 500 L/min 102 10 to 1000 L/min 202 20 to 2000 L/min Nil None A Note 8) Yes Note 8) Made to Order: Certificate in both English and Japanese Thread type Option 2 Nil Rc N NPT F G Note 1) Nil No bracket With bracket Note 7) Note 1) ISO228 compliant Port size R Symbol Port size Rated flow range 501 102 202 04 1/2 V V 06 3/4 V Note 7) Each

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Description Material Body A Elbow body Handle Body B Needle Needle guide Seat ring Lock nut U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Spacer Gasket Note PBT PBT PBT Brass(1) PBT PBT Brass(1) q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 q w e r t y u i o !0 !1 !2 !3 !4 !

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

1 O-ring NBR !2 O-ring NBR !3 O-ring NBR !4 O-ring NBR !5 O-ring NBR !6 Spacer PBT Note) !7 Gasket NBR, Stainless steel !8 Note) 3/16", 3/8" and 1/2" are made of stainless steel 303.

AR Series Modular Type Regulator

16 25 47.4 11 12.5 M18 x 1 12.5 26 26 25 28 30 4.5 6.5 40 2 18 18.5 AR20-A 1/8, 1/4 1/8 40 67.4 23.5 22 M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 43.9 5.4 15.4 55 2.3 27.3 36.5 17.5 6 AR25-A 1/4, 3/8 1/8 53 70.4 23.5 22 M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 44.3 5.4 15.4 55 2.3 30.3 36.5 17.5 6 AR30-A 1/4, 3/8 1/8 53 83.5 27 28.5 M45 x 1.5 28.5 37.5 65 37.5 66 41 36 46 6.5 24 65 2.3 32.5

MGQ

1 !2 !3 !4 !5 !6 !7 !8 !

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

4 8 6 11 22.5 (13) (10 + 1/2ST) 4 Model ST 13 + ST 45 + ST 58.5 + ST 10 + 1/2ST CXS6-10-XB19 10 23 55 68.5 15 CXS6-20-XB19 20 33 65 78.5 20 CXS6-30-XB19 30 43 75 88.5 25 CXS6-40-XB19 40 53 85 98.5 30 CXS6-50-XB19 50 63 95 108.5 35 CXS10--XB19 17 S ZZ 15 1 10 7 SS 2-3.4 through 2-6.5 counter bore depth 3.3 2-2.5 x 14l AW (spring pin) 20 Z 9 5 1 35 0.2 35 0.2 33.6 46 44 20 6.3 5 2.1 2-M4 x

Secondary Batteries

(mm) 4 6 8 4 6 8 1(P) 1(P) 1(P): Male thread 2(A): One-touch fitting Applicable tubing O.D. (mm) 1 8 4 Port size R Connection thread R Applicable tubing O.D.

PA3000/5000/PAX1000

Type PA3000 115 68 85 105 4-7 7.5 FLUID OUT Rc 3/8 5.5 AIR SUP (P1) Rc 1/4 FLUID OUT PROCESS PUMP P1 2 90 74.5 FLUID I N P2 44.5 3 AIR SUP (P2) 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (P1) Rc 1/4 112 56 165 56 RESET PROCESS PUMP FLUID OUT 167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP (P2) FLUID IN Rc 1/2, 3/4 Rc 1/4 10

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

61 78 8 39 23 13.7 35 7 61 B C D E F G H (Mounting hole) ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5

Series LQ3 High Purity Fluororesin Fitting

2 2 3 3 3 4 4 4 5 5 5 6 6 6 Tubing Size (Inch) 1/8 x 0.086 1/4 x 5/32 1/4 x 5/32 3/8 x 1/4 3/8 x 1/4 3/8 x 1/4 1/2 x 3/8 1/2 x 3/8 1/2 x 3/8 3/4 x 5/8 3/4 x 5/8 3/4 x 5/8 1 x 7/8 1 x 7/8 1 x 7/8 Thread Size A A B A B C A B C A B C A B C 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/4" 3/8" 1/2" 3/8" 1/2" 3/4" 1/2" 3/4" 1" Tubing Connection E 1A LQ3 Size Combination Class Fitting Style Symbol E T P U Combination

Series 10-, 21- AW-B Filter Regulator

3/4 3/4, 1 1/8 1/8 1/8 1/8 1/8 M28 x 1 M38 x 1.5 M42 x 1.5 M42 x 1.5 26 29.4 37.3 37.3 43.3 Note) The dimension of C is the length when the filter regulator knob is unlocked. 1082 A

PSE200

indicator, Display color: Yellow Display For channel display: 1-digit, 7-segment indicator, Display color: Red Red (Lights up when output is ON.)

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

Air slide table MXP/MXPJ6 11221122Dimensions: MXP6 Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment 11-/22MXP6-5 W AA H 7 4 depth 2.5 2.5 11.2 2.3 3.5 1 3 4M3 x 0.5 depth 3 +0.030 0 0.05 D B 9.5 1 3.5 20 14 13 18 C 6 +0.030 0 depth 2.5 2.5

AR20-B to AR60-B

Set pressure range [MPa] 0.1 to 1.7 Ambient and fluid temperature [C] 5 to 60 (with no freezing) Applicable Model Applicable Model Model AR25-B AR30-B AR40-B AR40-06-B AR50-B AR60-B Model AR20-B AR25-B AR30-B AR40-B AR40-06-B AR50-B AR60-B Port size 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 r BG AR B B X430 30 03 BG q 30 AR

PFxx-OMJ0005CN

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

indicator, Display color: Yellow Display For channel display: 1-digit, 7-segment indicator, Display color: Red Red (Lights up when output is ON.)

Single Axis Electric Actuator Serriies LJ1S Slider Guide

LJ1-7-G/Matsushita Electric Industrial Co., Ltd. 100 Driver Non-standard motor electric actuators LJ1 and LG1 75 90 5 30 (195) AC servomotor short stroke electric actuator LX How to order 13 G LJ1 05 Compatible model 1 B 1 LJ1-7-R/Mitsubishi Electric Corporation Brake G R Y Nil B Matsushita Electric Industrial Co., Ltd.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators 11-/22-MXP6-5 W AA H 7 4 depth 2.5 2.5 11.2 2.3 3.5 1 3 4 x M3 x 0.5 depth 3 +0.030 0 D B 0.05 9.5 1 3.5 20 14 13 18 C 6 +0.030 0 depth 2.5 2.5 Width across flats 6 E 5 6 5 Prepared hole diameter 3.3 2 x M4 x 0.7 Piping port 2 x M3 x 0.5 (Plug: M-3P) F QL 6 13.5 17 Stroke: S M 2 0.05 M4 x 0.7 Mounting base side B D 7 5 2 x M3 x 0.5 Piping

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

1 !