7.5

20.5 23 19 21.5 18 20.5 23 19 21.5 18 20.5 23 19 21.5 18 20.5 23 19 14 Series SJ2000/3000 D-sub Connector / Flat Ribbon Cable / PC Wiring Plug-in Connector Type Dimensions: SJ3000 for D-sub Connector SS5J3-60FD U (S, R, RS) 1 2 Stations (Pitch) P = 10 [External pilot spec.] 23.6 12.8 32.1 15.4 15.6 3/5 3/5 2 2 2 2 2 2 2 31 46.2 54.5 1 1 58.2 4 4 4 4 4 4 4 D D D M5 x 0.8 [4(A), 2(B) port]

One-touch Fittings Series KQ2

16 11.11 22 18 1 8 2.5 15.5 1 8 1 4 10-32UNF 19.5 17 13.5 14.29 2.3 12.7 14 8 1 16 5 32 11.11 18 22 3 16 1 8 1 4 19.5 24 22 21 18.4 22.5 13.5 14.29 2.3 10-32UNF 20.4 8 12.7 14.29 11.11 3 16 1 8 1 4 10-32UNF 16.5 18 3.5 KQH05-32 15 2.3 10.3 13.6 15.4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 1 2 18.5 1 4 14.29 4.6 17 17 16.5 24.5 20.5 15.5 26.5 23 17.46 28.5 26.5 22 30.5 33.5 29 26.5

Base Mounted Metal Seal/Rubber Seal Series VQ

2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 1 station { VQZ VV5Q11 2 stations { 17 16 15 14 2 1 D side U side 25 24 13 3 3 stations { VQD 23 18 12 4 1 2 3 Stations 26 22 21 20 19 4 stations { 11 5 10 9 8 7 6 5 stations { 6 stations { As the standard electrical wiring specifications, double wiring (connected to SOL.

MU

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

MU

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

VQC

A Station 1 1 SOL. A Station 2 14 SOL. A Station 3 2 1 SOL. A Station 4 14 15 2 SOL. A 15 3 3 4 5 6 7 8 Station 5 16 17 18 19 20 SOL. B 16 SOL. A 4 Station 6 SOL. B 17 SOL.

MU

138 150 180 187 MM M6 X 1 Depth 12 Model MUWB25 MUWB32 MUWB40 MUWB50 MUWB63 KA 10 12 14 18 18 N 14 15.5 16 21.5 21.5 ND M5 X 0.8 M6 X 1 M8 X 1.25 M10 X 1.5 NE 4.3 5.1 6.9 8.7 10.5 S 55 58 60 74 75 H 14 14 15 18 21 ZZ 83 86 90 110 117 M10 X 1.25 M8 X 1.25 Depth 13 M12 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 8 1 M8 X 1.25 Depth 13 8 1 M10 X 1.5 Depth 15 4 1 M10 X 1.5 Depth 15 M12 X 1.75 4 1 The

Stainless Steel 316 Fittings

19.1 3 4 4.1 4 10 16.5 17.1 19.6 19.5 9 9 11 12 3.8 3.7 8.5 7.2 8.1 13.4 22.6 12 12.8 23.5 17.8 21.2 23.8 38.6 26.6 29 34.8 1/8" 10-32UNF 10-32UNF 1/8 12.6 5/32" D Applicable tube 10-32UNF 1/8 1/4 3/8 1/8 1/4 3/8 1/8 1/4 3/8 1/2 1/4 3/8 1/2 12 13.5 1/4" M 20.5 14 18 4.76 A L 10.7 Connection thread 24.7 5.56 17.2 14 16.1 5/16" (NPT) 23.1 6.35 23.3 18 H 25.2 27.1 5.56 17.2 17 16.6 3/8" 6.35

ZX

ZP 18 4 15.5 ZCU 4.5 Bracket A (Standard accessory) AMJ Note 2) Dimensions : For mounting bracket A : For mounting spacer 1.

5 Port Solenoid Valve, Series VQC

A Station 1 1 SOL. A Station 2 14 SOL. A Station 3 2 1 SOL. A Station 4 14 15 2 SOL. A 15 3 3 4 5 6 7 Station 5 16 17 18 19 20 SOL. B 16 SOL. A 4 Station 6 SOL. B 17 SOL.

Speed Controller with Indicator

Metal parts material Applicable tubing material Metric size Inch size Seal method Body size Port size 2 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" Note) Gasket seal 1 M5 x 0.8 Note) 10-32UNF Note) 1/8 2 Note) Note) 1/4 Sealant R 3 1/4 NPT Brass/ Steel wire 3/8 Nylon (Series T,TIA) Note) Stainless steel 4 1/2 Note) Soft nylon (Series TS,TISA) 1/8 2 Note) 1/4 Polyurethane (Series

2/3 Port Valve for Various

G 53 55 56 C ) (? ! D !"# ! ! Coil insulation type # 9% ,* /) 3 ? $% % 33 1 ,) % % 1 ) ,, ) /) H B 7 !"# ! , & Ordering example VX021-001GB-01 !"# $ % & VX021-002DBT-04 ' ( !

Air Slide Table Series MXW

Refer to the Specific Product Precautions. 8H9 + 0.036 0 depth 9 Operating port Rc 1/8 (NPT 1/8, G 1/8) 9 8 x M6 x 1 thread depth 18.5 Note) A Operating direction 8H9 + 0.036 0 depth 9 (Insert) (Hexagon socket head taper thread plug) 98.6 126 55 8 50 37 Y 50 Y 50 10 43 209 Operating port Rc 1/8 (NPT 1/8, G 1/8) B Operating direction Operating direction (Hexagon socket head taper thread plug

17

1 !7 !1 !8 12 to 25 Over 100 stroke 50 or more !

Refrigerated Air Dryer

45 50 45 50 55 60 65 70 75 80 5 10 15 1.73 1.15 0.59 0.62 1.3 1.07 1 0.72 1 1 1.68 0.81 0.82 0.95 0.88 0.68 0.9 0.95 0.57 0.86 1 0.82 1.06 0.79 1.11 1.16 Data Ambient temperature Data Air flow capacity Series IDF Series IDU Series IDF Correction factor Correction factor Model IDF1E IDF2E IDF3E IDF4E IDF6E IDF8E IDF11E Ambient temperature (C) Ambient temperature (C) 25 30 32 35 40 25 30

45

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

Integrated Controller

Weight [g] Auto switch model D-M9NE(V) D-M9PE(V) D-M9BE(V) 0.5 m (Nil) 8 7 1 m (M)1 14 13 Lead wire length 3 m (L) 41 38 5 m (Z)1 68 63 1 The 1 m and 5 m options are produced upon receipt of order.

Vacuum Unit

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 For 2 stations manifold 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold d Models and Dimensions D Symbol Applicable size d A L D Weight [g] Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4" 18 35 8.5 1 Orange 09 5/16" 20.5 39 10 2 Orange Connector type 1 D sub-connector (25

45

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

Stopper Cylinder

KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5