VS 8-2/VS 8-4

, NPTF 1/8" Pilot port 2 x Rc, G (According to ISO1179-1), NPTF 1/2" 3(R) port M4 x 7 earth thread Rc, G (According to ISO1179-1), NPTF 1/8" Pilot exhaust port C1 (M12) I E 95 65.4 41.2 0 0 3/5 3/5 2 2 2 2 14 12 60 1 1 39 4 4 4 4 30 21 1 1 33.5 24.5 34.5 17 13 C2 (M12) 27 (n-1) x 27 64.5 2 x Rc, G (According to ISO1179-1), NPTF 1/2" 1(P) port 2n x Rc, G (According to ISO1179-1), NPTF 3/8"

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36 46 60 70 N 11 18 18.5 20 26 ZZ 103 132 137 156 182 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 Model 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 P (Piping port) Model Mounting nuts (2 pcs.) are shipped together.

HRX-OM-W002

WH WH YL YL OR OR BK RD RD RD BL BK BK 2/2 1/2 1/2 2/2 3 3 (CN7) (CN2) (CN3) 2 2 1 1 (CN5) (CN1) (CN1) 22 23 25 26 27 28 23 35 36 (CN6) 20 34 21 21 12 10 15 16 17 18 19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 24 14 34 2B 1B 1A 3A 2A 3B Main Board PCB2

HRX-OM-X084

G2Yellow/Green 17 Brown Blue 18 (CN1) 1/2 CB Red Brown 19 1A Circuit breaker PT1 White Blue 20 2A Circulating fluid outlet White Blue 21 3A 22 Blue (CN6) 1/3 Blue Brown 23 21 Blue 24 Brown 35 Black Black Black Black 25 Blue Blue 36 FL Flow rate sensor 26 Blue Blue Black 34 27 (CN5) 1/3 Brown Blue 28 White 1 1 1 2 1 3 3 1 2 4 6 7 5 Circulating fluid returnT1 8 9 White Blue (CN1) 2 2 (CN2)

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

-03-07(S)A 1/4" 3/8 19 11.2 16.6 21.8 32.1 28.7 42.3 40.7 37.1 35.5 13.3 29 (30) AS32l1FG-03-09(S)A 5/16" 13.2 22.7 33 14.2 AS32l1FG-03-11(S)A 3/8" 15.5 26.7 37 28.2 15.6 30 (31) AS42l1FG-04-11(S)A 3/8" 1/2 24 (23.8) 15.5 18.8 27.4 40.3 (40.2) 36.2 50.8 49.2 43.7 42.1 15.6 52 (51) AS42l1FG-04-13(S)A 1/2" 19.3 30.9 43.8 (43.7) 34.7 17 54 (53) 20.9 30.2 (30.3) 1/4 17 (17.5) 13 Note 1) Reference

HRX-OM-X071

HRX-OM-X071 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

0 mm Stroke length tolerance 11-: Fluorine grease Grease 22-: Lithium soap base grease Grade 1 Grade 1 Without adjuster Particle generation grade (Refer to front matter pages 13 to 22 for details.)

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators 11-/22-MXP6-5 W AA H 7 4 depth 2.5 2.5 11.2 2.3 3.5 1 3 4 x M3 x 0.5 depth 3 +0.030 0 D B 0.05 9.5 1 3.5 20 14 13 18 C 6 +0.030 0 depth 2.5 2.5 Width across flats 6 E 5 6 5 Prepared hole diameter 3.3 2 x M4 x 0.7 Piping port 2 x M3 x 0.5 (Plug: M-3P) F QL 6 13.5 17 Stroke: S M 2 0.05 M4 x 0.7 Mounting base side B D 7 5 2 x M3 x 0.5 Piping

VXA31/32

Refer to pages 17-3-54 and 17-3-55 for specifications and models.

Thermo-chiller/Rack Mount Type

1 w !2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

LFE-OMY0008

] [F90] 55 OFF [F98] 56 OFF [F99] 57 OFF 30 [F10](41 ) OUT2 (20L/min ) OFF OFF OFF OFF 27 No.LFE*-OMY0008 [F 1] OUT1 OUT1 1. 1. 1. 1.

AFF

63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 , , 1 4 3 8 40 40 50 50 55 55 65 85 , Misc.

VCL

M5 8 81.5 1/4, 3/8 VCL31 24 25 59 46 57 60 54.5 48.5 101 57 68 104 30 50 36.5 13.5 15 32 25 23 M5 8 86 1/2 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 107 22 45 41 11 17 36 22.5 23 M5 8 90 1/4, 3/8 VCL41 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 41 13.5 17 36 25 23 M5 8 94 1/2 26 26.5 70 48 68 62 65.5 50.5 103 68 70 119 35 60 41 17.5 17 36 30 28.2 M5 8 102 3/4 Note) For class

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

AREA4 33 AREA4 33 N.C. 1 N.C. 1 4 4 Load Load INP1 14 INP1 14 N.C. 1 N.C. 1 24 24 Load Load INP2 34 INP2 34 N.C. 1 N.C. 1 5 5 Load Load INP3 15 INP3 15 N.C. 1 N.C. 1 Load Load 25 25 INP4 35 INP4 35 ALARM1 ALARM1 Load Load N.C. 1 16 N.C. 1 16 6 6 ALARM2 ALARM2 Load Load 36 36 N.C. 1 N.C. 1 26 26 ALARM3 ALARM3 Load Load 17 17 N.C. 1 N.C. 1 7 7 ALARM4 ALARM4 Load Load 37 37 N.C. 1 N.C. 1 27

Soft Nylon Tubing TS/TISA Series

Refer to back page 50 for Safety Instructions and pages 13 to 17 for Fittings and Tubing Precautions. Note 2) Applicable fittings Note 2) 3) One-touch fittings, Insert fittings, Self-align fittings, Miniature fittings Caution Min. bending radius Min. bending 15 12 23 17 45 34 55 42 65 50 90 70 18 12 27 15 30 23 55 42 65 50 radius mm Note 4) Bending value (Reference) 1.

VXA21/22

42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SOL.A 1 station 2 stations 3 stations 4 stations 1 () SOL.A 14 () SOL.A 2 () 1 SOL.A 14 15 () 2 SOL.A 15 3 () 3 4 5 6 7 8 9 10 11 12 13 5 stations 16 17 18 19 20 21 22 23 24 25 SOL.B 16 () SOL.A 4 () 6 stations SOL.B 17 () SOL.A 5 () 7 stations SOL.B 18 () SOL.A 6 () 8 stations SOL.B 19 () COM. 13 (+) Connector terminal no.

VQ5000

Polarity Lead wire color Dot marking SOL.A 1 () (+) Black None SOL.B 14 () (+) Yellow Black 1 station 1 1 2 3 Stations D side U side 14 SOL.A 2 () (+) Brown None 2 15 VQC SOL.B 15 () (+) Pink Black 2 stations 3 16 4 SOL.A 3 () (+) Red None 17 5 SOL.B 16 () (+) Blue White 3 stations SQ 18 6 19 SOL.A 4 () (+) Orange None 7 SOL.B 17 () (+) Purple None 4 stations 20 VQ0 8 21 SOL.A 5 () (+) Yellow

CRQ2

Thread type Port type Port type Nil Nil TF TN TT Size 10, 15 Number of auto switches Port type Nil Nil TF TN TT Size 10, 15 M5 Rc 1/8 G 1/8 NPT 1/8 NPTF 1/8 M5 Rc 1/8 G 1/8 NPT 1/8 NPTF 1/8 Nil S 2 pcs. 1 pc. 20, 30, 40 20, 30, 40 Applicable Auto Switch/Refer to page 11-11-1 for further information on auto switches.

MK

8 1 8 1 4 1 4 0 0.062 0 0.062 0 0.062 0 0.062 MK2B32 MK2B40 MK2B50 MK2B63 54 61 73 86 34 40 50 60 60 69 86 103 12 12 15 15 45 52 64 77 5.5 5.5 6.6 9 31.5 35 41 47.5 9 depth 7 9 depth 7 11 depth 8 Rc / Rc / Rc / Rc / 30 30 37 48 14 14 17 17 20 24 30 35 7 7 8 9 4.5 5 7 7 6.5 6.5 7.5 7.5 14 14 19 19 16 16 20 20 3 3 3.5 3.5 M10 x 1.5 M10 x 1.5 M6 x 1.0 M6 x 1.0 17 17 22 28.5 101.5 76 70 81.5