1

20 25 18 22 24 30 34 40 46 58 13 15 18 21 24 27 32 39 6 8 10 13 16 16 20 20 11 11 10.5 11.5 12.5 14 12 16.5 26 30 36 42 48 54 64 78 8 10 12 16 20 20 25 25 6 8 10 12 16 16 20 20 M4 x 0.7 90 94 109 109.5 135.5 142 155 160 13 15 18 21 24 27 32 39 M4 M4 M5 M5 M6 M6 M8 M10 7 7 9 9 9 9 10 10 5 5 6 6 10 10 12 12 42 46 53 53.5 59.5 66 72 77 19 19 30 30 38 38 60 60 8 8 10 10 12 12 16 16 51 58 68

Hydraulic

22 M16 x 1.5 30 26 3/8 5 43 112 11 10 9 50 63 21 28 8 80 60 22.4 30 17 17 13 M10 x 1.5 22 16 25 M18 x 1.5 30 26 3/8 5 47 116 11 12 10 55 80 26 32 8 100 75 28 32 22 20 15 M12 x 1.75 26 19 29 M22 x 1.5 35 30 1/2 5 57 127 11 16 13 65 100 34 38 6.5 118 90 35.5 35 27 19 16 M12 x 1.75 27 21 34 M27 x 2 35 32 1/2 8 66 137 12 20 16 80 125 34 38 6.5 140 112 35.5 35 27 19 16 M14 x 2 27 24 34 M27 x

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Digital Unit M12 connector (5 pins) M8 connector (3 pins) D-sub connector Spring type terminal block Input Unit 8 inputs 8 inputs 8 inputs 16 inputs 16 inputs 16 inputs 8 inputs 8 inputs 8 inputs 16 inputs 16 inputs 16 inputs 16 inputs 16 inputs 16 inputs Output Unit 8 outputs 8 outputs 8 outputs 16 outputs 16 outputs 16 outputs 16 outputs 16 outputs 16 outputs Input/ Output Unit 8 inputs

Air Cylinder

20.5 32.5 44.5 6 JCM 16 12.5 21 33 45 51 75 93 105 6.5 6 12 12 21 25 39 5.5 CM2 D-M9lV 10 13 13 20.5 32.5 44.5 6 16 12.5 12.5 21 33 45 51 75 93 105 6.5 CM3 6 8 17 21 35 1.5 Band mounting D-A9l 10 9 16.5 28.5 40.5 2 CG1 16 8.5 17 29 41 47 71 89 101 2.5 6 8 8 17 21 35 1.5 CG3 D-A9lV 10 9 9 16.5 28.5 40.5 2 16 8.5 8.5 17 29 41 47 71 89 101 2.5 JMB 6 7.5 16.5 20.5 34.5 1 D-H7l/H7C D-H7lW

Made to Order

A + Stroke MGQM (Slide bearing) A, E Dimensions MGQL (Ball bushing bearing) A, E Dimensions A E A E Bore size (mm) Bore size (mm) 11 to 99 st 0 11 to 39 st 4 11 to 99 st 11 to 39 st 55 41 to 99 st 16 41 to 99 st 12 16 39 12 16 43 43 49 0 6 65 22 A E A E Bore size (mm) Bore size (mm) 21 to 74 st 0 21 to 39 st 10 21 to 74 st 61.5 21 to 39 st 74 76 to 199 st 14.5 41 to 199 st 27 76 to 199 st

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

AC Servo Motor Driver (Pulse input type/Positioning type ）

POSITIONING MODE . 16-4 16.1 FUNCTIONS AND CONFIGURATION . 16-4 16.1.1To use positioning mode . 16-4 16.1.2 Positioning mode specification list . 16-5 16.1.3 Function list . 16-8 16.2 SIGNALS AND WIRING . 16-12 16.2.1 I/O signal connection example . 16-12 16.2.2 Connector and signal arrangement . 16-18 16.2.3 Signal (device) explanations . 16-21 16.2.4 Analog override. 16-41 16.2.5 Internal

Combination Cylinder

20 25 25 28 32 17 17 20 16 20 20 25 30 36 36 40 40 50 55 65 80 90 90 90 6.5 6.0 6.0 8.0 8.0 43 43 43 14 14 14 15 17 17 21 21 16 16 15 17 17 21 21 16 16 11 11 11 11 11 16 16 8 11 11 13 16 15.0 18.0 25.0 31.5 35.5 32.0 36.0 40.0 18.5 18.5 18.5 W/o rod boot W/ rod boot Bore (mm) 40 50 63 80 100 125 140 160 J K KA L MM N P RR S U W H 51 58 58 71 72 110 110 120 Z 234 261 280 327 356 ZZ 244 273

CL

59 67 73 77 85 112.5 121 133 10 12 16 20 25 25 28 32 17 17 20 16 20 20 25 30 36 36 40 40 50 55 65 80 90 90 90 15 17 17 21 21 16 16 11 11 11 11 11 16 16 6.5 6.0 6.0 8.0 8.0 43 43 43 14 14 14 15 17 17 21 21 16 16 30 35 35 40 40 50 50 56 27 32 32 37 37 47 47 53 60 70 86 102 116 145 161 182 15.0 18.0 25.0 31.5 35.5 32.0 36.0 40.0 18.5 18.5 18.5 W/o rod boot W/ rod boot Bore (mm) 40 50 63 80

Air Cylinder Series CA2

23 37 21 116 4 40 204 1/2 Up to 750 40 37 116 41 92 30 20 52 14 21 72 16 72.8 87.5 M12 x 1.75 11 26 17 M26 x 1.5 23 40 21 126 4 40 215 1/2 For more information about the rod end nut and accessories, refer to page 367.

Table of Contents

Model A B C D Y Y B C D Flat A Model ZPT10D-B5-A10 10 12 15 24 6 Flat with ribs U C ZPT13 -B5-A10 U C ZPT16 -B5-A10 U C ZPT16D-B5-A10 ZPT10 -B5-A10 16 18 16 25 7 10 12 1.7 12 21 3 13 15 1.8 Dimensions by Stroke 16 18 12.5 21.5 3.5 1.2 10 16 G Model Dimensions by Stroke E F E F 10, 13 16 ZPTD10-B5-A10 35.5 23 71.5 36.5 72.5 G Model E F E F ZPTD20-B5-A10 45.5 109.5 46.5 110.5 51 U C ZPT 20-

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Air Cylinder Series CM2

13 13 13 16 Head end lock 23 23 21 21 Head end lock 126 130 130 159 Double end lock 83 83 83 101 Double end lock 24 24 24 24 Double end lock 23 23 21 21 Double end lock 137 141 141 167 CM2 CG1 Axial foot style: CBM2L Bore size A Stroke -H -R -W MB N L MB1 CA2 ZZ + Stroke LS + Stroke CS1 N L CBM2G Bore size Stroke Head side flange style: A -H -R -W Rod side flange style: CBM2F Bore size A

CA2

37 21 116 4 40 204 1/2 up to 750 16 40 37 116 41 92 30 20 52 14 21 72 72.8 87.5 M12 x 1.75 11 26 17 M26 x 1.5 23 40 21 126 4 40 215 1/2 For more information about the rod end nut and accessories, refer to page 6-8-13.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

34.5 33.5 14 20 17 10 MQR 6 4 17 16 12 16 34.5 33.5 20 6 10 16 9 16 11 34.5 33.5 30.5 29.5 20 14 17 T 19.5 16 21 16 47.5 38 44.5 37 25 20 22.5 17 21 25 22.5 19.5 47.5 38 47.5 38 52.5 48.5 64 58.5 78 70 44.5 10 5 22.5 19.5 18 21 47.5 44.5 25 9 21 16 21 16 24 21 32 24 41 32 25 20 25 20 29 25 37 29 49 37 21 47.5 25 19.5 44.5 22.5 17 22.5 17 24 22.5 26.5 24 30 26.5 16 19.5 16 22 19.5 24 22 26

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A 10 12 16 20 22 28 38 44 10 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 21.5 6 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 7 14.6 21.5 32 34 41 42 56 71 79 10 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 5 5 8 10 10 14 18 22 +0.048 0 5 6.4

AC Servo Motor Driver (Network card type ）

1 16.

ZP

M22 x 1.5 Width across flat 14 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat 14 (Hexagon) Width across flat 30 (Hexagon) 1/8 (Rc, NPT, NPTF) 8 8 Width across flat 27 (Hexagon) 35 16 Width across flat 27 (Hexagon) 35 16 9 9 9 9 M18 x 1.5 Width across flat 21 (Hexagon) 4 x M5 x 10 (J) M18 x 1.5 Width across flat 21 (Hexagon) 4 x M4 x 8 (J) (J) Width across flat 21 (Hexagon) 70 I 45 I I H

Table of Contents

(mm) WC 20 24 32 42 52 BF VA 4H9 4H9 5H9 6H9 6H9 UC M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 ZD 6 10 12 16 20 VB 4 4 5 6 6 BG UE 5.5 5.5 6.6 8.6 8.6 AJ 9 9 11 13 13 UD 10 10 12 16 16 AG 19 22 35 AH 9 12 15 18 20 FX 22 26 32 40 50 AF 18 21 30 35 48 BE 48 58 68 WD 1.5 1.5 1.5 2 2 ZG 15 16 18 22 26 ZF 20 21 28 32 41 ZE 5 8 10 14 17 Model MHSH3-32DB MHSH3-40DB MHSH3-50DB MHSH3-63DB MHSH3

5

Applicable bore size A1 L L1 MM Y-J010C 10 8 15.2 21 M4 x 0.7 Part no. Applicable bore size B1 C1 d H1 Part no. Applicable bore size B2 C2 d H2 SNJ-010C 10 11 12.7 M8 x 1.0 4 NTJ-010C 10 7 8.1 M4 x 0.7 3.2 Y-J016C 16 11 16.6 21 M5 x 0.8 SNJ-016C 16 14 16.2 M10 x 1.0 4 Part no.