Vacuum Pad

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

Vacuum Pad

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

Vacuum Pad

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

Vacuum Pad

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

CG5-S

20 25.6 30 M10 x 1.25 20 12.8 14 IY-G03SUS +0.5 +0.3 +0.058 0 +0.070 0 I-G04SUS Y-G04SUS 40 40 10 10 18 18 M14 x 1.5 42 14 22 30 M14 x 1.5 12 14 42 16 22 41.6 30 36 12 14 IY-G04SUS +0.5 +0.3 +0.5 +0.3 I-G05SUS Y-G05SUS 50, 63 50,63 14 14 22 22 M18 x 1.5 56 18 28 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 IY-G05SUS +0.070 0 I-G08SUS Y-G08SUS 80 80 18 18 28 28 M22 x 1.5 71 21 38 50 M22 x

Step Motor Controller

Connector C Actuator side (8) (Terminal no.) 1 2 5 6 (14) (18) A1 B1 (13.5) Cable length (L)[m] 1 3 5 8 A B C (17.7) (17.7) 1 2 1.5 3 5 8 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) 10 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) Controller side 15 (14.2) Connector C (Terminal no.) 1 2 5 6 20 (5.5) (6.3) Actuator side (14) (18) (Terminal

Compact Rotary Actuator Series CRQ2

Applicable shaft type: W CRBU2 X = Y = Long shaft side Long shaft side Long shaft side CRB1 Long shaft side MSU X = CRJ Short shaft side Short shaft side Short shaft side CRA1 Y = Y = Short shaft side Size 10, 15 Size 20, 30, 40 CRQ2 (mm) (mm) (mm) X 2 to 18 2 to 20 17 to 30 18 to 32 18.5 to 36 Y 1 to 9 1 to 10 1 to 15 1 to 18 1 to 20 Y 1 to 9 1 to 10 1 to 15 1 to 18 1 to 20 Size 10 15 20

Free Mount Cylinder

(mm) DQ HQ HP 4 6 8 10 13 16 20 25 32 40 50 10 16 25 40 6 8 10 13 16 20 25 32 40 50 2.6 4.8 31 12 7 26 10 7 31 12 9 26 10 9 10 10 26 26 2.6 4.8 32 13 7 32 13 9 DQ HQ HP ZP ZC(D)UKD16 ZC(D)UKR16 12 12 31 31 15 12 33 18 16 37 28 20 44 DQ HQ HP 12 18 12 15 36 15 18 20 41 12 16 37 ZC(D)UKD20 ZC(D)UKR20 ZP 12 33 12.5 18.5 33.5 23 14 38 39.5 28 14 38 34 29 53 35 22 27 24 48 DQ HQ HP ZC(D)UKD25

LEC-OM02704CN

16 24 1 15 9 17 25 2 16 10 18 26 3 11 19 27 4 12 20 28 5 13 21 29 6 14 22 30 7 15 23 31 14 27 14 (5) ON/OFF (a) [1][2] [1][2] [8][0] [8][1] (b) b31 b 1 b 0 1 ON 0 OFF bit 16 bit [8][0] [8][1] 0 RD 1 2 ZSP 3 TLC 4 5 INP 6 7 WNG 8 ALM 9 10 MBR 11 DB 12 13 14 15 BWNG 16 CPO 17 ZP 18 POT 19 PUS 20 21 22 23 24 1 PT0 25 CDPS 2 PT1 26 3 PT2 27 4 PT3 28 MEND 5 PT4 29 6 PT5

2-Color Display Digital Flow Switch Series PFM

Dimensions PFM -C4/C6/C8/N7--X693 7 5 PFM -C4/C6/C8/N7--X694 7 5 10.2 10.2 1 43 A 43 1 IN OUT (34.2) 3 (34.2) 13 3 13 A 18 OUT 2 x 3.4 18 IN B B 48 20 48 20 2 x 3.4 One-touch fitting Applicable tube O.D.

Air Cylinder Series MB

32 50 Up to 600 40 12.5 35 27 11 65 120.5 46.5 14 20 20 14 15.5 19 75 15 1/4 104.5 58.5 5 32 18 63 Up to 600 45 17.5 35 27 11 75 134.5 56.5 14 20 20 14 16.5 23 90 12 1/4 119.5 68 9 37 22 80 Up to 800 45 22 40 32 13 95 169 72 22 30 25 20 19 33 102 18 1/4 150 81 11.5 26 37 100 Up to 800 55 25 40 41 16 114 189 89 22 30 30 20 19 37.5 116 20 1/4 170 96 17 Bore size (mm) T S U V L GF K MM Q RR

LEC-OM071xx

CPRM_SEL_ MON1 14 15 16 17 CPRM_SEL_ MON2 18 19 20 21 Reserved MONITOR1 22 23 24 25 MONITOR2 26 27 28 29 MONITOR3 30 31 8-71 8 MECHATROLINK-III Commands Related Parameters Parameter No.

Modular Design with Uniform Body Style

*18 *18 *18 *18 *1 Drain guide is NPT1/8 (applicable to the AC20-D) and NPT1/4 (applicable to the AC30-D to AC60-D).

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

1000 20 to 1000 35 32 70 27 81 108 1/4 1/4 52 20 40 95 17 27 59 13 12 11 M8 x 1.25 7 18 80 63 Up to 1000 20 to 1000 35 32 86 27 101 115 1/4 1/4 64 20 40 102 17 26 67 18 15 11 M10 x 1.25 7 18 99 80 Up to 1000 20 to 1000 40 37 102 32 119 129 1/4 1/4 78 25 52 113 21 30 72 23 17 13 M12 x 1.75 10 22 117 100 Up to 1000 20 to 1000 40 37 116 41 133 140 1/4 1/4 92 30 52 124 21 31 76 25 19 16 M12

Tie-rod Type Hydraulic Cylinder

25 14 9.5 M8 x 1.25 M14 x 1.5 23 20 60 17.5 32 44 18 22 1/4 30 15 106 37 50 19 50 14 9 23 20 28 17 13 M10 x 1.5 M16 x 1.5 25 22 73 17 35 53 20 26 3/8 30 18 112 43 63 21 55 16 8 27 22.4 30 17 13 M10 x 1.5 M18 x 1.5 28 25 80 17 40 60 22 26 3/8 30 20 116 47 80 26 65 M12 x 1.75 18 8 31 28 32 22 15 M22 x 1.5 32 29 100 20 45 75 26 30 1/2 35 22 127 57 100 34 80 M27 x 2 M12 x 1.75 20 6.5 35 35.5

Air Slide Table

15 13 17 6 45 20 M12 x 1.25 37 16 27 25 17 22 H K MXQR-CS20-X12 25 47 MXQR-CS25 5 30 MXQR25 MXQR-CS25-X11 15 M8 x 18 M8 x 20 M14 x 1.5 40 16 19 6 54 22 18 33 31 19 22 MXQR-CS25-X12 25 50 L 1) Size of hexagon socket head bolt 2) Mounting the adjuster on the left side is also available.

CL

to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1400 30 to 1400 30 to 1400 69 16 20 20 25 30 36 36 40 27 32 32 37 37 47 47 53 14 14 14 40 50 55 65 80 90 90 90 60 70 86 102 116 145 161 182 15 17 17 21 21 16 16 18.5 32 40 40 52 52 22 27 27 32 41 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 8 11 11 13 16 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 9 9 11.5 13.5 13.5 19 19 19 40

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

14 14 20 20 14 25 20 25 25 20 1/8" 1/4" 1/4" 1/8" 3/8" 1/4" 3/8" 3/8" 1/4" 1/2" 1/2" 3/8" 1/4" 1/2" 1/2" 3/8" 1/4" 3/4" 3/4" 1/2" 3/4" 3/4" 1/2" 3/4" 3/4" 1/2" 3/8" 1/4" 1" 1" 3/4" 1" 1" 1" 1" 1" 4 16 33.5 17 6 12 16 34.5 20 1/4" 19.5 22.5 44.5 47.5 21 25 19.5 44.5 22.5 21 47.5 25 3/8" 5 9 18 16 17 37 38 16 20 16 37 17 16 38 20 1/4" 22.5 24.5 50.5 52.5 24 29 19.5 16 19.5 16 19.5 22.5 17

ZP

1.8 ZPT50 7.5 50 53 19.5 25.5 51.5 16 18 12.5 17.5 38.5 43.5 3.5 1.2 Deep Deep H: M6 x 1 H: M8 x 1 Y B C F G C F G D E Model A H: M5 x 0.8 H: M6 x 1 Y Model A B E F E F C D ZPT40D 40 43 29 35.5 3 25 61 4.5 15 51 17 ZPT10D 16 18 16 20 42 25 47 7 21 ZPT16D 10 12 15 20 41 25 46 6 20 13-11-4 5 Series ZPT Vacuum Pad: Vertical Vacuum Entry without Buffer Connection Male thread Pad Form Bellows

Possible to transfer a workpiece at low-speed.

Applicable shaft type: W MSU Y = X = Long shaft side Long shaft side Long shaft side CRJ Long shaft side CRA1 X = CRQ2 Short shaft side Short shaft side Short shaft side MSQ Y = Y = Short shaft side MSZ Size 10, 15 Size 20, 30, 40 (mm) (mm) (mm) X 2 to 18 2 to 20 17 to 30 18 to 32 18.5 to 36 Y 1 to 9 1 to 10 1 to 15 1 to 18 1 to 20 Y 1 to 9 1 to 10 1 to 15 1 to 18 1 to 20 X 2 to 18 2 to 20