JXCx-OMU0004

CNI/O . 20 6.1 . 20 6.2 (NPNPNP ) . 20 1 No.JXC-OMU0004-A (1) I/O (NPNPNP ) . 20 (2) I/O . 20 6.3 . 21 6.4 I/O . 23 7. . 24 7.1 . 25 7.2 . 32 7.3 . 35 A . 36 B . 37 C . 38 7.4 . 39 8. . 40 8.1 . 40 8.2 . 41 8.3 . 41 1 . 41 2 . 42 3 . 42 8.4 . 43 8.5 ON . 44 8.6 . 44 8.7 LED . 45 9. () . 46 9.1 . 46 9.2 . 47 9.3 . 48 9.4 . 49 10. . 50 10.1 LEF . 50 10.2 LEH . 53 10.3

Filter Regulator

6.5 8 53 2.3 31.3 38.5 19 7 157 123.9 122.2 117.8 122.3 137.8 142.3 AW40-D 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 186.9 155.6 153.9 149.5 154 169.5 174 AW40-06-D 50 54 55.5 8.5 10.5 70 2.3 35.5 42.5 21 7 188.9 157.6 155.9 151.5 156 171.5 176 AW60-D 70 75 66 11 22 113 3.2 273.9 242.6 240.9 236.5 241 256.5 261 The dimension C is the length when the filter regulator knob is unlocked. -46-

MXW

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 4-M4 x 0.7 thread depth 6 (Helisert) 5H9 +0.030 depth 4.5 0 Operating port M5 x 0.8 Operating direction (A) (Plug: M-5P) 49 46 38 5 22 12 19 4 40 25 (Y) (Y) 5.5 Operating port M5 x 0.8 Operating direction (B) 24 84 (Plug: M-5P) Operating direction (

VQ20/30

Series VQ20 L dimension 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No. L 6 8 11 13 15 17 20 22 24 27 29 31 34 36 38 40 43 45 47 50 85.5 110.5 148 173 198 223 260.5 285.5 310.5 348 373 398 435.5 460.5 485.5 510.5 548 573 598 635.5 Series VQ30 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No.

Vacuum Regulator

20 26 28 7.5 10.5 Pressure switch 5 Series IRV10/20 Dimensions/IRV20: Standard Connections 53 IRV20-lllG: With pressure gauge 2.3 2.3 Air VAC side 41 SET VAC 10.5 U 38 22 60 S T 52 R 6 Elbow fitting Panel cut Panel plate thickness: Max. 4 43 10.5 x 4.5 R R 50 46 40 8 x 6.5 51.7 51.3 51.7 51.3 Rc 1/8 Pressure gauge port Pressure gauge 103 5.2 66.4 Fitting Part Dimensions (mm) Fitting size

Modular Type Filter Regulator Series AW

.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 1/4 10 One-touch fitting Width across flats 17 O S Accessory specification Standard specification Panel mount With auto drain With pressure gauge Bracket mounting size Port size Model C 48 73 86 92 93 A 25 40 53 70 75 D 25 52 59 75 75 B 108 160 201 239 242 E 28 40 57 73 73 P 30 44 46 54 56 K 0 5 3.5 1.5 1.2 M 25 30 41 50 50 N

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

4.5 (Piping port) (Opposite side.: Same) 2 x M5 x 0.8 thread depth 4.5 Note) 4 x M3 x 0.5 thread depth 4.5 (Opposite side: Same) (15+1/2ST) 19 (Opposite side: Same) 6 3 9.5 27.5 11 (19) (15+1/2ST) 4 Note) 11-, 22-: Vacuum suction port Vacuum air from 2 ports on both sides. 10-/12-, 21-: Relief port Exhaust air from a port on one side.

HRX-OM-X010

HRZ Series 5.3 Operation Screen 5-19 5-19 HRX-OM-X010 Chapter 5 System Operation 5.3.17 Initial Setting screen 2 POWER ON 1 2 3 Figure 5-20 Initial Setting screen 2 Table 5-17 Initial Setting screen 2 No. Item Descriptions Setting Range Factory Default Store the TEMP SP and FLOW SP value with serial communication.

0.4

L Note) The minimum bending radius of the circular connector cable is 20 mm. 60 30 Plug terminal no. 2 1 15 14 17 16 25 24 3 13 18 23 4 12 26 19 22 5 11 21 20 10 9 8 7 6 Socket side Note) Lengths other than the above are also available. Please contact SMC for details.

CNG

Box 3385 Al-Amir Majed Street, Jeddah-21471, Saudi Arabia TEL: 02-6761574 FAX: 02-6708173 9-19-23

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

19 23 9.5 1.5 47.4 19.8 52.6 79 19.8 52.6 AS321F-03-10ST AS321F-N03-09ST 18.5 1.5 47.4 5/16" 15.2 29.5 41 NPT3/8 19 23 9.5 31.8 43.3 10 21 18.5 81 81 AS321F-03-12ST AS321F-N03-11ST 21 3/8" 17.9 31.8 43.3 32.8 44.3 12 22 20.9 83 141 AS421F-04-10ST AS421F-N04-11ST 21 3/8" 17.9 33.6 47.9 33.6 47.9 10 21 18.5 141 24 28.6 12 1.5 55.8 1/2" NPT1/2 23.8 21.7 28.6 12 35.2 49.5 1.5 55.8 R1/2 24.5 62.9

NAAMS Standards Compliant

+0.028 +0.013 D 8F7 through +0.028 +0.013 D E E 200.03 F G F 10 200.03 10 G 300.025 300.025 11 through H 300.025 300.025 I 11 through H 250.05 J 250.05 I M6 x 1.0 45 R45 500.05 6.5 18 M6 x 1.0 10 750.05 3 R25 10 R6 1 1 6.5 R25 19 18 19 R25 19 [mm] R6 19 [mm] Model NAAMS code A B C D E F G H I Weight [kg] CKZ-50A010 ACA216M 80.0 65.0 50.0 90.0 56.0 0.5 CKZ-50A011 ACA217M 110.0 95.0 80.0 65.0

HRX-OM-X084

HRR Series 3.4 Piping 3-19 HRX-OM-X084 Chapter 3 Transport and Setting Up [Tips] For HRR010-AN-10/20-,HRR010-WN-10/20A set of thread adapters that converts the connections from Rc to NPT is enclosed as an accessory. For NPT thread, be sure to use this adapter.

CHKD/CHKG

19 21.5 24.5 34.5 A 12 13 A 13.5 19 19 21.5 24.5 34.5 20 25 32 40 50 63 80 100 Note 1) D-A9/A9V models cannot be mounted on 32 to 100.

Thermo-chiller/Rack Mount Type

-inch rack (EIA standards1). 1 19-inch Rack Standards Standard EIA (Electronic Industries Alliance) 500 mm Standard no.

42

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.

HRX-OM-X071

Required facility water system (for water cooled type) Table 3-2 Facility water source to be prepared Required facility water flow rate Heat Facility water temp. l/min range Model Radiated Facility water temprature oC kW 25 32 35 40 5 to 40 16 19 27 HRR050-W-20(Rating 25) Approx.10 HRR050-W-405 to 35 16 19 22 (Rating 25) HRR Series 3.2 Installation 3-5 HRX-OM-X071 Chapter 3 Transport and

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 19 47 57.5 17 10 19 47 57.5 10 24 50 69.3 12 24

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

43.3 18.5 13.2 10 1/4" 17 60 NPT 1/4 AS321FG-02-12 AS321FG-N02-09 19 21.8 29.5 41 69 22 32.8 44.3 20.9 15.2 12 5/16" 48.8 43.8 42.8 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 12.8 17.9 6 3/8" 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 15.2 13.2 8 1/4" 17 55 23 41.5 46.5 20.9 19 40.2 35.2 R 3/8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 19 29.5 20.9