High Pressure Coolant Valve

Refer to back page 50 for Safety Instructions and pages 17 to 19 for 2 Port Solenoid Valve for Fluid Control Precautions. Design Mounting Direction of Pilot Solenoid Valve Warning Warning 1. Extended periods of continuous energization If a valve is continuously energized for long periods, heat generation of the coil may result in reduced performance and shorter service life.

Centering Unit

60 64 22.5 MACM4 X114 86 90 90 72 78 32.5 50 19 32 20 33 X115 56 6 78 40 X116 54 4 40 6.6 12 19 17 18 M5 7 MACM6 X114 118 125 125 97 113 33.8 53 28 33.3 30 43 X115 59 6 98 60 X116 57 4 60 MACM10 X114 185 197 198 11 152 182 18 53.8 77 31 24 13 0 53.3 50 70 X115 83 6 108 X116 81 4 5 Centering Unit MACM Series Dimensions P: Port side photo sensor mounted type B: Port back side photo sensor

XL-OMY0002

200 360 660 1350 3000 5150 3 3 cm O.5MPa 2.5 12 15.5 30 42 54 54 M5 Rc1/8 Rc1/4 [kg] 0.5 1.2 1.8 3.4 5.6 11.5 20 1 2 [Y-VAC2] 5 3 1 1mm 32 L/SP=0.1MPa 30 6 P11) 28 XLD-100 XLD-160 L/s () P=0.1MPa 26 24 22 20 XLD-63 XLD-80 18 16 14 XLD-50 12 10 XLD-40 8 6 4 XLD-25 2 0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0 n n 9 XL-OMY0002 4-2 XLD-25 XLD-40 XLD-50 XLD

Digital Flow Switches Series PF2A

PF2A710, 750 60 82 98 67 58 6 1.6 17 Brown 1 Load Load OUT1 Main circuit Main circuit 4 Load Load Black FLOW SWITCH OUT2 12 to 24 VDC UP 2 + White 54 44 SET 3 OUT1 OUT2 Blue DOWN FOR AIR PF2A7--27(-M) 24 2-Port size 40 50 4-4.5 Brown 1 OUT1 4 Black Load Load (42.2) White OUT2 2 + 12 to 24 VDC Load Load 3 Blue PF2A7--67(-M) 42 4 43 2-3.4 Flow direction PF2A711, 721, 751 64 23 116 1.6 88

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 17 Stations, A B Port Size: M5 (Base Mounted M5X0.8), P R Port Thread: T (NPTF)

2/3 Port Valve

216 219.5 237 260 222.5 240 263 229.5 247 270 55 63 74 VX Flange/32F, 40F, 50F Port size Standard/Vacuum pilot VN VQ Pilot port Rc(PT) Model Flange M L K J I H G F E D C B A 310.5 326 350 303.5 319 343 300.5 316 340 256.5 272 296 244 259.5 283.5 12 12 14 36 42 54 100 105 120 20 24 24 134 146 162.5 135 140 155 210.5 226 250 130 150 180 1 8 1 4 1 4 32 40 50 VNB5-32F VNB6-40F VNB7-50F 4.2-17

Fluoropolymer Piping Equipment

LQ1E41-R2 12 8 6 9 9 24 20 21 17 43 38.5 28 23 5.5 LQ1E41-R3 12 6 15 14 35.5 31.5 16.5 3.6 25 LQ1E41-R4 12 4 2.6 M1 LQ1E51-R2 19 10 39.5 20 36 17 56.5 52.5 49 23 7.4 46 LQ1E51-R3 19 8 54 47.5 5.5 12 H1 10 LQ1E51-R4 19 6 39.5 15 36 14 51 42 39 16.5 3.6 32 LQ1E51-R5 19 4 2.6 LQ1E61-R2 25 12 24 21 56.5 52.5 28 9.4 46 LQ1E61-R3 25 10 20 17 54 47.5 23 7.4 A side 39.5 36 49 LQ1E61-R4

ISO Standard Hydraulic Cylinder

29 12 22 22 19 40 34 33 107 20 16 19 3/8 58 17 19 47 50 25 to 800 65 64 M8 x 1 M20 x 1.5 46.5 28.5 14 15 28 28 24 50 42 34 108 20 16 19 3/8 58 17 25 11 59 +0.043 0 63 25 to 800 77 93 M8 x 1 M27 x 2 46 33 20 19 36 36 30 58 50 31 115 30 18 32 1/2 66 29 32 13 74 80 25 to 800 96 93 M33 x 2 57 32 M10 x 1.25 20 13 45 45 41 75 60 42 133 30 17 32 1/2 74 29 41 17 80 113 +0.052 0 100 25 to 1000 115

High Purity Fluoropolymer

CAT.ES70-17 C High Purity Fluoropolymer Fittings & Tubing PAT.

Cylinder with Lock

1.25 17 4.5 4 6 6 5.1 2 37 254 63 Up to 2000 69 4 M16 x 1.5 14 200.5 5 8 16 56.5 M8 x 1.25 17 5.5 4 9 9 6.3 2 37 273.5 80 Up to 2000 86 5 M20 x 1.5 20 238 10 16 72 M10 x 1.5 22 7.5 4 11.5 11.5 6 6 46 328 100 Up to 2000 91 5 M20 x 1.5 20 261.5 10 18 89 M10 x 1.5 26 9.5 4 17 17 10 3 51 356.5 With Rod Boot [mm] Bore size d e f h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

to 1000 3/4 +0.100 0 +0.3 +0.1 0 0.2 18.5 M16 x 1.5 80 M36 x 1.5 56 182 20 59 17 39 53 144 40 43 36 36 90 14 40 80 32 Up to 1200 -X 3/4 +0.100 0 +0.3 +0.1 0.1 0.3 115 18.5 M18 x 1.5 90 M40 x 1.5 63 60 204 162 23 45 70 48 20 41 39 44 17 50 100 40 Up to 1200 3/4 1 +0.100 0 +0.3 +0.1 0.1 0.3 115 18.5 M20 x 1.5 90 M45 x 1.5 63 60 226 182 25 50 74 48 20 46 39 44 17 Lube Non-lube 50 100 40 Up to

Cylinder with Lock

Bore size B TA TL TU TC TX TZ TO TR TT TS TH TF TY1 TY2 Z TDH10 32 151 40 169 50 187 63 199 80 247 100 266 MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 49 71 148 12+0.070 0 MB-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 58 77.5 166 16+0.070 0 50 65 80 60 10 92 75 109 17 9 17 12 45 60 71 91 183 16+0.070 0 MB-S06 63 75 100 70 15 110 90 130 20 11 22 14 60 80 87 103 195 20+0.084 0 80 95

CLS

17 20 50 50 56 63 63 71 47 47 53 60 60 67 1/4 1/4 1/4 3/8 3/8 1/2 17 17 20 23 25 30 36 36 40 45 50 60 59 59 59 70 74 86 43 43 43 48 48 60 15 15 17 20 20 25 31 31 36 41 46 56 19 19 22 26 26 30 145 75 18 110 136 115 25 90 90 90 115 115 140 16 107 58 110 M14 x 1.5 65 Up to 1000 3 5 30 46 +0.084 0 +0.100 0 0.1 0.3 161 78 18 110 146 128 28 16 114 64 110 M14 x 1.5 75 Up to 1000 182 95 23 132

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

3/8" 36 3/8" 46 24 52 28 23 21 1/2" 44 1/2" 55 29 62.5 39 32 26 3/4" 53.5 3/4" 72 39.5 81 49 46 36 1" 71 17-5-100 5 Series LQ1 High Purity Fluoropolymer Fittings Female Connector: LQ1H-F Metric sizes Connection threads Rc/NPT Model Applicable tubing O.D.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Two-angle socket 19 17 JIS B4636 3.

C95

TE TH TL Z TD TS TO TT TU TX TR TY 35 45 45 60 60 75 74 97 109 130 150 184 12 16 16 20 20 25 50 63 75 90 110 132 10 12 12 14 14 17 46 52 65 75 95 114 62 80 80 100 100 120 47 60 60 80 80 100 8.5 10 10 15 15 15 C95-S03 C95-S04 13 17 17 22 22 24 62 80 92 110 130 158 7 9 9 11 11 13.5 49 58 71 87 110 136 95 106.5 122 129.5 150 160 12 17 17 20 20 26 45 60 60 70 70 90 32 40 50 63 80 100 C95-S06

DOC1003626

,C 0x00,0x0C Information of register to write 0x0002 0,0,0,2 0x00,0x02 Checksum ASCII:LRC RTU:CRC E,B 0xC8,0x08 Trailer CR/LF None Total quantity of byte 17 8 3.11 Explanation of function codes HRS400-A-46 3-14 DOC1003626 Chapter 3 Serial communication 3.11.3 Function code: 16 Writing multiple registers Register data of assigned points from assigned address is written.

MNB

54 19.5 3 25 97 10 32.5 56 13 72 22 17 12 13 38 83 10 Data Up to 800 40 8 101 1/8 9 63 52 27 3 31 104 10 38 65 14 83 30 22 16 13 46 91 14 Up to 1000 50 11 120 9 1/4 65 75 32 2 38.5 120.5 12 46.5 77 15.5 100 35 27 20 14 52 104.5 18 Up to 1000 63 11 135 9 75 1/4 90 32 2 39.5 134.5 12 56.5 92 16.5 115 35 27 20 14 62 119.5 18 Up to 1000 80 13 153 12 1/4 95 102 37 4 45.5 169 16 72 100 19 126

MNB

54 19.5 3 25 97 10 32.5 56 13 72 22 17 12 13 38 83 10 Data Up to 800 40 8 101 1/8 9 63 52 27 3 31 104 10 38 65 14 83 30 22 16 13 46 91 14 Up to 1000 50 11 9 120 1/4 75 65 32 2 38.5 120.5 12 46.5 77 15.5 100 35 27 20 14 52 104.5 18 Up to 1000 63 11 9 135 75 1/4 90 32 2 39.5 134.5 12 56.5 92 16.5 115 35 27 20 14 62 119.5 18 Up to 1000 80 13 153 12 1/4 95 102 37 4 45.5 169 16 72 100 19 126

MNB

C 2-J (Double side) S + Stroke Width across flats B1 A F GB K BN GF Cushion valve H1 Rc(PT)P Rear cylinder port MM Q E D V LY 4LD LH Width across flats Y X X Y N T LX VA LT LS + Stroke ZZ + Stroke LZ (mm) Width across flats Bore size (mm) Stroke range (mm) Effective thread length (mm) Ee11 GL A B1 H1 B2 BN C D F GB GD GF B GL1 GR GE BP GA GC 30 8.5 32 to 700 22 17 6 46 97 32.5 12 13 13 13