MXS

Model *1) * A B C D E E1 F G H K L M N J P Q MGF MXS 8 MXS12 MXS16 MXS20 MXS25 MXS-BT 8 38 23 12.5 14 40.8 5 8 12 1.4 16.6 7 15.5 14.6 M8 X 1 M3 X 12 M3 X 16 MXS-BT12 45 31 18 14 40.8 6 8 12 1.4 20.5 10 15 18.5 M8 X 1 M4 X 8 M4 X 15 CY1 MXS-BT16 55 37 23.5 16 46.7 7 10 14 1.4 23 12 18.5 21 M10 X 1 M5 X 10 M5 X 18 MXS-BT20 70 47 29 23 67.3 11 12 19 12 27 13 25.5 25 M14 X 1.5 M5 X 12 M6 X 25

Modular F.R.L. Unit

3.3 280 46 105 196 20 11 50 70 98 44.5 84 13 11 6.4 117.5 319 3.3 Note 1) For AC20B only, the position of the pressure gauge is above the piping center.

Digital Pressure Switch ( compatible)

Panel mount adapter ZS-46-B Panel mount adapter + Front protective cover ZS-46-D Lead wire with connector ZS-46-5F 5 cores, 2 m, waterproof Front protective cover ZS-27-01 R1/8 piping adapter ZS-46-N1 NPT1/8 piping adapter ZS-46-N2 -9No.PS-OMV0006-D Summary of Product parts Names of individual parts Operation light: Displays the switch operating condition.

LEC-OM07605CN

PA03] 1 0:() 1:() 12 3 12. 12.3 15PN ONON 12.4 12 4 12. 12.4 (1) CN4 (2) LEC-MR-BAT6V1SETCN4 LEC-MR-BAT6V1SET LEC-MR-BAT6V1SET 12 5 12. 12.5 (MR Configurator2) Monitor"-"ABS Data Display" 12 6 13.

CXS

with depth 12 2-M5 x 0.8 with depth 7.5 0.2 60 12 S SS ZZ Z Part no.

Electric Slide Tables

Description Material Note 1 2 3 4 5 6 7 8 9 10 11 12 No.

Plate Cylinder

I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 +0.058 0 +0.058 0 +0.058 0 +0.070 0 25 32 40 50, 63 10.5 12 14 18 16 18 20 28 27 31 36 46 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 25 32 40 50, 63 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 8 10 10 14 NX NZ R1 U1 NO NDH10 NL NL NO NX R1 U1 Part no. Applicable pin Part no.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

13 36 62 17 15 39 13.5 5 14 5 48 33 25 25 34 46 M10 x 1.5 depth 12 0 0.030 20 CDVRA1BS63 14.5 10 2.5 117 12 14 41 76 19.5 17 39 20.5 6 21 5 60 33 30 30 34 57 M12 x 1.75 depth 13 0 0.030 23.5 CDVRA1BS80 15.5 12 3 142 12 18 50 92 22.5 20 43 28.5 6 29 5 72 33 35 40 34 70 M12 x 1.75 depth 14 0 0.036 25 CDVRA1BS100 16 12.5 4 172 12 112 18 60 28 25 43 38.5 8 39 85 5 33 40 45 34 85 ( ) are the

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

15 39 13.5 5 62 17 13 36 25 14 25 48 33 5 34 46 M10 x 1.5 depth 12 0 0.030 20 CDVRA1BS63 14.5 117 10 2.5 12 17 39 20.5 6 76 19.5 14 41 30 21 30 60 33 5 34 57 M12 x 1.75 depth 13 0 0.030 23.5 CDVRA1BS80 15.5 142 12 3 12 20 43 28.5 6 92 22.5 18 50 35 29 40 72 33 5 34 70 M12 x 1.75 depth 14 0 0.036 25 CDVRA1BS100 16 172 12.5 4 12 25 43 38.5 8 112 28 18 60 40 39 45 85 33 5 34 85 ( ) are the

PSxx-OMU0002CN

-A1 38L(2 ) B ZS-46-A2 38L(2 ) ZS-46-B + ZS-46-D ZS-46-5L 5 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch ZS-46-N7H 4mm ZS-46-C4L 6mm ZS-46-C6L 1/4 inch ZS-46-N7L -9No.PS-OMU0002CN-D OUT1 LCD OUT2 () LCD 4 ON/OFF ON/OFF (kPaMPa) -10No.PS-OMU0002CN-D digit() 1digit=1kPa 1,2,3,,99,100 1kPa -0.1001.000[MPa]F.S.=1.000(-0.100)=1.100[MPa] (

CG1

14 16 18 Bore (mm) ZZ GB S HH GA PD HD (17.5) (11.5) 20 25 32 40 50 63 20 25 32 40 50 63 70 70 72 80 95 95 (19.5) (11.5) 1 12 12 12 12 13 13 10 (12) 24.2 6 6 6 8 10 10 107 13 13 13 16 20 20 0.25 stroke (22.5) 1.25 2 3 10 (12) 26.7 112 (13) 10 (12) 30.2 114 (13) (25) 10 (12) 13 13 34.6 132 (13) (25) 11.5 14.5 40.6 155 47.1 155 The minimum stroke for rod boot equipped style is

PSxx-OMU0008CN

-A1 C A3 ZS-46-E B ZS-46-B E ZS-35-B D ZS-46-D + F ZS-35-E -9No.PS-OMU0008CN-D / A ZS-46-A1 38L(2 ) C ZS-46-E 310L(2 ) ZS-46-B ZS-35-B ZS-46-D + ZS-35-E ZS-46-5F 5 2 m ZS-27-01 ZS-35-01 -10No.PS-OMU0008CN-D OUT1 LCD OUT2 () LCD 4 ON/OFF ON/OFF (kPaMPa) -11No.PS-OMU0008CN-D digit() 1digit=1kPa 1,2,3,,99,100 1kPa -0.1001.000[MPa]F.S.=1.000(-0.100)=1.100[MPa]

MK

70 100 250 280 500 595 87 123 290 320 525 640 1100 1520 1350 1805 Availability of Body Options Additional Weight 12 Unit: g 16 20 25 32 40 50 63 Bore size (mm) Bore size 12, 16 20 to 63 M F N MF FN Both ends tapped 6 7 7 6 7 17 Rod end width across flats 10 10 21 21 46 46 Rear boss mounting 2 3 5 7 13 25 With arm 13 32 100 100 200 200 350 350 Rear flange 133 153 166 198 345

Free Mount Cylinder for Vacuum Series ZCUK

20. 5 27. 5 41. 5 41. 5 41. 5 41. 5 42. 5 42. 5 42. 5 48. 5 ZMA DQ HQ HP 12 21 44 15 21 44 18 23 23 46 28 23 46 35 12 24 47 18 25 48 28 29 52 12 25 48 15 18 29 52 22 27 33 56 34 38 61 ZPT-B6 ZC(D)UKC20 ZC(D)UKQ20 21. 5 23. 5 27. 5 32. 5 44. 5 46. 5 50. 5 55. 5 ZQ DQ HQ HP 43 32 57 53 33 58 28 35 60 43 22 27 39 64 34 44 69 43 53 23 29 54 28 29 54 35 ZPT-B8 ZC(D)UKC25 ZC(D)UKQ25 29. 5 42. 5

Sensor Monitor

Remarks Bracket ZS-46-A1 Self tapping screws: Nominal size 3 x 8L (2 pcs.)

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

26 18 22.2 KPQR08-12 KPGR08-12 47 6 12 d 10 KPQR10-12 KPGR10-12 18.5 23 41 29 49.5 24.7 9 Note 1) D indicates the maximum diameter.

CLA

. . n~.a 12...

Digital Pressure Switch

Panel mount adapter ZS-46-B Panel mount adapter + Front protective cover ZS-46-D Lead wire with connector ZS-46-5L 5 cores, 2 m Front protective cover ZS-27-01 R1/8 piping adapter ZS-46-N1 NPT1/8 piping adapter ZS-46-N2 -9No.PS-OMX1005 Summary of Product parts Names of individual parts Operation light: Displays the switch operating condition.

IZx-OMT0049

Note 11) If ON is selected for key lock setting, the setting is held even if the power is turned off and on again. 3)When error occurs CPU failure CPU failure Power supply failure (High voltage power supply Incorrect high voltage Communication error (controller) module) Error codeE1 Error codeE3 Error codeE4 Error codeE0 Error codeE2 Display Status Note 12) Note 12) Note 12) Note 12) Power

CQS

Rod end male thread 20, 25 Rod end nut Rod End Male Thread Bore size (mm) 12 16 20 25 L1 X C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 14 10.5 15.5 12 18.5 14 22.5 17.5 Basic Style A B A B Without auto switch With auto switch Bore size (mm) Stroke range (mm) 5ST C I N OB D K OA RA E L RB F M T H 10ST 5ST 10ST 5ST 10ST 5ST 10ST 12 16 20 25 M3 x 0.5 15.5 M4 x 0.7 6 8 7 12 32 38