Applicable Auto Switch Model

(Tolerance 30%) 5.3-22 Reed Switch/Direct Mounting D-Z73/D-Z76/D-Z80 Applicable Actuator Series Grommet Series Bore size (mm) MGQ, MVGQ, MGP 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 CXS 6, 10, 15, 20, 25, 32 RSH 20, 32, 50, 63, 80 MY1B 25, 32, 40, 50, 63, 80, 100 MY1M, MY1C, CY1R 25, 32, 40, 50, 63 MY1H, ML2B 25, 32, 40 MGF 40, 63, 100 CY1H 10, 15, 20, 25, 32 Specifications PLC: Programmable

JIS Standard Hydraulic Cylinder

(mm) With rod boot Stroke range (mm) Bore size (mm) e f B C F GA GB J M NA NB P R S T l Q B-rod C-rod B-rod C-rod 32 21.5 15 52 58 38 16 32 15 M10 x 1.25 11 37 31 3/8 39 141 11 25 to 1400 40 12 15 52 52 65 45 12 32 15 M10 x 1.25 11 36 30 3/8 42 141 11 25 to 1400 1/3.5 stroke 50 15 15 52 55 76 52 15 40 19 M10 x 1.25 11 43 35 1/2 46 155 13 25 to 1400 63 15 20 55 65 90 63 15 42 19 M12 x 1.5

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

28 7 5.5 5.5 5 21.5 15 15 15 42.5 34.5 30 24 88 64 62 62 26-0.033 0 16 13 13 1/4 1/8 1/8 26-0.033 0 M10 x 1.25 32-0.039 0 8 10 M14 x 1.5 M32 x 2 Axial Foot (L): CBM2L, CBM2L 10112122H A K F AL H2 Relief port M5 x 0.8 24 2 x P (Rc, NPT, G) F DL 2 x NN Width across flats NA Standard port H1 Width across flats B1 HC LH D I B B 4 x LD 2 x LC MM Width across flats B2 G Relief port G Relief port

AC Servo Motor Driver (Network card type ）

Refer to section 15.1.2. 15 2 15.

VM

Twist Selector (3 position)/VM131-01-35R, B, G, Y/VM151-01-35R, B, G, Y Panel mounted hole JIS Symbol 2 port 3 port 15N F.O.F. 0.5MPa supply 45 T.T. 3.5-15 VM100 Series VM100/Bottom Piping Basic/VM122-M5-00, VM132-M5-00 VM123-M5-00, VM133-M5-00 JIS Symbol 2 port 3 port SlA 20N F.O.F. 0.5MPa supply A L Model 7.5 VM122-M5-00 VM132-M5-00 VlA 37.5 1.5mm P.T. 3.5 VM123-M5-00 VM133-M5-00 1.5mm

Table of Contents

Action D Double acting Standard stroke (mm) Port thread type 6, 10, 16 20, 25, 32 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 40, 50 Type M5 x 0.8 Rc1/8 NPT1/8 G1/8 Bore size 6, 10, 16, 20, 25 32 32 32 Symbol Nil TN TF Applicable Auto Switches/Refer to page P.68 to 72 for further information on auto switches.

Combination Cylinder

5 5.5 5.5 6 10 14 M8 M10 X 1.25 M10 X 1.25 M14 X 1.5 24 29 35.5 44 8 10 12 16 6 8 ZZ With rod boot W Without rod boot ZZ e f h l Bore (mm) Stroke range H1 P PG PH PL PW S TA TB TC WA WW WB WH H 20 25 32 40 M5 M5 Rc(PT)1/8 Rc(PT)1/8 30 30 25 20 141 151 10 10 20 24 24 24 38 41 41 41 154 169 5 6 6 8 33 38 39 44 19.5 24 24 24 11 11 M5 M6 X 0.75 M8 M10 X 1.25 86 96 97 5.5 7 7 9 15 15 15 15 23

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8

CL

32 41 20 25 32 40 0 1/8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 to 400 to 450 to 450 to 500 0 26 20 57.5 69 69 76 73.5 0.033 64.5 83.5 0.033 0 0.033 0 0.033 26 64.5 70 83.5 100.5 90.5 32 Boss cut (mm) MM Bore 20 25 32 40 N 15 15 15 NA 24 30 S 127 137 139 167 Bore ZZ 168 182 184 217 H1 5 6 6 8 K 5 5.5 5.5 7 PL 20 24 24 24 PW 38 41 41 41 I 28 H 41 45 45 50 PH 19.5 24 24 24 ZZ 181 195 197 233 P Z 37 41

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8

MU

, 20 5, 10, 15, 20 5, 10, 15, 20 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET M5 X 0.8 Depth 11 AL 19.5 23.5 27 32 32 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT M5 X 0.8 Depth 7.5 M6 X 1 Depth 12 M6 X 1 Depth 11 M8 X 1.25 Depth 13 M8 X 1.25 Depth 11 M10 X 1.5 Depth 15 M10 X 1.5 Depth 14.5 M12 X 1.75 Depth 18 M12 X 1.75

CG5-S

(mm) Bore size (mm) Stroke range A P AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA S ZZ 20 to 350 1/8 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 83 118 25 to 400 1/8 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 83 123 32 to 450 1/8 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

) 5 9 5 1 15 (With stroke adjuster at extension end) 2.5 (With stroke adjuster at retraction end) 20 47 50 28 38 16 F 4H9 ( ) depth 3.5 +0.030 0 2 x M5 x 0.8 thread depth 8 N 35 1 x F 2 4 x M4 x 0.7 thread depth 6 4H9 ( ) depth 3.5 +0.030 0 27 M 0.5 30 32 Z ZZ (NN 1) x H G 8.5 18.5 8.5 18.5 H B A 4.2 8.5 9 9 20 1 4H9 ( ) depth 3.5 +0.030 0 5 B A NN x M5 x 0.8 thread depth 10 4H9 ( ) depth

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

For low speed control Port size 0 1 Port size Symbol M5 U10/32 01 02 Applicable series AS120M-M5 AS120M-U10/32 AS220M-01 AS220M-02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Cylinder side R Tube side Rc Symbol Nil Metric thread (M5) Unified thread (10-32 UNF) NPT P . 15-11-3 N Needle Valve/Flow Characteristics AS120M AS220M-01 AS220M-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 17.5 15 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20.5 20 7 32 5 M5 x 0.8 M3 x 0.5 11 32 10 3 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 Rc1/8 M4 x 0.7 20.4 39 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 15 17.5 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20 20.5 7 32 5 M3 x 0.5 11 32 10 3 M5 x 0.8 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 M4 x 0.7 20.4 39 Rc1/8 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

42

For replacement parts, refer to page 531. 519 A VQ5000 Series Kit (Connector kit) C 61.8 1/8" PE. port 29.5 29.5 12 21 47.5 PE 5 R1 3 R2 1 P SMC 3/4" 1(P), 5(R1), 3(R2) port 123 133 106 15 83.5 9 9 U side 55.5 M5 x 0.8 Ground screw 34.5 n 12 X 3/8", 1/2" 4(A), 2(B) port B 2 A 4 Manual override 6 Indicator light B 2 A 4 A B SMC SMC SMC SMC SMC 5 B B B B B A B 2 A 4 A B 4 A L2 P = 41 58.5 L1

AC Servo Motor Driver (CC-Link Type ）

16 Middle response 59.6 32 Middle response 400.0 15 76 15.

Compact Type

CAT.ES20-174 A Compact Type Dual-Rod Cylinder 15, 20, 25, 32 additionally released. Series CXSJ/6, 10, 15, 20, 25, 32 Series CXSJ/6, 10, 15, 20, 25, 32 Auto switches can be installed from 3 directions.

LJ1H

Refer to page 204 regarding brake wiring. 600 a = 2000 a = 1000 400 L3 (mm) a = 3000 a 200 L3 Mey 0 5 10 15 Transfer load m (kg) Refer to page 145 for deflection data. 32 33 Standard Motor/Vertical Mount Specification Series LJ1H20 Dimensions/LJ1H202PF Scale: 10% 12.5 9.5 Work piece mounting reference plane LJ1 LG1 LC1 LX LC6D/LC6C Switches 110 67 20 4-M6 x 1 thread depth 15 4-M8 x 1.25 thread