Power Valve Precision Regulator

Without thread: Internal pilot VVEXB-1 With M5 thread: Common external pilot VVEXB-2 (79) 61.5 P1 A A R 31 26 19 P 10 9 8 P=31 35 Port 1(P): 1 8 25.5 n x port 2(A): 1 8 For 6 manifold stations or more, exhaust from the both sides. 37 29 L Dimension L1 = 31n + 25, L2 = 31n + 12 n: Station 2 87 74 L1 L2 3 118 105 4 149 136 5 180 167 6 211 198 7 242 229 8 273 260 9 304 291 10 335 322 Symbol

Fieldbus system PROFIBUS DP compatible SI unit

Enable Generates an error. 1 Disable Does not generate an error. -10..10 V -5..5 V -20..20 mA 0..10 V 0..5 V 1..5 V 0..20 mA Sets the analogue input device range per channel. Analogue input range (Range) Selects the analogue input range. -10..10 V 2 4..20 mA Offset binary Offset binary. Sets analogue data type which is output to PLC per unit.

JXCx-OMT0002

) 20 10 20 10 Min. speed [mm/s] (Speed tuning control) 25 13 27 14 -109No.

CXT

2 pcs. 10 10 25 to 5 20 15 5 1 pc. 10 10 25 CXTl25 5 15 10 10 2 pcs. 10 15 20 CXTl 32 40 5 15 10 5 1 pc. 10 10 20 (mm) D-F7lW D-J79W D-F9BAL D-F7NT D-F79F Auto switch model D-A7l D-A8l D-A73C D-A80C D-A7lH D-A80H D-F7l D-J79 D-F7lV D-J79C Applicable model D-F7lWV D-A79W D-F7LF Number of mountings 2 pcs. 5 10 15 15 20 20 25 CXTl 32 40 1 pc. 5 5 10 15 15 20 25 3.8-10 Platform Cylinder Series

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

11 228 218 12 247 237 13 266 256 14 285 275 15 304 294 16 323 313 17 342 332 18 361 351 19 380 370 20 399 389 4-13-10

Platform Cylinder Series CXT

15 20 5 CXT 32 40 1 10 10 5 10 15 5 2 10 15 10 10 15 5 (mm) D-F7W D-J79W D-F7BAL D-F7NTL D-F79F Auto switch model D-A7 D-A8 D-A73C D-A80C D-A7H D-A80H D-F7 D-J79 D-F7V D-J79C D-F7WV D-F7BAVL D-A79W Application No. of auto switches mounted CXT 32 40 1 5 5 10 15 15 20 2 5 10 15 15 20 20 Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-A9 D-M9 D-M9W D-M9AL

VKF300

8 (ports P, R) 71.5 Max .10 83 75.5 Light (DZ type only) 24.5 (mounting holes) 67.5 59 P R P R mPm 4Rc(PT) 1/8 (ports P, R) 8 23 39 2.3 Pg.7 1 20.5 P = 19 13.5 5 1.5 20.5 25 30 53.5 Approx. 300 (lead wire length) L2 L1 31 10.5 8 39 23 49.5 1.5 10.5 49.5 4-M3 x 0.5 depth 6 (bracket mounting screws) 4-4.5 (bracket mounting holes) 7 7 5 L3 P = 19 16 nRc(PT) 1/8 (port A) 23 8 19.5 L: Dimension

IDX-OM-W037

Reference data Units: mm IDH6 Jumper cord 7 6 5 4 3 1 PE Remote start/stop Fault-signal (N.O: Close at "Fault") Fault-signal (N.C: Open at "Fault") 1042 31 N 2 L Operation-signal (N.O) Ground Terminal screw: M3 Suitable wire: 1.25mm or more 2 244 Power supply Connector width: 6.5mm or less Detail of wiring 35 184 172 392 (Note) 15 80 223 321 3001 485 The type without built-in filter does

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

/8 (ports P, R) 71.5 Max .10 83 75.5 Light (DZ type only) 24.5 (mounting holes) 67.5 59 P R P R mPm 4Rc(PT) 1/8 (ports P, R) 8 23 39 2.3 Pg.7 1 20.5 P = 19 13.5 5 1.5 20.5 25 30 53.5 Approx. 300 (lead wire length) L2 L1 31 10.5 8 39 23 49.5 1.5 10.5 49.5 4-M3 x 0.5 depth 6 (bracket mounting screws) 4-4.5 (bracket mounting holes) 7 7 5 L3 P = 19 16 nRc(PT) 1/8 (port A) 23 8 19.5 L: Dimension

3 Position Cylinder Series RZQ

102.5 5 14 20 32 10 6 14 22 124 92 114 40 14 7 20 28 134.5 96.5 124.5 50 146 102 14 132 8 20 30 63 CU Bore size (mm) L B + Full stroke RR CW CX+0.2 +0.4 CX CZ RR CL + Full stroke CZ -0.3 -0.1 18 36 10 32 A + Full stroke 18 36 10 40 22 44 14 50 22 44 14 63 10 Series RZQ Auto Switches Proper Mounting Position(For Detection of Piston A Stop Position) and Mounting Height D-A7 D-A80 =U B + First-stage

CA2

10 10 14 14 15 17 17 21 21 51 58 58 71 72 6 7 7 10 10 14 18 18 22 26 30 35 40 48 58 M14 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 10 12 16 20 25 16 19 23 28 36 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 10 12 16 20 25 15 18 25 8 11 11 13 16 M8 x 1.25 M18 x 1.5 M10 x 1.25 M18 x 1.5 M12 x 1.75 M22 x 1.5 31.5 M12 x 1.75 M26 x 1.5 35.5 6-8-36 37 Series CA2Q Air

Compact Cylinder with Air Cushion and Lock Series RLQ

Extension locking Retraction locking 100 100 63 63 50 50 40 Load mass kg Load mass kg 40 10 10 32 32 0.5 MPa 0.4 MPa 0.5 MPa 0.4 MPa 1 1 100 500 100 500 Maximum speed mm/s Maximum speed mm/s Allowable load mass (Graph (2)) Horizontal (With and without switch) 10 Load mass m (kg) 1 63 50 40 32 m 0.1 10 100 Eccentric distance + Stroke L (mm) l S l: Eccentric distance (mm) S: Stroke (mm) L Cushion

Air Cylinder Series CA2

15 8 M8 x 1.25 6 14 11 M14 x 1.5 27 1/4 3/8 3/8 1/2 1/2 CS2 50 Up to 600 20 to 600 35 32 70 27 52 20 40 10 17 11 M8 x 1.25 7 18 11 M18 x 1.5 30 63 Up to 600 20 to 600 35 32 85 27 64 20 40 10 17 11 M10 x 1.25 7 18 14 M18 x 1.5 31 80 Up to 750 20 to 750 40 37 102 32 78 25 52 14 21 13 M12 x 1.75 10 22 17 M22 x 1.5 37 100 Up to 750 20 to 750 40 37 116 41 92 30 52 14 21 16 M12 x 1.75 10 26 17

Compact Cylinder with Air Cushion and Lock Series RLQ

14 18 22 Applicable cylinder bore size (mm) ND NX Applicable pin Part No. 32, 40 50, 63 10 14 18 22 IY-G04 IY-G05 Part No.

SI unit for EtherNet/IP TM

L L L L L L L L L L L L: Low fixed (0) Input status area Input status area specifications Item Status State 0 Normal SOLV State of power supply for solenoid valve 1 Abnormal (19 V or less) Output area mapping For EX260-SEN1/-SEN2 Output data Offset MSB LSB MSB LSB (Word) 15 8 7 0 0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 For EX260-SEN3/-SEN4

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

Fieldbus system (SI unit compatible CompoNet TM )

Measure the voltages at both sides of the power supply for solenoid valves. 24 VDC +10%/-5% (Refer to Unit specification on page 31) -27No.EX-OMM0008-D Troubleshooting Troubleshoot Applicable model: EX12#-SCM# If a SI unit gets an operation failure, look for the problem using the following flow chart.

LC-OM089xx

8 Trouble shooting 10.

KR

(mm) Model N L1 L2 Port B Min. bore Weight (g) L3 L4 L5 L6 P Q1 Q2 MA MB FA FB KRM11-06-10-10 KRM11-06-10-6 76 10 6 6 10 29 47 19.5 31.5 21.5 31 13 13.5 17 21 7.5 10 102 6 85 10 116 41 39 55 73 KRM11-08-12-10 KRM11-08-12-6 8 12 11.5 22.5 35.5 24 34.5 15.5 14.7 18.5 22 9 57 86 Dimensions: KRM12 2-connection thread 2-4.5 mounting hole N-applicable tubing O.D.

Cylinder with lock

After checking the detection position, tighten M3 screws to fix the auto switch so that the bottom of the auto switch contact the cylinder tube. (The tightening torque of the M3 screw must be 0.5 to 0.7Nm.) Tighten the auto switch mounting screw(M4) to fix the auto switch mounting bracket.