Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

MU

Position of piston across 4 flats of double rod is not same. 7-8-11 12 Series MUW Dimensions of Each Mounting Foot style Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com LS + Stroke (mm) Y 6 8 10 11 14 X 12 16 18 21 24 LZ 23 27 31 37 48 LY 56 71 89 109 129 LX 11 12

MU

Position of piston across 4 flats of double rod is not same. 7-8-11 12 Series MUW Dimensions of Each Mounting Foot style LS + Stroke (mm) Y 6 8 10 11 14 X 12 16 18 21 24 LZ 23 27 31 37 48 LY 56 71 89 109 129 LX 11 12 15 18 22 LT 3.2 4.5 4.5 5 6 LS 79 90 96 116 123 LH 29 37 46 57 67 LD 5.5 6.6 9 11 13.5 Model MUWL25 MUWL32 MUWL40 MUWL50 MUWL63 Flange style (mm) FZ 24 28 32 39 50 FY 66 82

ARM10/11

VE 3 56 SMC AXT100-DR-8 110.5 28 AXT100-DR-10 135.5 SMC SMC VY1 K K P P C C U U O O S S L L H H AXT100-DR-12 160.5 8 AXT100-DR-14 185.5 12 12 G 11.5 AXT100-DR-16 210.5 AXT100-DR-19 248 PPA AXT100-DR-21 273 AXT100-DR-23 298 AL 81 AXT100-DR-25 323 AXT100-DR-28 360.5 33.5 14 16 OUT IN OUT IN ARM11BC2-08 Handle position: Bottom L2 L2-10.5 L1=(28 x n)+36 52.5 18 28 39 28 12 12 5.3 3 5.5 SMC SMC

ARM10/11

VE 3 56 SMC AXT100-DR-8 110.5 28 AXT100-DR-10 135.5 SMC SMC VY1 K K P P C C U U O O S S L L H H AXT100-DR-12 160.5 8 AXT100-DR-14 185.5 12 12 G 11.5 AXT100-DR-16 210.5 AXT100-DR-19 248 PPA AXT100-DR-21 273 AXT100-DR-23 298 AL 81 AXT100-DR-25 323 AXT100-DR-28 360.5 33.5 14 16 OUT IN OUT IN ARM11BC2-08 Handle position: Bottom L2 L2-10.5 L1=(28 x n)+36 52.5 18 28 39 28 12 12 5.3 3 5.5 SMC SMC

CG1

1.5 12.8 12 16 21 24 +0.4 +0.2 +0.4 +0.2 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 Knuckle pins and snap rings are attached. 16 20 36 44 56 64 25 30 30 40 50 55 M8 X 1.25 11.5 14 14 20 27 31 8 10 10 14 18 22 21 25.6 41.6 50.6 64 72 Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 8.5 16 10.3 12.8 12 16 21 24 34 41 42 56 71 79 C85 M10 X 1.25 20

VZ100/300/500

Mounting Screw Tightening Torques M3: 0.8 Nm 4-6-34 35 3 Port Solenoid Valve Rubber Seal, Body Ported/Base Mounted Series VZ500 Manifold for Internal Pilot How to Order Applicable solenoid valve VZ512--01 VZ512M--01 VZ522--01 Z522M--01 Applicable blanking plate assembly DXT201-15-4A Type 20/21 VV3Z5 20 05 1 A port A port P/R port thread type Manifold P port Stations 20 21 Type 20 Type 21

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

12A 12 18.5 29.7 40.9 34.5 17 53 AS32l1FG-G03-06A 6 10.4 21.8 33 36.4 1/4 21 16.6 50 48.4 43.5 41.9 13.3 37 AS32l1FG-G03-08A 8 13.2 22.7 33.9 14.2 38 AS32l1FG-G03-10A 10 15.9 26.7 37.9 28 15.6 39 AS32l1FG-G03-12A 12 18.5 29.7 40.9 26.8 17 41 AS42l1FG-G04-10A 10 10.4 21.8 33 28.7 3/8 21 16.6 42.3 40.7 34.8 33.2 15.6 69 AS42l1FG-G04-12A 12 18.5 30.8 45.2 35.1 17 71 AS42l1FG-G04-16A 16 23.8

2/3 Port Valve

Refer p.4.1-20, 4.1-21 for specifications and models.

VZS

(n) 7 stations (15 stations) New D-sub connector VQ7 Conventional D-sub connector (2) (1) Lead wire color Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange Yellow Pink Blue Purple Gray Orange Red Brown Pink Gray Black White 8 stations (Max. 16 stations) Terminal No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 Dot marking None None None None

RHC

16 10.5 19.5 14 14.5 9 8.5 20.5 14 25 25 29.5 30 27 74.5 64.5 15 17.5 12 16 10.5 19.5 14 14.5 9 8.5 20.5 14 REC 32 32 33 33.5 30.5 78 68 15 19.5 12 18 10.5 21.5 14 16.5 9 8.5 22.5 16 40 40 37.5 38 35 82.5 72.5 20 24.5 17 23 15.5 26.5 19 21.5 14 13.5 27.5 21 CX 50 50 43 43.5 40.5 88 78 18 28.5 15 23.5 13.5 27 17 22 12 11.5 28 21.5 63 63 50.5 50.5 47.5 95 85 18 28.5 15 23.5 13.5 27 17 22 12

AC

(Refer to "Best Pneumatics 1" on p.1.17-21 for further information.)

Environment

SpeedWork Load Graph (Guide) For Step Motor (Servo/24 VDC) LECPA Horizontal Vertical LEY25m LEY25m for acceleration/deceleration: 2000 mm/s2 80 35 LEF 70 30 Lead 3: LEY25C Horizontal work load [kg] 29 Vertical work load [kg] 60 LEJ Lead 3: LEY25C 50 20 LEL Lead 6: LEY25B 40 Lead 6: LEY25B 15 30 LEM 10 20 18 Lead 12: LEY25A 7 LEY LEY 12 10 Lead 12: LEY25A 0 0 LES 0 300 200 400 100 500 600

44

H1 H2 12 8 12 32.6 29 5 11 16 KQB2 14 17 10 14 14 17 36.6 40.4 32.2 35.8 5.8 6.6 13 15 25 43 69 68 71 68 122 d KS KX 21 17 21 44.8 39.4 7.6 18 M M L2 KM 21 17 21 48.1 41.7 8.5 19 L1 27 22 27 52.3 45.9 9.3 25 KF M Union Elbow: KFG2L H/DL L/LL Applicable tubing size (mm) O.D.

Series VQ Base Mounted Metal Seal/Rubber Seal

Name Material Number VVQ2000-80A-1 VVQ2000-80A-2 VVQ2000-80A-3 VVQ2000-80A-4 Gasket Packing Clamp screw Clip 12 12 12 12 Note) A set of parts containing 12 pcs.each are enclosed. NBR NBR Carbon steel Stainless steel !0 !1 !2 !3 !4Fitting Assembly No. (For cylinder port) VVQ100051A !5Fitting Ass'y No.

Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

Guide Cylinder Series MGG

long strokes Bracket mounting strokes Stroke range (mm) Bore size (mm) Bore size (mm) Bracket mounting stroke Bore size (mm) P Y Z Y X T W S V R Q R U 20 25 32 40 50 20 25 32 40 50 20 25 32 40 50 Rc 1/8 100mm or more 88 250 to 400 157 80 30 40 12 26 48 12 21 14 82 Rc 1/8 125mm or more 88 350 to 500 175 80 37 13 46 57 31 12 21 14 100 Rc 1/8 150mm or more 90 350 to 600 201 82 37 52 16 38 65

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 11 12 22 25 25 25 25 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 29 33 38 46 55 66 86 39 43 49 59 71 82 106 20 25 32 40 50 63 80 12.5 18 19.5 23.5 28 34.5 36 Up

ASR

31 57.7 10 155 178 17 36.5 65.6 6 158 181 18.5 37.5 66.6 8 18.5 23.4 48.5 24.3 20.4 53.5 R1/4 21 24.8 92.2 72 55.8 50.8 25.6 49.8 44.8 19 149 172 21 32.6 61.7 10 151 174 22 34.4 63.5 12 20.9 165 188 17 36.5 65.6 6 168 191 18.5 37.5 66.6 8 18.5 23.4 48.5 24.3 20.4 53.5 R3/8 21 24.8 93.8 73.6 57.4 52.4 25.6 51 46 20.2 159 182 21 32.6 61.7 10 161 184 22 34.4 63.5 12 20.9 292 310 21 32.6 74.8

MHF2

C Piston seal Urethane rubber NBR 11 21 Head damper Gasket Stainless steel Nit riding NBR 12 22 Rack Gasket Bolts for body through hole mounting Replaceable parts list Description Kit No.