Possible to transfer a workpiece at low-speed.

400 Displacement (m) Displacement (m) 250 350 200 300 40 30 20 10 0 30 25 20 15 10 5 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 100 100 50 40 30 20 10 0 100 80 60 40 20 0 Load (N) Load (N) 336 MSQX Series Low-Speed Rotary Table Rack & Pinion Type Construction CRB2 CRB1 MSU CRJ CRA1 o i @5 @6 t y !

Series HAW Water Cooled Aftercooler 1

1000 3300 5700 8600 12000 18000 150 700 2500 5000 7000 10500 14000 2100 4300 5600 8000 11000 AM Misc.

Step Motor Controller

Note 2) For interface use, supply 24 VDC 10% 150 mA using an external source. Note 3) The failure (ALM) is ON during normal conditions.

JIS Standard Hydraulic Cylinder

2 (n 4) 2 (n 4) 2 15 + 55 120 + 55 135 + 55 140 + 55 120 + 55 150 + 55 n (n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) 15 125 140 150 2 (Different surfaces), 1 130 160 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 15 + 55 125 + 55 140 + 55 150 + 55 130 + 55 160 + 55

7.4

Symbol Length Nil 150 mm 3 300 mm 6 600 mm 10 1000 mm Base Mounted Part no. Type S0700-S-M5 For internal pilot S0700-S-M5-R For external pilot Note) Standard wire length of valve with plug connector is 300 mm. When ordering a lead wire length of 600 mm or longer, list the part numbers for the valve without connector and the connector assembly.

3 Port Solenoid Valve

Rated voltage For DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted For AC (50/60 Hz) 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] Electrical entry 24 V, 12 V, 6 V, 5 V, 3 VDC/100 V, 110 V, 200 V, 220 VAC Grommet L plug connector M plug connector Indicator light and surge voltage suppressor G: 300 mm lead wire L: With 300 mm lead wire M: With 300 mm lead wire

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

T3 = V/a2 = 300/3000 = 0.1 [s] L 0.5 V (T1 + T3) V Time while the actuator is operating at a constant speed T3: Deceleration time [s] T2 = Time from the beginning of the constant speed operation to stop T4: Settling time [s] Time until positioning is completed T5: Resting time [s] Time the product is not running T6: Total time [s] Total time from T1 to T5 300 0.5 300 (0.1 + 0.1) 300

180

(PAT.PEND) Over length L(mm) Gripping moment Weight (g) Bore size (mm) Model (Nm) L MHW2-20D 68 300 20 0.30 MHW2-25D 510 25 0.73 78 905 MHW2-32D 32 93.5 1.61 2135 MHW2-40D 117.5 40 3.70 5100 Auto switch mounting at 4 locations MHW2-50D 154 50 8.27 At the pressure of 0.5 MPa MHZ Two finger types available.

CV/MVGQ

seals 110C Heat resistant tarpaulin Double clevis pin and double knuckle pin Maximum ambient temperature for the rod boot itself. 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600 -XC27 50, 63 made of stainless steel -XC28 Compact flange made of SS400 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 -XC29 Double knuckle joint with spring pin

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

, Tie-rod, cushion valve, and tie-rod 40 XC7 * Maximum ambient temperature for the rod boot itself. 300, 350, 400, 450, 500 nut made of stainless steel 25, 50, 75, 100, 125, 150, 175, 200, 250, XC8 XC9 XC14 XC15 XC22 Adjustable stroke/Extension adjustment 1 50, 63 300, 350, 400, 450, 500, 600 2 Adjustable stroke/Retraction adjustment 25, 50, 75, 100, 125, 150, 175, 200, 250, Change of trunnion

SMC

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Standard type Nil PNote 1) Axial piping type Note 1) The combination of axial piping type and both ends adjusters or retraction end adjusteris not

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

to 2100 300 to 2100 +3.00 to +21.00 mA 1: Follow the methods below when assigning the user set upper and lower limit by E.O.

Fieldbus system EtherNet/IP compatible SI Unit

to 2100 300 to 2100 +3.00 to +21.00 mA 1: Follow the methods below when assigning the user set upper and lower limit by E.O.

IZx-OMX0087

Installation distance and Discharge time (Discharge time of 1000V100V) Applicable models: IZT43(-L) 1) Without air purge 5.0 4.5 4.0 Discharge time [s] 3.5 s 3.0 2.5 2.0 1.5 1.0 0.5 0.0 0 50 100 150 200 250 300 Installation distance [mm] mm 2) High speed static neutralization cartridge with air purge 10.0 9.0 8.0 250L/min 20L/min 7.0 Discharge time [s] s 6.0 180L/min 5.0 60L/min 4.0 3.0 2.0

Fieldbus system EtherNet/IP TM compatible SI Unit

Description Decimal Common Format "Data-INT" "Data-SINT" Input 100 100 Output 150 150 Configuration 105 105 (5) Size: Perform setting as shown below.

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

9 Rod seal NBR Basic (B) CM2QB Bore size Stroke (mm) Stroke range 1 to 300 1 to 300 1 to 300 1 to 300 S 65 65 67 91 N 15 15 15 21.5 Bore A 18 22 22 24 B2 26 32 32 41 D 8 10 12 14 H2 8 8 8 10 I 28 33.5 37.5 46.5 ZZ 119 123 125 157 NA 24 30 34.5 42.5 AL 15.5 19.5 19.5 21 E F 13 13 13 16 K 5 5.5 5.5 7 NN M20 X 1.5 M26 X 1.5 M26 X 1.5 M32 X 2 B1 13 17 17 22 G 8 8 8 11 MM M8 X 1.25 P 1/8 1/8 1

C92

B C D E F G H P U Load (kn) Weight (g) M A MB JA30-10-125 JA40-12-125 JA50-16-150 JAH50-20-150 JA125-27-200 JA160-36-200 2.5 4.4 11 18 28 71 M10 X 1.25 M12 X 1.25 M16 X 1.5 M20 X 1.5 M27 X 2 M36 X 2 49.5 60 71.5 101 123 178 19.5 20 22 28 34 51 22 24 25 30 38 55 24 31 41 59,5 66 96 5 6 7.5 11.5 13 16 8 11 14 24 27 36 8 11 13.5 16 20 24 17 22 27 32 41 55 9 13 15 18 24 42 0.5 0.75 1.0 2.0 2.0

AC Servo Motor Driver (CC-Link Type)

300 600 150 300 600 90 180 360 112 225 450 Home position return position data (m) PC07 0 -2000(Less than stroke 1000) / -200(Stroke 1000 or more) Stopper type home position return PC09 100 200 stopper time (msec) Stopper type home position return torque limit value (%) PC10 15 30 Regenerative option PA02 0 0 (Non)/ 0002 (LEC-MR-RB-032) 1 1 0 0 Rotation direction selection *4 PA14 0 (+Counter

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.