V

/60Hz) 2* 200VAC (50/60Hz) 3* 110VAC (50/60Hz) 4* 220VAC (50/60Hz) 5 24VDC 6 12VDC 9* Others Courtesy of Steven Engineering, Inc. !

CE2

40 398 M26 x 1.5 Foot style LS + Stroke ZZ + Stroke Y ZZ LD LS LX X B LH Bore size (mm) 40 50 63 80 100 9 27 13 309.5 58.5 40 272.5 42 333.5 9 45 289.5 50 27 13 68.5 59 34 16 362 11.5 83 50 322 16 415 13.5 372 76 44 100 65 43 17 432 13.5 114 75 386 92 10-12-50 Stroke Reading Cylinder with Brake CE2 Rod side flange style RE A B REC Head side flange style CX CY MQQ M RHC Single clevis style

CE2

58 0 254 3/8 187 334 31 M18 x 1.5 stroke 80 12.5 65 372 71 0 284 1/2 205 37 381 M22 x 1.5 81 14 65 389 72 0 300 1/2 214 398 40 M26 x 1.5 Foot style LS + Stroke ZZ + Stroke LD ZZ Y X LX LS LH B Bore size (mm) 40 50 63 80 100 9 309.5 13 27 42 272.5 40 58.5 9 333.5 13 27 50 289.5 45 68.5 11.5 362 16 34 59 322 50 83 13.5 415 16 44 76 372 65 100 13.5 432 17 43 92 386 75 114 10-12-50 8 Stroke

High Vacuum Angle Valve, XL Series

63 80 16 25 40 50 63 80 Size Size XLF Normally closed XLG Double acting (dual operation) Valve type Model 140 140 120 120 100 100 80 80 T msec T msec T msec O-ring seal 60 60 40 40 20 20 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size Valve type XLD Normally closed Model Exhaust Initial exhaust valve 1200 1200 1000 1000 800 800 Smooth exhaust valve T msec 600 600 400 400 200 200 0 0 25

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 40 50 63 80 100 125 140 160 180 200 Average speed Series (mm/s) 1000 Perpendicular, upward actuation 900 800 700 600 500 400 300 200 100 Horizontal actuation VQ7-6-FG-S-A02 0 1000 900 800 700 600 500 400 300 200 100 0 Courtesy of Steven Engineering, Inc.-230

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 40 50 63 80 100 125 140 160 180 200 Average speed Series (mm/s) 1000 Perpendicular, upward actuation 900 800 700 600 500 400 300 200 100 Horizontal actuation VQ7-6-FG-S-A02 0 1000 900 800 700 600 500 400 300 200 100 0 VQ7-6-FG-S-A02 Bore size Series MB Pressure

MTS

(N) 32 12 0.3 0.5 Deflection (mm) Deflection (mm) MTS32-200 st 175 st 150 st 125 st 100 st 75 st 50 st 25 st 0.2 MTS12-100 st 75 st 0.1 50 st 25 st 0 50 100 0 5 10 Lateral load (N) Lateral load (N) 40 16 0.3 0.3 MTS40-200 st 175 st 150 st 125 st 100 st 75 st 50 st 25 st Deflection (mm) Deflection (mm) 0.2 0.2 MTS16-100 st 75 st 50 st 25 st 0.1 0.1 0 50 100 150 0 10 Lateral load (N) Lateral

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

Weight (g) LOW type H 100 30 30 100 24 54 T 50 50 29 70 66 66 W L1 L2 127 (159) 132.5 (160) 147.5 (182.5) 253 (295) 118.5 (216) 183 (215) 258.5 (286) 204.5 (239.5) 234.5 (269.5) 1110 (1350) 740 (950) 900 (1140) 910 (1120) 1670 (2190) 1840 (2350) Values in ( ) for specification with lock 1 Pin Clamp Cylinders Series C(L)KQG32/C(L)KU32 New New New New !

0.55

T 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz Other CE-compliant Conduit terminal with indicator light TS Conduit terminal with surge voltage suppressor TZ Conduit terminal with light/surge voltage suppressor DL DIN terminal with indicator light DS DIN terminal with surge voltage suppressor DZ DIN terminal with light/surge

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

MTS12-100 st 100 st 75 st 75 st 0.1 50 st 25 st 50 st 25 st 0 50 100 5 10 Lateral load (N) Lateral load (N) 40 16 0.3 0.3 MTS40-200 st 175 st 150 st 0.2 0.2 125 st 100 st 75 st 75 st MTS16-100 st 50 st 0.1 0.1 50 st 25 st 25 st 0 50 100 150 10 Lateral load (N) Lateral load (N) 20 0.5 Caution on Design MTS20-200 st 175 st 150 st Caution 1.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

100 200 50 100 200 Horizontal Vertical (downward) Vertical (upward) m1, m2, m3 max. m1, m2, m3 max.

JXCx-OMT0002

Axis Movement Speed Position Acceleration Deceleration Pushing Area 2 In-position mode (mm/s) (mm) (mm/s2) (mm/s2) Selection (mm) (mm) (mm) Axis 1 Absolute 100 50.00 1000 1000 0 0 0 0.5 Axis 2 Absolute 100 50.00 1000 1000 0 0 0 0.5 1 Axis 3 Absolute 100 50.00 1000 1000 0 0 0 0.5 Axis 4 Absolute 100 50.00 1000 1000 0 0 0 0.5 Axis 1 Relative 50 10.00 1000 1000 0 0 0 0.5 Axis 2 Relative 50 10.00

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

40 50 100 200 300 400 1 5 4 MGG 10 20 30 40 50 100 200 300 400 10 50 100 5 10 50 100 Eccentric distance : l (mm) Eccentric distance : l (mm) Stroke (mm) Stroke (mm) MGC l = 200 mm Graph l = 300 mm Graph v = 150 mm/s or less Graph v = 200 mm/s or less Graph MGF 20 300 300 MGZ 200 200 MGF100 MGF100 20 MGT 100 100 MGF100 MGF100 10 MGF100 MGF100 50 40 50 40 MGF63 MGF63 Load mass: m0 (kg) Load

LG1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil G R Y Lead screw type Ground ball screw Rolled ball screw Slide screw P N S Motor output 100W 2 Power supply voltage 100/110VAC (50/60Hz) 100/115VAC (50/60Hz) 200/220VAC (50/60Hz) 200/230VAC (50/60Hz) Without motor 1 The tables above show the definition for each symbol only and cannot be used for actual model selection. 2 0

SFOD-OMT0010

Axis Movement Speed Position Acceleration Deceleration Pushing Area 2 In-position mode (mm/s) (mm) (mm/s2) (mm/s2) Selection (mm) (mm) (mm) Axis 1 ABS 100 100.00 1000 1000 1 0 0 5.0 Axis 2 ABS 100 100.00 1000 1000 1 0 0 5.0 1 Axis 3 ABS 100 100.00 1000 1000 1 0 0 5.0 Axis 4 ABS 100 100.00 1000 1000 1 0 0 5.0 Axis 1 ABS 50 50.00 1000 1000 0 0 0 0.5 Axis 2 ABS 50 50.00 1000 1000 0 0 0 0.5 2

Air Slide Table Series MXW

S n Auto switch Without auto switch (Built-in magnet) Nil Bore size (Stroke (mm)) For the applicable auto switch model, refer to the table below. 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Option Nil Standard (with urethane bumper) With shock absorbers 2 pcs.

e-Rodless Actuator

Load weight Allowable moment E-MY2H/m3 E-MY2H/M3 E-MY2H/M1 E-MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 q r w et 20 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 MY2H16 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Movement MOD Speed Position Acceleration Deceleration Pushing force Trigger LV Pushing speed Moving force Area 1 Area 2 In position 0 1: Absolute 100 10 3000 3000 0 0 0 100 0 0 0.50 1 1: Absolute 100 100 3000 3000 0 0 0 100 0 0 0.50 2 1: Absolute 100 200 3000 3000 0 0 0 100 0 0 0.50 Note) The step data input range changes depending on the actuator model.

VEX1

Cylinder Speed Chart Bore size Series MB, CA2 Pressure 0.5 MPa, Load factor 50% Cylinder stroke 500 mm Series CS1/CS2 Pressure 0.5 MPa, Load factor 50% Cylinder stroke 300 mm Average velocity (mm/s) System 40 50 63 80 100 125 140 160 180 200 250 300 1000 Vertically upward movement Horizontal movement 900 800 700 600 A 500 400 300 200 100 0 1000 900 800 700 600 B 500 400 300 200 100 0 1000

Thermo-con/Rack Mount Type

, 50/60 Hz Single-phase 200 to 240 VAC 10%, 50/60 Hz Electrical system Overcurrent protector 14 A Current consumption 10 A (100 V) to 4 A (240 V) 7 A (200 V) to 6 A (240 V) Power consumption 900 W 1200 W Alarm Refer to Alarm.