MQQ

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

Cylinder with Turntable Series MGT

1 MGQ 1 2 3 4 5 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 Eccentric distance l (mm) Eccentric distance l (mm) MGG MGC MGTL100 300 300 MGTM100 200 200 P = 0.5 MPa MGF 100 P = 0.5 MPa Larger than 75st Larger than 50st Load mass m (kg) Load mass m (kg) MGZ 40 50 100 25st 50st 30 25, 50st MGT 20 50 40 10 30 5 4 3 20 2 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 30 40 50

1

Air Cylinder 20, 25, 32, 40 RoHS Approx. 1/397 mm Overall length shortened 50 mm stroke 63% reduction JCM 40 Female thread 58.5 mm 50 mm stroke 38% reduction JCM 40 Male thread 50 mm stroke Current product 40 (CM2 series) Shortened height New New Mounting height approx. 8 mm shorter New mounting band for auto switch Max. 0.69 kg \ 0.32 kg 54% lighter Weight (Compared with the current CM2B

MGZ Series

: 201 to 300mm 80 40 50 50 20 20 Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 10 10 10 63 63 63 5 5 5 50 50 50 [Example ] 40 40 40 1 1 1 70 100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

RSH/RS1H

load F [N] 32 CV 70 70 MVGQ 60 60 CC 50 50 32 RB 40 40 30 30 J 20 20 20 D20 10 10 -X 200 0 10 20 30 40 10 20 30 40 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 Data 10-9-13 13 Series RSH/RS1H Specific Product Precautions 1 Be sure to read before handling.

RSH/RS1H

(mm) Bore size (mm) CC Single acting 80 50 32 RB 40 63 50 80 Option J Three types of action With lock mechanism With cancel cap Vm/min D1. Single acting 2. Double acting 3.

Rotary Gripper Series MRHQ

50 Pressure 0.2MPa Pressure 0.2MPa 40 40 Overhang H mm Overhang H mm 0.3MPa 0.3MPa 0.3MPa 0.3MPa 30 30 0.4MPa 0.4MPa 0.4MPa 0.4MPa 0.5MPa 0.5MPa 0.5MPa 0.5MPa 20 20 0.6MPa 0.6MPa 0.6MPa 0.6MPa 10 10 H 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L Gripping point L mm Gripping point L mm MRHQ16 MRHQ16 Internal gripping 60 60 50 50 Pressure 0.2MPa Pressure 0.2MPa 40 40 Overhang H mm Overhang

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

200 200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L4 [mm] L4 [mm] L4 [mm] 600 600 600 L4 X 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] 600 600 600

100

40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure [kPa] Vacuum pressure [kPa] ZL3H ZL3H04P ZL3M ZL3M04P Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 23 Multistage Ejector ZL3/ZL6 Series Flow Rate Characteristics (Representative value) ZL6M (04P) Supply pressure: 0.35 MPa/0.37 MPa (With valve) ZL6H (

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

mm l = 100 mm Graph Graph Graph v = 100 mm/s or less Graph v = 50 mm/s or less 300 300 MGF100 MGF100 50 200 200 MGF100 MGF100 30 40 MGF100 MGF100 100 100 MGF63 30 MGF63 MGF63 20 50 40 50 40 MGF63 30 30 Load mass: m0 (kg) Load mass: m0 (kg) Load mass: m (kg) Load mass: m (kg) 20 20 20 MGF40 MGF40 MGF40 MGF40 10 10 10 MGF40 MGF40 MGJ 10 5 4 3 5 4 3 MGP 2 2 MGQ 5 5 1 10 20 30 40 50 100 200

Step Motor Controller

) AC servo motor (S6) 200 to 230 VAC 50/60 Hz AC servo motor (S7) AC servo motor (S8) Dimensions (mm) LECSAm 40 135 2 x 6 Mounting hole 2 x 6 Mounting hole 50 (Bearing surface thickness 5) CNP1 CNP1 CNP2 CNP2 130 120 130 120 CN1 CN1 CN3 CN3 CN2 CN2 6 6 5 5 6 5.5 LECSAm-S4 40 6 Mounting hole (Bearing surface thickness 4) 6 135 (170: LECSBm-S8) LECSBm 156 6 6 CN6 CN5 CNP1 CN3 CNP2 161 168 CN1

VZ3000

(W) [Current mA] DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Note) Inrush Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200 VAC: 17.5/50 Hz, 15/60 Hz Refer to pages 3-3-24 to 3-3-27 for manifold use.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

40 to +80C 25 to +60C 40 to +80C Cable 25 to +60C 40 to +80C 25 to +60C 40 to +80C Min. bending radius (Fixed) 40 mm 21.7 mm 40 mm 21.7 mm Protection class IP67 (Only with screw tightened) Allowable repeated insertion/withdrawal 200 Material of knurl Brass (Nickel plating) Zinc die-cast (Nickel plating) Brass (Nickel plating) Zinc die-cast (Nickel plating) Contact (Surface treatment) Phosphor

Compact Slide Series MXH

5,10 15,20 0.06 5,10 0.04 0.02 0 0 0.1 0.1 0.2 0.3 0.4 0 0.2 0.3 0.4 Yaw moment My (Nm) Pitch moment Mp (Nm) MXH10 MXH10 0.3 0.3 60 60 50 0.25 0.25 Displacement (mm) 40 50 0.2 0.2 25,30 40 Stroke 15,20 0.15 0.15 25,30 5,10 0.1 0.1 15,20 5,10 0.05 0.05 0 0 0 0.2 0.35 0.5 0.65 0.8 0.2 0 0.4 0.6 0.8 1.0 Yaw moment My (Nm) Pitch moment Mp (Nm) MXH16 MXH16 0.16 0.3 60 50 40 0.14 60 50 40 0.25

Compact Type

Bore size/Stroke (mm) Bore size 6 10 15 20 25 32 Standard strokes 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switches/Refer to page 15 for detailed auto switch specifications.

Series SV

, 50, 63 Applicable related components Total stroke time s Tubing Speed controller Solenoid valve Silencer 0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 2.0 400 MB 32 10% 30% 50% 300 70% Stroke mm AS2201F -01-08 AS2200-01 200 100 70% 50% 30% 10% 0 400 MB 40 300 Stroke mm AS2201F -02-08 AS2200-02 200 100 0 ANA1 -C10 T0806 400 MB 50 300 Stroke mm AS3201F -02-08 AS3000-02 200 100 0 400 MB 63 300 Stroke

•

Description Material 40 fb Coil scraper Phosphor bronze !II Rod packing NSR I 50 63 MOH-20 DRP-20S NLP-50 NLP-63 @I Piston packing NBR NLP-40 fD Tube gasket NSR CM-040-16-127 Il!

Rotary Gripper Series MRHQ

50 Pressure 0.2MPa Pressure 0.2MPa Pressure 0.2MPa 0.2MPa Pressure 0.2MPa 40 40 Overhang H mm Overhang H mm 30 0.3MPa 0.3MPa 0.3MPa 0.6MPa, 0.7MPa 30 0.4MPa 0.4MPa 0.4MPa 0.3MPa 0.5MPa 0.5MPa 0.5MPa 20 0.4MPa 0.5MPa 20 0.6MPa 0.6MPa 0.6MPa 10 10 H H 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L Gripping point L mm Gripping point L mm MRHQ16 MRHQ16 Internal gripping 60 60 50 50 Pressure

Large Size Vacuum Module: Series ZR

)) Suction flow (l/min (ANR)) Air consumption 80 80 80 80 Vacuum pressure Vacuum pressure Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Air consumption 70 70 70 70 60 60 60 60 50 50 50 50 40 40 40 40 Suction flow 30 30 30 30 Suction flow 20 20 20 20 10 10 10 10 Supply pressure (MPa) Suction flow (l /min (ANR)) Supply pressure (MPa) Suction flow (l

Compact Type Dual-Rod Cylinder Series CXSJ

Bore size/Stroke (mm) Bore size 6 10 15 20 25 32 Standard strokes 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switches/Refer to page 15 for detailed auto switch specifications.