NCA1

NPN) IC circuit 5 V A56 Grommet A59W A64 A67 F59 F5P J51 J59 F59W F5PW J59W F5BAL F59F F5NTL CJ2 Diagnosis indication (2-color) Relay, PLC 2-wire 200 V or less 100 V, 200 V 12 V 5 V, 12 V 24 V PLC CM2 IC circuit 3-wire (NPN) 3-wire (PNP) 5 V, 12 V CG1 12 V 2-wire MB 3-wire (NPN) 3-wire (PNP) IC circuit Yes Relay, PLC 5 V, 12 V Grommet Diagnosis indication (2-color) 24 V MB1 2-wire

NCA1

NPN) IC circuit 5 V A56 Grommet A59W A64 A67 F59 F5P J51 J59 F59W F5PW J59W F5BAL F59F F5NTL CJ2 Diagnosis indication (2-color) Relay, PLC 2-wire 200 V or less 100 V, 200 V 12 V 5 V, 12 V 24 V PLC CM2 IC circuit 3-wire (NPN) 3-wire (PNP) 5 V, 12 V CG1 12 V Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

Rotary Actuator/Vane Style Series CRB2

Volume (cm 3) Single vane Double vane Vane type CRB2BW40-S CRB2BW10-D CRB2BW15-D CRB2BW20-D CRB2BW30-D CRB2BW40-D CRB2BW10-S CRB2BW15-S CRB2BW20-S CRB2BW30-S Model 90 180 270 90 180 270 90 180 270 180 270 180 270 90 100 90 100 90 100 90 100 90 100 90 90 Rotation 1 (0.6) 1.5 (1.0) 4.8 (3.6) 11.3 (8.5) 25 (18.7) 31.5 41 33 34 1.2 1.5 2.9 3.7 6.1 7.9 15 20.2 1.0 1.1 2.6 2.7 5.6 5.7 14.4 14.5

3

150 200 300 500 600 1000 2000 3000 6000 12000 0.2 PFM 0.01 L/min 10 Air N2 Argon CO2 0.5 25 Thermal type (MEMS) 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min Bypass flow type 10 1000 20 2000 PFMC 5 500 Thermal type (MEMS) New New Dry air N2 1 L/min 10 1000 Bypass flow type 20 2000 PF2A 1 10 0.1 L/min 0.5 L/min 5 50 1 L/min 10 100 2 L/min 20 200 Thermal type

Air Cylinder Double Acting, Single Rod JMB Series ø 32, ø 40, ø 45, ø 50, ø 56, ø 63, ø 67, ø 80, ø 85, ø 100

Standard Strokes Bore size [mm] Standard stroke [mm] Max. manufacturable stroke 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 45 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 56 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 63 25, 50, 75, 100, 125, 150

JIS Standard Hydraulic Cylinder

V 100 V or less 100 V, 200 V 200 V or less 3-wire (NPN equiv.) 5 V Yes Grommet Relay PLC No Yes No A54 A64 A59W 12 V 2-wire 24 V A33 A34 A44 Terminal conduit PLC Relay PLC Yes 100 V, 200 V Grommet DIN terminal Diagnostic indication (2-color indicator) B59W 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance.

IR1000/2000/3000

Conditions: Supply pressure 0.7MPa Set pressure 0.2MPa Flow rate 0 l/min (ANR) Conditions: Back pressure 0.5MPa Conditions: Supply pressure 0.5MPa IR2000-02 IR2000-02 IR2000-02 0.204 0.5 0.2 Set pressure MPa Set pressure MPa Set pressure P2 MPa 0.4 0.202 Setting point 0.15 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 100 200 300 400 0 100 200 300 400

Precision Regulator Series IR1000/2000/3000

0 100 200 300 400 500 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 300 0 100 200 1.0 VBA VBAT Flow rate (l /min (ANR)) Relief flow rate (l /min (ANR)) Supply pressure P1 (MPa) AP100 557 Series IR1000/2000/3000 Series IR2000 Flow Characteristics Relief Characteristics Pressure Characteristics Testing methods conform to JIS B 8372.

Precision Regulator

200 300 400 0 100 200 300 400 500 600 700 Supply pressure P1 (MPa) Flow rate (L/min (ANR)) Relief flow rate (L/min (ANR)) IR-A IR2010-02 IR2010-02 IR2010-02 Supply pressure: 0.7 MPa Back pressure: 0.7 MPa IR IR 0.7 0.204 0.4 IRV 0.6 Set pressure (MPa) Set pressure P2 (MPa) 0.202 0.5 VEX Set point 0.3 0.4 0.200 SRH 0.2 0.3 0.198 SRP 0.2 0.1 0.1 SRF 0.196 0 100 200 300 400 500 0 0.2 0.1 0.3

Fluoropolymer Tubing Variations

How to Order Burst pressure drop curve 1.0 TL0604 Metric sizes 20 Burst pressure drop coefficient 0.8 TIL01 20 Inch sizes 0.6 Length Applicable to both metric and inch size Tubing Model 0.4 Symbol 10 20 50 100 Type Length 10 m 20 m 50 m 100 m 0.2 Roll 0 20 40 60 80 100 120 140 160 180 200 220 240 260 Temperature (C) Straight 2 m 2S Length Applicable to inch size only Eluting fluorine ion

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Connection Port CRBU2W10 CRBU2W15 CRBU2W20 CRBU2W30 90 CRBU2W40 90 Vane type Model (size) 180 270 90 180 270 90 180 270 90 180 270 180 270 Rotating angle Single vane Double vane Volume (cm3) 1.2 1.5 2.9 3.7 6.1 7.9 15 20.2 25 31.5 41 1(0.6) 1.5(1.0) 4.8(3.5) 11.3(8.5) Side ported M5 x 0.8 Port size Axial ported M5 x 0.8 M3 x 0.5 90 100 90 100 90 100 90 100 90 100 Rotating angle Volume (cm

CRB2/CRBU2/CRB1

180 190 270 280 90 100 180 190 270 280 90 100 180 190 270 280 90 100 180 190 270 280 90 100 90 100 90 100 90 100 90 100 90 100 90 100 90 100 90 100 10 1.2 1.5 15 2.9 3.7 20 6.1 7.9 30 15 20.2 21 25 40 31.5 41 30 32 49 51 66 68 70 73 94 97 118 121 88 93 138 143 188 193 186 197 281 292 376 387 1.0 1.1 2.6 2.7 5.6 5.7 14.4 14.5 33 34 48 52 98 104 136 146 272 294 50 Single vane Double vane 63

Shock Absorbers and Rate Controls

Compretied (lbr.) 0ttt.tftt(8) .24 0.28 l2-t30 50 0,000 2t5 0,5 0 I 0ffil.t 5tjl(B) 0.38 r 2. r30 l0 168,000 200 0.8 1.7 80 2 0tlt.25(B) 0.38 t2-130 50 178.000 200 0.8 1.7 8r 2 tR0EI[.25(B] .25 0.38 3 5 0 50 r78.000 200 0.8 1.7 100 2 0tfl.35(Bl .28 0.50 t2-r30 r50 300,000 450 1.0 2.2 t20 3 r.R0r .35(B) ,n 0.50 3-50 150 300.000 450 1.0 2.2 200 3 0 r . 5 ( B ) .44 0_50 t2-180 250 284.000 775

Sine Rodless Cylinder Series REBR Direct Mount Type

Model determination 61 Series REBR Model Selection 2 Design Parameters 1 Selection Method REBR25 REBR32 REBR15 500 400 300 200 300 200 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 40 50 20 30 40 50 30 20 20 Usable range 10 10 10 Usable

ISO/VDMA Cylinder: Standard Type Double Acting, Single/Double Rod Series C95 ø32, ø40, ø50, ø63, ø80, ø100

Standard Stroke Standard stroke (mm) Bore size (mm) Max. stroke 32 700 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 40 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 Made to Order Specifications (For details, refer to page 6-17-19.) 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50,

Modular F.R.L. Units

50 100 150 200 Flow rate L/min (ANR) Flow rate L/min (ANR) AFM30-A AFD30-A P1=0.5MPa 0.04 0.04 P1=0.7MPa P1=0.3MPa P1=0.5MPa P1=0.3MPa 0.03 Pressure drop MPa Pressure drop MPa 0.03 P1=0.7MPa 0.02 0.02 P1=0.5MPa P1=0.3MPa P1=0.5MPa P1=0.3MPa 0.01 0.01 P1=0.7MPa P1=0.7MPa 0 0 0 0 50 100 150 200 100 200 300 500 400 600 Flow rate L/min (ANR) Flow rate L/min (ANR) AFM40-A AFD40-A P1=0.5MPa P1

Information

VAC (50/60 Hz), 115 VAC (60 Hz) Single-phase 200 to 230 VAC (50/60 Hz) CE/UL HRS018 1700/1900 (50/60 Hz) HRS024 Single-phase 200 to 230 VAC (50/60 Hz) 2100/2400 (50/60 Hz) Air-cooled refrigeration HRS050 New Scheduled for 2011 4700/5100 (50/60 Hz) Single-phase 200 to 230 VAC (50/60 Hz) UL standards: Applicable to 60 Hz only 1 Thermo-chiller Series HRS Compact Type (Except HRS050) RoHS

HRX-OM-X010

Table 7-1 Water Quality Standards for Fresh Water (Tap Water) Substance Facility water Circulating water spec. spec. pH (25 deg C) 6.5 to 8.2 6.0 to 8.0 Electrical conductivity (25 deg C) (s/cm) *Circulating fluid 1 to 500 100 to 800 0.5 to 300 Chloride ion (mgCl-/L) Max. 200 Max.50 Sulfate ion (mgSO42-/L) Max.200 Max.50 Acid consumption (pH4.8) (mgCaCO3/L) Max.100 Max.50 Total hardness (

High Vacuum L Type Valve

H 4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 400/100 200 VAC 800/40 800/50 800/100 consumption (W) Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.

CG5-S

stroke for mounting auto switches 25 301 to 400 32 301 to 450 Number of auto switches Model 40 301 to 800 25, 50, 75, 100, 125, 150, 200, 250, 300 D-G5BAL 2 pcs. 1 pc. 50, 63 301 to 1200 15mm 10mm 80 301 to 1400 Refer to page 15 for details. 100 301 to 1500 Note 1) All non-standard strokes are produced upon receipt of order.