Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Standard Nil A Both ends adjuster P Note) Axial piping CS Extension
Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Standard Nil P Note 1) Axial piping Note 1) The combination of axial piping and both ends adjusters or retraction end adjusters is not available.
buffer, axial piping 6 Centralized adjuster 7 Centralized adjuster (Symmetric) 8 Buffer, Centralized adjuster 9 Buffer, Centralized adjuster (Symmetric) Nil 2 S 1 n n Port Switch mounting groove Port Switch mounting groove 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 For details, refer to the next page. i Made to order 16 10, 20, 30, 40, 50, 75, 100, 125 Port Switch mounting groove
to the VX series) (as compared to the VX series) Single valve volume: Single valve volume: Reduced by Reduced by 75% 75% (VDW20) (VDW20) Manifold length: Manifold length: Reduced by Reduced by 18% 18% (VDW30, 7 stations) (VDW30, 7 stations) Lightweight Lightweight (as compared to the VX series) (as compared to the VX series) 100 g: Reduced approx. by 100 g: Reduced approx. by 50% 50% (
40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure [kPa] Vacuum pressure [kPa] ZL3H ZL3H04P ZL3M ZL3M04P Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 23 Multistage Ejector ZL3/ZL6 Series Flow Rate Characteristics (Representative value) ZL6M (04P) Supply pressure: 0.35 MPa/0.37 MPa (With valve) ZL6H (
XC57 With floating joint 2 6 (1/4") Minimum Operating Pressure 0 25 50 75 100 0 25 50 75 100 Supply pressure (PSI) Supply pressure (PSI) 50, 60 30 600 23 23 23 23 22 25 Minimum operating pressure (PSI) 20 500 20 17 17 17 Theoretical thrust (Ibf) 63 (2-1/2") 15 400 10 300 5 200 0 6 (1/4") 10 (3/8") 50 (2") 15 (5/8") 20 (3/4") 25 (1") 32 (1-1/2") 40 (1-1/2") 50 (2") 63 (2-1/2") 100 Bore size
Hz), 3-phase 200 to 230 VAC (60 Hz) Allowable voltage range 10% (No continuous voltage fluctuation) Earth leakage breaker Rated current [A] 30 40 50 Electrical system Sensitivity current [mA] 30 Rated operating current4 [A] 17 32 41 Rated power consumption4 [kW (kVA)] 5.4 (5.9) 10.5 (11.0) 13.1 (14.2) Noise level (Front 1 m/Height 1 m)4 [dB(A)] 75 75 71 Accessories Operation Manual (for
Series ISE70/75/75H 2-Color Display Digital Pressure Switch NPN/PNP open collector 2 outputs added. Cut-to-zero display function added.
Axis 3 ABS 50 50.00 1000 1000 0 0 0 0.5 Axis 4 ABS 50 50.00 1000 1000 0 0 0 0.5 Movement (ex.)
100 150 Load (N) 0 50 100 150 Load (N) 0 50 100 150 Load (N) 200 16 16 16 L = 120 mm L = 120 mm L = 120 mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250
SJ3000-50-1A-ll SJ3000-50-1AS-ll SJ3000-50-1AR-ll X, PE port: Metric size 4 Inch size 5/32" Internal pilot (Metric size) C6: With 6 one-touch fitting (straight) C8: With 8 one-touch fitting (straight) L6: With 6 one-touch fitting (elbow upward entry) L8: With 8 one-touch fitting (elbow upward entry) B6: With 6 one-touch fitting (elbow downward entry) B8: With 8 one-touch fitting (elbow downward
27.5 0 41 57.2 35 7 14 4 41 1/43/8 1/43/8 AC30C-B 1/8 167.4 115.1 30.7 30 55.1 50 29.4 3.5 41 57.2 35 7 14 4 41 AC40C-B 1/8 220.4 147.1 35.8 38.4 72.6 75 33.8 3.5 50 75.2 40 9 18 5 48 1/43/81/2 AC40C-06-B 1/8 235.4 149.1 35.8 38.4 77.6 75 33.8 3 50 80.2 40 9 18 5 48 3/4 Optional specifications Semi-standard specifications With barb With Metal bowl Metal bowl Square type Digital Round
, 75 50, 100 50, 100, 150 Size 8 16 25 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 CAT.NAS100-78 CAT.NAS100-101 Front matter 2 Electric Actuators RotaryTable Step Motor (Servo/24 VDC) Miniature Step Motor (Servo/24 VDC) Rod type Slide table type Basic type High precision type Series LEPY Series LEPS Series LER Series LERH Stroke Stroke Size
Table 8.1-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70
20 82 36 36 41 20 74 65 90 50 20 8-8-27
X+50 X+25 X Display (25 to 0) 25 (100 to 76) (75 to 51) (50 to 26) value ISA3-H X+150 X+100 X+50 X (50 to 0) 50 (200 to 151) (150 to 101) (100 to 51) ISA3-F ISA3-G X+750 Process X+500 X+250 X (250 to 0) 250 (1000 to 751) (750 to 501) (500 to 251) data ISA3-H : The value in the brackets in level 2 shows the boundary value. -66No.PS-OMW0009-C 4 How to use X: Switch point is divided by weight
Delivery pressure (kPa) 500 -35 400 -48 300 -61 200 -75 100 -88 -101 0 Hastelloy is a registered trademark of Haynes International.
] 0.5 [13] 19.7 [500] 3.0 [75] 27.6 [700] 20.7 [526] 20.4 [519] 1.4 [36] 35.4 [900] 38.1 [968] IDFB75E 2 96 Series IDFBE Optional Specifications 1 Refer to How to Order pages 90 and 94 for optional models.
15 + 40(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 20 (n 2) (n = 2, 3, 4, 5) D-H7m/H7mW D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 22.5 (n 2) (n = 2, 3, 4, 5) D-C73C D-C80C D-H7C 10 15 65 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 27.5 (n 2) (n = 2, 3, 4, 5) D-M9mV 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9mV 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) D-M9m D-A9m 10
/60Hz) 200 to 230VAC (50/60Hz) 3-phase 200 to 230VAC (50/60Hz) option Analog monitor output Regenerative option PC LEC-MR-RBRS-422 interface When using this software, order USB cable separately.