Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

1in = 25.4mm W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CL2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231

1

40 24.5 1/4 32 35 52.5 28 69.5 57.5 104.5 73.5 XSA3-32V 56 XSA3-43S 64.5 31 3/8 XSA3-43V 67 82.5 72 58.5 66 72 64 66 5 Normal Close High Vacuum Solenoid Valve XSA Series Dimensions: (Rc, NPT) Female Thread Grommet: G Female thread type D 300 G F C H E P Fitting size 2 1 Q B 2 x M5 thread depth M A Q Grommet: GS Flat terminal: F Conduit: C 11 G F 300 G F 280 G F Terminal part Flat terminal

Hand Valve Series VH 1

VHS 5-8-15

VT307

Ordering Example: VV307-01-052-01-F1 pc. (5 station manifolds base) V0307-1G4 pcs. DXT060-51-13A 1 pc.

AMF

198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1 8 1 4 3 8 , , 7.5 4 4 5 5 AMF150 5.5 6 6 7 7 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 63 76 76 90 90 10 10 10 10 10 1 4 3 8 , AMF250 1 2 3 8 1 2 , AMF350 3 4 14-20-46 6 Odor Removal Filter Series

LMU100/200 Series Mist Spray Unit

3 LMD1-4 LMD1-5 LMD1-6 n 3 6 9 12 15 18 L1 4 x 5.5 3 x Rc1/8 n = Rc 1/8 LMD2 n: Stations L1 25.5 44.5 63.5 82.5 101.5 120.5 L 38 57 76 95 114 133 Model LMD2-1 LMD2-2 LMD2-3 LMD2-4 LMD2-5 LMD2-6 n 2 4 6 8 10 12 2 x 6.5 n x Rc1/8 2 x 6.5 2 x Rc1/8 L1 1067

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

4 q 4 Series LVM10/100 Dimensions/Body Pored Type LVM11-(N.C.) (2 x R3.2) 9 25.4 19 2 x 3.2 Mounting hole (Lead wire length) 300 UL1007 AWG22 52.5 M5 x 0.8 IN port M5 x 0.8 OUT port 2 5 5 16 13 The broken lines indicate the bracket type. LVM11R-(N.C.) LVM12R-(N.O.) LVM112-(Universal) 1.8 (8.25) (Lead wire length) N.O.

2/3 Port Solenoid Valve for Chemicals

4 q 4 Series LVM10/100 Dimensions/Body Pored Type LVM11-(N.C.) (2 x R3.2) 9 25.4 19 2 x 3.2 Mounting hole (Lead wire length) 300 UL1007 AWG22 52.5 M5 x 0.8 IN port M5 x 0.8 OUT port 2 5 5 16 13 The broken lines indicate the bracket type. LVM11R-(N.C.) LVM12R-(N.O.) LVM112-(Universal) 1.8 (8.25) (Lead wire length) N.O.

Filter Regulator IW Series

/4 Pressure gauge port Rc1/4 (2 locations) Weight 0.66 kg 0.58 kg 154 Filter Regulator IW Series Flow Rate Characteristics (Representative values) IW212 Flow rate characteristics IW213 Flow rate characteristics Supply pressure: 0.5 MPa 0.25 Supply pressure: 0.5 MPa 0.35 0.3 0.2 Set pressure [MPa] Set pressure [MPa] 0.25 0.15 0.2 0.15 0.1 0.1 0.05 0.05 0 0 100 300 400 200 500 0 0 100 300 400

30

Basic type Standard/Thread nominal size JC20-8-125 JC30-10-125 JC40-14-150 JC63-18-150 0.5 0.5 0.75 1 300 800 1250 3100 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 20 25/32 40 50/63 5 Semi-standard/Thread nominal size JC20-8-100 JC25-10-150 JC32-10-100 JC40-12-125 JC40-12-150 JC40-12-175 JC50-16-150 JC63-16-200 0.5 0.5 0.5 0.75 0.75 0.75 1 1 300 800 800 1250 1250 1250 3100 3100 M8 x 1 M10 x

AMF

NBR JIS B2401G35 1 pc. u 4.6-30 Series AMF Dimensions: AMF150 to AMF350 M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1/8, 1/4,3/8 1/4, 3/8 5.5 6 6 7 7 139 152 158 184

Magnetic Separator FHM Series

100 200 300 400 500 Elimination ratio (%) Elimination ratio (%) Elimination ratio (%) 75 70 60 50 40 30 20 10 0 1 5 10 50 30 100 1 5 10 50 100 Flow-back count Flow-back count Flow-back count Explanation of graph Explanation of graph Example: Elimination ratio and concentration after using the FHM-100 for one hour under the following conditions.

Ozone Resistant

port solenoid valve VQ Directional control valves 0 1000 2000 4000 5000 1000 2000 3000 1000 2000 1000 3000 5000 7000 3000 5000 7000 3000 5000 7000 20, 30 100 100 200 300 100 300 500 300 500 700 1000 2000 2500 3000 4000 4000-06 5000 6000 1000 2000 3000 4000 4000-06 2550 3050 4050 4050-06 3050 4050 4050-06 2060 2560 3060 4060 4060-06 5060 6060 425 625 825 925 3000 210 1020 300 400 500 600 AWM

ARJ1020F

5 q u o Material Note Component Parts !4 r No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

5 !6 !7 !

Series HAW Water Cooled Aftercooler 1

400 500 1000 1500 2000 3300 4000 4000 5700 7000 HAW2 5 HAW7 5 37.5 47 51 38 44.5 48 43 49 54 42 47 49.5 45 48.5 52 HAW22 17 HAW37 25 Maintenance 7000 8600 10 36 Caution HAW55 1.

ARJ310

5 q u o Material Note Parts list !

MGC

5 !6 !7 !8 No.

Clean Regulator

100 200 300 400 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH3100-02 SRH3110-02 SRH3100-02 0.5 0.20 0.20 0.4 Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 0 100 200 300 400 0 2 4 6 400 100 200 300 0 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min SRH4000-03 SRH4010-03 SRH4000-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet

Electric Actuator with Integrated Guide Series LTF

Mitsubishi Electric Corporation Yaskawa Electric Corporation 0.02 Ground ball screw 100W 30 300 0.05 Rolled ball screw 0.02 Ground ball screw 200W 50 500 0.05 Rolled ball screw 0.02 Ground ball screw 100W Standard motor [Tamagawa Seiki Co., Ltd.] 500 3 0.05 Rolled ball screw 0.02 Ground ball screw 200W 1000 5 With motor brake Vertical mounting Non-standard motor 0.05 Rolled ball screw Frame-type