Rodless Cylinder for Vacuum Series CYV ø15, ø32

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

5 Port Solenoid Valve Series SQ1000/2000

2.9 (0.16) SQ1530 20 or less 100 Metal seal 26 or less Dust proof Pressure Enclosure center 3.2 (0.18) SQ1531 25 or less 100 Rubber seal 33 or less Note 1) In case of low temperature, use dry air with no condensation.

90

150 117000 yen reduction Current model IR1000 Series IR2000 Series 100 100 IR1000-A Series IR2000-A Series IR3000-A Series 50 50 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Units used Units used Released into atmosphere IR Special bleeding structure No fixed throttle in the new design.

Mounting: A (Both Ends Tapped), Bore Size: 63mm, Thread: TN (NPT Thread), Full Stroke: 75mm, First Stroke: 40mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector), Number: 3 pcs.

Mounting: A (Both Ends Tapped), Bore Size: 63mm, Thread: TN (NPT Thread), Full Stroke: 125mm, First Stroke: 60mm, Auto Switch: A93V--Reed, DC Volt, AC Volt, LED, Vertical, Lead Wire or Prewired Connector: Z (5m)

Mounting: A (Both Ends Tapped), Bore Size: 63mm, Thread: TN (NPT Thread), Full Stroke: 50mm, First Stroke: 5mm, Auto Switch: A96--Reed, DC Volt, LED, Horizontal

Mounting: A (Both Ends Tapped), Bore Size: 63mm, Thread: TN (NPT Thread), Full Stroke: 25mm, First Stroke: 5mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: S (1 pc.)

Mounting: A (Both Ends Tapped), Bore Size: 63mm, Thread: TN (NPT Thread), Full Stroke: 50mm, First Stroke: 5mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: S (1 pc.)

Mounting: A (Both Ends Tapped), Bore Size: 63mm, Thread: TN (NPT Thread), Full Stroke: 250mm, First Stroke: 80mm, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: L (3m)

Mounting: Both Ends Tapped, Bore Size: 63mm, Thread: NPT Thread, Full Stroke: 50mm, First Stroke: 5mm, Auto Switch: A96--Reed, DC Volt, LED, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Mounting: Both Ends Tapped, Bore Size: 63mm, Thread: NPT Thread, Full Stroke: 25mm, First Stroke: 5mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 1 pc.

Mounting: Both Ends Tapped, Bore Size: 63mm, Thread: NPT Thread, Full Stroke: 50mm, First Stroke: 5mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 1 pc.

Mounting: Both Ends Tapped, Bore Size: 63mm, Thread: NPT Thread, Full Stroke: 250mm, First Stroke: 80mm, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Mounting: Both Ends Tapped, Bore Size: 63mm, Thread: NPT Thread, Full Stroke: 75mm, First Stroke: 40mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 1.0m Cord Length, M8-3 Pin Connector, Number: 3 pcs.

Mounting: Both Ends Tapped, Bore Size: 63mm, Thread: NPT Thread, Full Stroke: 125mm, First Stroke: 60mm, Auto Switch: A93V--Reed, DC Volt, AC Volt, LED, Vertical, Lead Wire or Prewired Connector: 5m, Number: -

AMD

O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AMD150 1 8 1 4 3 8 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122

HRX-OM-X071

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

VM

Inch size 1/4" 1/8" 5/32" Flow rate (l/min(ANR)) 170 100 120 150 IN OUT Effective area (mm2) 2.6 1.5 1.8 2.3 IN P1 Note) Flow rate is the value measured under a pressure of 0.5 MPa and a temperature of 20C.

Compact and Low Profile Design Rodless Cylinder Series MY2H/HT, MY2C, MY3A/3B, CY1F

200 300 400 500 600 700 800 900 1000 1200 1400 1600 1800 2000 MY3A/3B 3000 16, 25, 40, 63 CAT.S20-153 English cat.no.ES20-153 Mechanical Joint Rodless Cylinder/Compact and Low Profile Series MY2H/HT Series MY2H/HT Standard stroke (mm) Bore (mm) Model Guide 50 100 150 200 250 300 350 400 450 500 550 600 700 800 900 1000 1200 MY2C 16 Cam follower guide High precision guide Single axis MY2H