IR1000/2000/3000

) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 100 0 20 40 60 80 100 120 57.0 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV3000 IRV3000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0 100 95 90 85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160 VAC side pressure (kPa)

7

60 Material: Cast iron Unit: mm Material: Cast iron Part no.

LEF-OM002xx

60 B A 50 H 50 W(kg) A/H W(kg) 40 40 30 30 20 20 10 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 LECPA V(mm/s) V(mm/s) LES40 Horizontal Transfer LES40 Vertical Transfer B 60 (2) Servo motor (24VDC) Ball screw drive 60 B A 50 H 50 A/H W(kg) W(kg) 40 40 30 30 20 20 10 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 V(mm/s) V(mm/s) LEFS16A LEFS25A Model Stroke [

Series SV

MB 50 10% 30% 70% 300 50% Stroke mm AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 Stroke mm AS3201F -03-10 200 100 0 ANA1 -C12 T1075 400 MB 80 300 Stroke mm AS4000-03 200 100 0 400 MB 100 300 Stroke mm 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ216 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Air cushion is not available for 21-/22-.

MXW Series Long Stroke Slide Table

Movable load W 200 MXW25 170 W 150 120 MXW20 100 Max.movable load (N) Movable load N MXW16 70 W Model 60 50 40 18 MXW 8 MXW12 30 40 MXW12 25 70 MXW16 20 MXW8 17 15 110 MXW20 W W 12 170 10 MXW25 50 100 200 300 500 Piston speed mm/s 1N = 0.2248 lbf (Graph1) 1N = 0.2248 lbf Mp Mep (Pitch moment) My Mey (Yaw moment) Mr (Roll moment) Moment MXW25 120 (Static moment / movable moment) Allowable

LVQ

High temperature 0 to 170 Ambient temperature (C) 0 to 60 0.08 0.18 0.22 0.87 0.72 Mass (kg) Note) ( ) is high flow specification.

3

80 100 Fluid temperature [oC] Fluid temperature [oC] PF3W711/511 PF3W721/521 1.2 1.6 Operating pressure/ Proof pressure [MPa] 1.4 1.0 Proof pressure [MPa] 1.2 Pressure [MPa] Pressure [MPa] 0.8 1 0.6 0.8 Operating pressure [MPa] 0.6 0.4 0.4 0.2 0.2 3-Color Display Digital Flow Monitor for Water 0 0 0 90 100 80 70 60 50 40 30 20 10 0 90 100 80 70 60 50 40 30 20 10 Fluid temperature [oC] Fluid

High Power Cylinder Series RHC

High Power Cylinder Series RHC 20, 25, 32, 40, 50, 63, 80, 100 Bore sizes 50, 63, 80 and 100 added to Series RHC and newly released! Suitable for high speed use or heavy loads at low speed.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

44 M6 x 1.0 34 8 8( 7.8) 36 5.5 M4 x 0.7 7 47 7 10 25.5 5.4 9 18 10 5 20 10 to 60 47.5 M6 x 1.0 37.5 10 10( 9.8) 40 5.5 M5 x 0.8 7 52 8 10 28 5.4 9 19.5 10 6 25 10 to 50, 75, 100 54 M6 x 1.0 42 12 12(11.8) 45 8.5 M6 x 1.0 7 60 4.5 10 12 34 5.5 9 23 10 49.5 7 30 10 to 50, 75, 100 60.5 M6 x 1.0 48.5 13 16(15.8) 52 8.5 M8 x 1.25 7 69 5 14 12 40 5.5 9 26 10 57 10 40 10 to 50, 75, 100 62

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(with connector and 2 of sockets only) Rated voltage Lead wire length 5 24 VDC Nil 300 mm 6 12 VDC 6 600 mm Electrical entry V 6 VDC 10 1000 mm Grommet, 300 mm lead wire G S 5 VDC 15 1500 mm Grommet, 600 mm lead wire H R 3 VDC 20 2000 mm L With lead wire 1 100 VAC 50/60 Hz L plug 25 2500 mm LN Without lead wire 2 200 VAC 50/60 Hz connector 30 3000 mm LO Without connector 110 VAC 50/60 Hz

AC Servo Motor Driver (Pulse input type/Positioning type)

PA05 100 100 Electronic gear numerator *3. PA06 1 100 35 100 (10) (7) (10) Electronic gear denominator *3.

Vacuum

/min (3.54 sctm) 632/min (2.23 sclm) -84kPa (-24 I 0.7MPa (100 0.2-0.5MPa (30-70 psi) 0.4MPa (60 psi) Max suction flow rate (ANR) Air consumption (ANR) Max. vacuum pressure NZLl12-c Slandard supply pressure 5 50.C (40 122.F) Air Evacuation Time Exhaust Characteristics Flow Characteristics Supply pressure: 0 4MPa (58psi) ,100 (29 0) -90 (26 1) Understanding the graph above The time necessary

Vacuum

/min (3.54 sctm) 632/min (2.23 sclm) -84kPa (-24 I 0.7MPa (100 0.2-0.5MPa (30-70 psi) 0.4MPa (60 psi) Max suction flow rate (ANR) Air consumption (ANR) Max. vacuum pressure NZLl12-c Slandard supply pressure 5 50.C (40 122.F) Air Evacuation Time Exhaust Characteristics ) Flow Characteristics Supply pressure: 0 4MPa (58psi) ,100 (29 0) -90 (26 1) Understanding the graph above The time necessary

PA3000/5000/PAX1000

per minute 1 60 = x x Reference life cycles Cycles per minute 1 8 (daily operating time) Service life 1 60 = 1 8 50,000,000 50 x x 2083 days = 27 Process Pump Common Precautions 5 Be sure to read before handling.

T

Min. bending radius (mm) 75 60 48 36 24 25 13 100 15 20 30 60 75 Caution Operating temperature 20 to +60C (Water: 0 to 40C) (No freezing) 1. Applicable for general industrial water. Please consult with SMC if using other kinds of fluid. Surge pressure must be under the max. operating pressure.

Electric Rotary Table

Load A Displacement LER50 LER10 LER50 (Basic type) LER10 (Basic type) 200 Displacement (m) Displacement (m) 400 150 350 120 10 20 30 40 LERH50 (High precision type) 50 LERH10 (High precision type) 0 20 40 60 80 100 120 0 5 10 15 20 25 30 Load (N) Load (N) LER30 300 LER30 (Basic type) 250 Displacement (m) 200 50 130 150 LERH30 (High precision type) 0 10 20 30 40 50 60 70 Load (N) Deflection

XL

.: 120C [248F]) Uniform baking temperature Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. 3, 4, 5 3 120 120 Comparison with KF25 flange 100 100 Body 1 4 Temperature (C) Body 2 80 5 2 Temperature (C) Body 3 1 1, 2 Bellows 60 30 0 60 30 0 Time (minutes) Time (minutes) Valve F=(1.8xC

High Vacuum Angle Valve, XL Series

.: 120C [248F]) Uniform baking temperature Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. 3, 4, 5 3 120 120 Comparison with KF25 flange 100 100 Body 1 4 Temperature (C) Body 2 80 5 2 Temperature (C) Body 3 1 1, 2 Bellows 60 30 0 60 30 0 Time (minutes) Time (minutes) Valve F=(1.8xC

Air Slide Table Series MXW

S n Auto switch Without auto switch (Built-in magnet) Nil Bore size (Stroke (mm)) For the applicable auto switch model, refer to the table below. 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Option Nil Standard (with urethane bumper) With shock absorbers 2 pcs.