High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

W is width across flats dimension. 30.5 26 36 9 10 40 32 36 47 108 Union: LQ2U Metric sizes Applicable tubing O.D. Model L M N W H E W 12 19 10 12 6 8 10 4 6 LQ2U22 LQ2U21 19 18 19.9 16 55 1/4 (M) LQ2U52 LQ2U51 LQ2U42 LQ2U41 LQ2U33 LQ2U32 LQ2U31 SMC 65 22 24 26.2 24 H 77 64 (E) (E) L 28 30 33.1 30 21 Class 2, 3 88 75 32 36 40 36 26 86 (M) N Inch sizes Applicable tubing O.D.

ZX

Red Diode Coil Black Light/Surge voltage suppressor Coil 13-2-40 40 Vacuum Module: Vacuum Pump System Series ZX ZX Table (1) Valve Unit/Combination of Supply Valve and Release Valve (Refer to page 13-2-42 for details specifications.) ZR Components Solenoid valve Supply valve Release valve Air operated External release N.C. (VJA314) ZX1A None None Air operated N.C. (ZX1A) N.O.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA 30% 70% PF2M725 92% 8% 0.5 to 50 L/min 2.5 to 52.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.5 to 30 L/min

100

30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 200 180 160 140 120 100 80 60 40 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 200 180 160 140 120 100 80 60 40 20 0 Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Vacuum pressure Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] Suction flow rate Suction flow rate Air

V

(i) Side Entry Single Sub-base for use with the Base Mounted Valve (Type 40). (ii) 2-10 Station Type 20 Mmanifold for use with the Body Ported Valve (Type 20). (iii) 2-10 Station Type 40 Side Entry Manifold for use with the Base Mounted Valve (Type 40). (iv) 2 10 Station Type 40 Bottom Entry Manifold for use with the Base Mounted Valve (Type 40).

Magnetically Coupled

10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 1/4" 6 12 3/8" 10 20 5/8" 15 40 3/4" 20 60 1" 25 80 32 1-1/4" 80 1-1/2" 40 80 2" 50 80 2-1/2" 63 80 Note) The longer the stroke, the larger the amount of deflection in a cylinder tube.

NAAMS Standards Compliant

HF Handle position: Left Handle position: Right [mm] Bore size Arm opening angle HF Bore size H HA HD 50 250 61.5 40 63 250 64.5 40 15 36 30 49 45 61 60 73 75 87 90 101 105 114 120 124 50 15 41 30 55 45 68 60 81 75 94 90 107 105 117 120 124 63 5 NAAMS Standards Compliant Power Clamp Cylinder CKZ3N -X2742A -X2568 Dimensions: Clamp Arm Bore Size 50 Clamp Arm Code List Straight: Plain Bore size

Air Slide Table Series MXP

68 22 24 29 40 18 15 59 55 76 MXP12-25 30 60 98 40 42 49 60 23 25 89 75 106 205 Series MXP Dimensions: MXP12 with Shock Absorber 3 Z V K 5 2 x M4 x 0.7, depth 6 Note) Since the body and table are made of a magnetic substance, it could become magnetized if touched by a magnet, etc.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Type 40 Applicable solenoid valve 10-SYJ514M-(-Q) 10-SYJ524M-(-Q) How to Order 10 SS3YJ5 40 05 M5 Clean series Applicable blanking plate assembly Refer to page 621.

AIR COMBINATION

28.5 5 30 24 33 5.5 12 3.5 29 1/81/4 1/43/8 AC30D-B 1/8 110.2 115.1 85.6 30 55.1 50 29.4 3.5 41 35 7 14 4 41 AC40D-B 1/8 145.2 147.1 91.7 38.4 72.6 75 33.8 1.5 50 40 9 18 5 48 1/43/81/2 AC40D-06-B 1/8 155.2 149.1 93.2 38.4 77.6 75 33.8 1.2 50 40 9 18 5 48 3/4 Optional specifications Semi-standard specifications With barb With Metal bowl Metal bowl Square type Digital Round type Round

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Load (N) 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 40 10 10 10 L = 100 mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.03 0.06 0.02 0.02 0.04 0.01 0.01 0.02 0 0 0 80 20 40 60 80 Load (N) 20 40

ITV0000

Return 0.5 0.4 0.2 0 0 Out -0.2 -0.4 -0.5 -0.6 -0.8 0 25 50 75 -1 1 2 3 4 -1 100 5 Input signal % F.S.

Title not found

IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Series ZFB Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Metric size 3/16" 20 22 20 22 30 30 75 40 100 62 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 1/4" 1/4" Inch size (2) 3/8" 1/2" Specifications Fluid Air/Nitrogen Negative pressure 0.5MPa 0 to 60C (Non-freezing) 30m 0.15MPa Nylon/Soft Nylon/Polyurethane

Booster Regulator/Air Tank

IRV Outlet pressure (MPa) Outlet pressure (MPa) 1.04 2.0 Set point VBAT10A, 20A, 38A 1.02 VEX 1.95 1.0 0.1 1.9 SRH 0.98 Max. pulsation range (MPa) 0.08 1.85 0.96 SRP 1.8 0.94 0.06 SRF VBAT10A 0 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) 0 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) 0.04 ITV Charge Characteristics Charge Characteristics 0.02 IC VBAT20A VBAT38A 5 400 ITVH 0 10 20 30 40

Compact Electro-pneumatic Regulator Series ITV0000

Return 0.5 0.4 0.2 0 0 Out -0.2 -0.4 -0.5 -0.6 -0.8 0 25 50 75 -1 1 2 3 4 -1 100 5 Input signal % F.S.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Load N 0 10 20 30 50 Load N 0 10 20 30 40 Load N 40 10 10 10 L = 100mm L = 100mm L = 100mm MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 Table displacement mm Table displacement mm Table displacement mm 0.03 0.06 0.02 0.02 0.04 0.01 0.01 0.02 0 0 0 80 20 40 60 80 Load N 20 40 60 80 Load N 20 40 60 100 Load N 12

Refrigerated Air Dryer

Example: When the IDFA100F-40 is provided with options C or R or V, the model number will be the IDFA100F-40-CRV. 98 A Refrigerated Air Dryer IDFA100F/125F/150F Series Standard Specifications For use in Asia and Oceania IDFA100F-38 IDFA125F-38 IDFA150F-38 For use in Europe Model Specifications IDFA100F-40 IDFA125F-40 IDFA150F-40 Fluid Inlet air temperature Inlet air pressure Compressed air

3 Port Air Operated Valve Series SYJA300

Type 40/Type 41 How to Order SS3YJ7 40 05 01 Applicable solenoid valve SYJ714SYJ714MSYJ724SYJ724MApplicable blanking plate assembly SYJ700-10-2A R port 1/4 R port 1/8 P, R port thread type Manifold type Stations 40 41 Type 40 Type 41 Nil Rc G NPT NPTF 2 stations : 20 stations 02 : 20 A A F N T A A 01 1/8 A port size P port 1/8 P port 1/4 A port 1/8 A port 1/8 Note) If there are more than

NCQ8

mA or less 2.5 to 40 mA Internal voltage drop 0.8 V or less at 10 mA (2 V or less at 40 mA) 4 V or less 100 A or less at 24 VDC Current leakage 0.8 mA or less Operating position .

48

/closing stroke 16 (32) 24 (48) 32 (64) 40 (80) Size Size Size Size 10 20 32 40 10 20 32 40 10 16 20 25 10 16 20 25 32 40 4 6 10 14 CAT.NAS100-77 Controller Step data input type for servo motor Programless type Step data input type for step motor Series LECP1 Series LECP6 Series LECA6 Control motor Control motor Control motor Step motor (Servo/24 VDC) Servo motor (24 VDC) Step motor (Servo