Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Movement MOD Speed Position Acceleration Deceleration Pushing force Trigger LV Pushing speed Moving force Area 1 Area 2 In position 0 1: Absolute 100 10 3000 3000 0 0 0 100 0 0 0.50 1 1: Absolute 100 100 3000 3000 0 0 0 100 0 0 0.50 2 1: Absolute 100 200 3000 3000 0 0 0 100 0 0 0.50 Note) The step data input range changes depending on the actuator model.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

L N VQ110VQ110YVQ110 ZQ1-VQ120Model Push-locking type Non-locking push type / Locking type (Tool type) Manual override Non-locking push type / Locking type (Tool type) Rated coil voltage 12, 24 VDC, 100, 110, 200, 220 VAC 12, 24 VDC, 100, 110, 200, 220 VAC 12, 24 VDC 12, 24 VDC DC 100 VAC 110 VAC 200 VAC 220 VAC 1 W 1 W 0.5 W 0.6 VA (6 mA) 0.65 VA (5.9 mA) 1.2 VA (6 mA) 1.3 VA (5.9 mA) Grommet

76

Note) Air flow capacity (scfm [ANR]) Applicable air compressor (kW) 50 Hz Model Power supply voltage (Frequency) Port size 60 Hz IDF1E 3.53 4.24 0.75 Single-phase 100 VAC (50 Hz) Single-phase 100/110 VAC (60 Hz) IDF2E 7.06 8.30 1.5 Rc3/8 IDF3E 11.3 13.1 2.2 IDF4E 18.4 20.1 3.7 Rc1/2 Single-phase 100/200 VAC (50 Hz) IDF6E 26.5 29.0 5.5 Single-phase 100/110 VAC, 200/220 VAC (60 Hz) IDF8E 43.1

Electric Actuator / Low profile slider type

Note 10) A reference value for correcting an error in reciprocal operation. -10- (3) LEMH (Linear guide single axis type) / LEMHT (Linear guide double axis type) Model LEMH25/LEMHT25 LEMH32/LEMHT32 50, 100, 150, 100, 150, 200, 250, 300, Stroke (mm) Note 1) 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000) 350, 400, 450, 500, 550, 600, (700), (800), (900

AC Servo Motor Driver (Pulse input type/Positioning type)

PA05 100 100 Electronic gear numerator *3. PA06 1 100 35 100 (10) (7) (10) Electronic gear denominator *3.

XL

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

RS MI Roller Type/Round Bar Type/Chamfered Type Lever Type (With shock absorber) Friction coefficient = 0 Graph (2) Graph (1) Lever Type (With shock absorber) Friction coefficient = 0.1 Graph (3) 100 200 200 50 130 130 50 50 100 100 50 40 40 40 Mass of transferred object m (kg) Mass of transferred object m (kg) Mass of transferred object m (kg) 32 40 Example 1 30 40 50 40 50 20 30 30 32

T

Model Model L D L D TCU0805-1-N-X6 TCU0425-1-N-X6 1 N x 8 31 3 to 90 L x 5.2 + 200 N x 4 18 1 3 to 90 L x 5.9 + 200 8 5 TCU0805-2-N-X6 TCU0425-2-N-X6 2 42 3 to 40 L x 3 + 200 N x 16 L x 4.4 + 200 N x 8 2 3 to 90 4 2.5 28 TCU1065-1-N-X6 TCU0425-3-N-X6 1 52 3 to 45 L x 5 + 200 N x 10 N x 12 3 3 to 63 L x 2.9 + 200 28 10 6.5 TCU1065-2-N-X6 TCU0604-1-N-X6 2 3 to 35 N x 20 52 L x 3 + 200 N x 6

Turntable Cylinder Series MGT

l (mm) l 300 200 300 MGTL80 P = 0.5MPa m 200 MGTM80 100 P = 0.5MPa Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 50 40 25, 50st 10 30 5 4 3 2 20 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5MPa 100 P = 0.5MPa Larger than

Parallel Style Air Gripper: Wide Type Series MHL2

MPa 300 300 Gripping force (N) Gripping force (N) Gripping force (N) Gripping force (N) Pressure 0.6 MPa Pressure 0.6 MPa 400 400 250 250 0.5 MPa 0.5 MPa 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 200 200 300 300 0.4 MPa 0.4 MPa 150 150 0.3 MPa 0.3 MPa 200 200 0.3 MPa 0.3 MPa 100 100 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MPa 100 100 50 50 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 50 100 150 200 0 0 50 100 150 200 0 40

Support Guide/11-LEFG Series

: S Step Motor (Servo/24 VDC) AC Servo Motor Servo Motor (24 VDC) LEC SS-T Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 LEC Y 11-LEFG16-S 11-LEFG25-S 11-LEFG32-S 11-LEFG40-S Motorless LAT LZ Weight LC3F2 Ball Screw Drive: S Step Motor (Servo/24 VDC) AC Servo Motor Servo Motor (24 VDC) Stroke [mm] Model 50 100 150 200 250 300 350 400 450

CNS

700 800 900 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-8-7 8 Cylinder with Lock Double Acting, Single Rod Series CNS 125, 140, 160 How to Order 125 125 100 100 Y7BW CDNS D CNS D L Without auto switch L With auto switch Number of auto switches Built-in magnet Port thread type Courtesy

Process Valve Series VNA

VO307 00 Q CE compliant VO301 00 X302 Coil rated voltage 1 2 3 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Component Parts No.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

0 0 0 50 100 150 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC74 6 ZFC75 8 0.1 MPa 0.3 MPa 0.5 MPa 0.1 MPa 0.3 MPa 30 30 Differential pressure [kPa] Differential pressure [kPa] 0.5 MPa 0.7 MPa 20 20 0.7 MPa 10 10 0 50 100 150 250 200 0 0 0 100 200 300 400 500 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC76 10 ZFC77 12 0.1 MPa 0.3 MPa 0.1 MPa 0.3 MPa 30 30 0.5 MPa 0.5 MPa

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

200 300 400 500 1000 1500 Piston speed mm/s 100 200 300 400 500 1000 1500 Piston speed mm/s 100 200 300 400 500 1000 1500 Piston speed mm/s MY2C MY2 H/HT Maximum Load Mass Select the load mass from within the range of limits shown in the graphs.

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

40 50 100 200 300 400 1 5 4 MGG 10 20 30 40 50 100 200 300 400 10 50 100 5 10 50 100 Eccentric distance : l (mm) Eccentric distance : l (mm) Stroke (mm) Stroke (mm) MGC l = 200 mm Graph l = 300 mm Graph v = 150 mm/s or less Graph v = 200 mm/s or less Graph MGF 20 300 300 MGZ 200 200 MGF100 MGF100 20 MGT 100 100 MGF100 MGF100 10 MGF100 MGF100 50 40 50 40 MGF63 MGF63 Load mass: m0 (kg) Load

Compact manifold regulator ARM5 Series

150 200 250 0 0 50 100 150 200 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM5AA1-308 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7 MPa ARM5AA1-308-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.5 MPa 0.7 0.35 0.6 0.30 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM5AA1

Nozzle Type Ionizer

Bar length [mm] IZN10-G-100-X226 100 IZN10-G-200-X226 200 IZN10-G-300-X226 300 IZN10-G-400-X226 400 IZN10-G-500-X226 500 IZN10-G-600-X226 600 Part no.

Adsorption Plate

Adsorption surface size SP1130 SP1230 SP1330 SP1430 SP1530 SP1630 50 x 50 55 40 10 Related Products 100 x 100 95 50 10 P2 P3 P2 P3 150 x 150 120 75 10 200 x 200 145 100 10 Rc 1/8 Rc 1/8 P3 P3 250 x 250 170 125 10 300 x 300 195 150 10 Square Rc 1/8 Rc 1/8 P1 P2 Base part no.