90

Vacuum pressure [kPa] 80 Vacuum pressure 60 Suction flow (Silencer exhaust) 40 Air consumption 20 Port exhaust Silencer exhaust 0 0 10 20 30 40 Suction flow [L/min (ANR)] ZK210 Flow-rate Characteristics Exhaust Characteristics 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] 0 10 20 30 40 50 60 70 80 90 100 100 Vacuum pressure [kPa] Vacuum pressure [kPa] 80

5 Port Solenoid Valve Series VQZ1000/2000/3000

19 19.5 19 18 18.5 18.5 17.5 17.5 17.5 17.5 17.5 176 188 200 164 128 140 152 116 80 92 104 80 80 80 80 Note) The L dimension of 2 to 6 stations is the same.

Compact Cylinder

10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 55 60 65 70 75 80 85 90 95 100 110 130 150 55 60 65 70 75 80 85 90 95 100 110 130 150 M6 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110

MY2

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

Turntable Cylinder Series MGT

Rc1/4 Rc3/8 Rc3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41 51 52 52 72 50 54 47 38 42 35 128 128 148 28 28 48 110 140 166 142 180 210 28 25.5 32.5 63 80 100 88 92 85 (mm) Bore size (mm) X XA XB XC XL YY YL Z 24 28 11 8 10 10 6 7 7 5 6 6 80 100 124 4 5 5 20 24 28 63 80 100 M10 X 1.5 M12 X 1.75 M14 X 2.0 (mm) MGTM (Slide bearing) MGTL (Ball bushing) (mm) AA E BD Bore size (mm) AA A E

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 7-9-48

MHK2

-25S/C 0.49 MHKL2-25S MHKL2-25C M: Allowable moment (M = WL) 100 100 W 80 80 Gripping force (N) Gripping force (N) M Pressure 0.6 MPa Pressure 0.6 MPa 60 60 Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 0.5 MPa 40 40 L 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0 0 20 40 60 80 100 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) 12-6-11 11 Series MHK2 Dimensions MHK2-12: Standard type 9

MHK2

-25S/C 0.49 MHKL2-25S MHKL2-25C M: Allowable moment (M = WL) 100 100 W 80 80 Gripping force (N) Gripping force (N) M Pressure 0.6 MPa Pressure 0.6 MPa 60 60 Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 0.5 MPa 40 40 L 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0 0 20 40 60 80 100 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) 12-6-11 11 Series MHK2 Dimensions MHK2-12: Standard type 9

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Mounting bolt Mounting bolt diagram C D D Model C Mounting bolt Model C D Mounting bolt M5 x 55l x 60l x 65l x 70l x 75l M8 x 95l x 100l x 105l x 110l x 115l CHQB63 10D (M) 5D (M) CH QB20 55 60 65 70 75 80 85 90 95 100 70 75 80 85 90 95 100 105 110 115 140 165 75 80 85 90 95 100 105 110 115 120 145 170 90 95 100 105 110 115 120 125 130 155 180 95 100 105 110 115 120 125 130 135 160 185 100

2 Phase Stepper Motor/Without Motor Brake Series LXP

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 6kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) 200 100 50 10 1 Positioning distance (mm) 100 200 50 10 1 10 20.1 10.1 5.1 1.1 0.2 10 10.1 20.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 40 5.1 2.6 1.3 0.3 0.1 40 2.6 5.1 1.3 0.3 0.1 80 2.6 1.3 0.7 0.2 0.1 80 1.3 2.6 0.7 0.2 0.1

Mechanically Jointed Rodless Cylinder Series MY2

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2C 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

Air Cylinder

30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 126 to 150 st 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 101 to 126 to CA2 150 st 10 48.5 56 68 80 6 9 91.5 99 111 123 16 48.5 57 69 81 87 111 129 141 6 9 91.5 100 112 124 130 154 172 184 125 st 100 st 125 st CS1 CS2 Single Acting, Spring Extend: Rod Flange (F) Stroke CJ2KF 10 16 TZ Mounting nut NN GA View

LG1H

Refer to pages starting with 181 for mounting. 95 95 100 8(4)-6.2 B () () (170) 110 20 95 95 A () () (150) A B 100 200 300 400 Stroke Model LG1H212NA-100-F LG1H212NA-200-F LG1H212NA-300-F LG1H212NA-400-F 60 160 260 80 180 280 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.)

End Lock Cylinder Series CBG1

+ l 264 + l 63 207 244 Z + Stroke 261 + l 319.5 + l 80 252 310.5 ZZ + Stroke 269 + l 345.5 + l 100 260 336.5 Dimensions inside ( ) are for long strokes. 7

2 Phase Stepper Motor/Without Motor Brake Series LXS

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 10kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 150 100 50 10 1 150 100 50 10 1 10 10 15.1 10.1 5.1 1.1 0.2 15.1 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 40 40 3.8 2.6 1.3 0.3 0.1 3.8 2.6 1.3 0.3 0.1 80 80 1.9 1.3 0.7 0.2 0.4 1.9 1.3 0.7 0.2

%silltr

n) t5 20 25 30 40 50 65 80 100 125 Elbow 0.3 0.4 0.5 0.7 0.8 l . l 1.4 1.8 2.4 3.2 90' Bend (lono) 0.1 0.2 0.3 0.4 0.5 0.6 0.8 0.9 1.2 1.5 90' Elbow 1.0 1.2 1.6 1.8 ?.

SMC Basic Pneumatics

n) t 5 20 25 30 40 50 65 80 100 125 Elbow 0.3 0.4 0.5 0.7 0.8 l . l 1.4 1.8 2.4 3.2 90' Bend (lono) 0.1 0.2 0.3 0.4 0.5 0.6 0.8 0.9 1.2 1.5 90' Elbow 1.0 1.2 1.6 1.8 ?.

Parallel Style Air Gripper: Wide Type Series MHL2

0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 60 60 80 80 0.4 MPa 0.3 MPa 0.4 MPa 0.3 MPa 0.3 MPa 40 40 0.3 MPa 0.2 MPa 40 40 0.2 MPa 0.2 MPa 0.2 MPa 20 20 0 0 40 80 120 160 200 0 40 80 120 160 20 40 60 80 100 120 140 0 20 40 60 80 100 120 Gripping point R (mm) Gripping point R (mm) Gripping point R (mm) Gripping point R (mm) MHL2-40D MHL2-40D 2 1 2 1 MHL2-32D MHL2-32D 500 500 Pressure 0.6 MPa Pressure

0.4

Bore size Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It