Environment

LEFS16/Ball Screw Drive Horizontal Vertical 16 6 14 Lead B Lead B 12 Work load: W [kg] Work load: W [kg] 4 10 Lead A 8 Lead A 6 2 4 2 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 700 800 Speed: V [mm/s] Speed: V [mm/s] LEFS25/Ball Screw Drive Horizontal Vertical 20 30 Lead B 25 15 Work load: W [kg] Work load: W [kg] Lead B 20 10 15 Lead A Lead A 10 5 Lead H Lead H 5 0 0 0 100 200

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

A B A B A B A B A B A B A B A B A B A B 40 10 8 6 4 4 1 5.5 3.5 3.5 0.5 0.5 0 1 0 7 4 2.5 0 4.5 1.5 12 9 50 10 8 6 4 3.5 1.5 5.5 3.5 3 1 0 0 0.5 0 6.5 4.5 2 0 4 2 11.5 9.5 63 12.5 11.5 8.5 7.5 6 5 8 7 5.5 4.5 2.5 1.5 3 2 9 8 4.5 3.5 6.5 5.5 14 13 80 16 14 12 10 9.5 7.5 11.5 9.5 9 7 6 4 6.5 4.5 12.5 10.5 8 6 10 8 17.5 15.5 100 17.5 16.5 13.5 12.5 11 10 13 12 10.5 9.5 7.5 6.5 8 7 14 13 9.5

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

4/2 (P A/B) 4, 2 (A, B) 1, 5, 3 (P, EA, EB) 4/2 5/3 (A/B EA/EB) M8 connector 90 108 L/M plug connector 86 100 DIN terminal 107 142 Grommet Cv C [dm 3/(sbar)] Cv C [dm 3/(sbar)] b b Single Double Closed center Exhaust center Pressure center Single Double Closed center Exhaust center Pressure center Single Double Closed center Exhaust center Pressure center Single Double Closed center Exhaust

NCQ8

for Stroke End Detection In-line D-A9 D-M9 D-M9W Perpendicular D-A9V D-M9V D-M9WV 056 B A B A HS HS B A B A 075, 106 HS B A B A 150, 200, 250, 300, 400 Note) Figures in the table below are references for auto switch mounting positions in the stroke end detection.

C95

125 100 Without auto switch 125 C95SD B 100 Number of auto switches A53 S With auto switch 2 pcs. 1 pc. 3 pcs. n pcs.

NCM

PILOT B-DIA.

Guide Cylinder Series MGG

C D 4 x O T Q 2 x P (Rc, NPT, G) S W K L E B U AA A R AP I X AB Y + Stroke J V Z + Stroke MGJ AC AD 8 x AF MGP MGQ AE MGG MGC 100 piston rod end connection MGF MGZ MGT (mm) Bore size (mm) 63 80 100 Stroke range (mm) A AA AB AC AD AE AF AP B C D E F G H I J K L M N 75, 100 125, 150 200, 250 300 200 25 25 15 170 50 60 228 30 140 200 13.5 65 117 135 180 66 100 M12 x 1.75 depth 24 M16 x 2 depth

LEC-OM07605CN

(100 pulse) AL.51 CSON EMG ALM2 INP MBR RD STO IPF (100 pulse) AL.52 CSON EMG ALM2 INP MBR RD STO TLC 2 1 1 2 AL.71 CSON EMG ALM2 INP MBR RD STO IPF 2 1 1 2 AL.72 CSON EMG ALM2 INP MBR RD STO IPF 8 68 8. 2.3 [r/min] 100% [0.1%] [0.1%] (1 pulse) 1 [pulse] (100 pulses) 100 [100 pulses] [r/min] [V] 15 [0.1%] ABS [rev] 1 1 [16 pulses] 1 [] 2 1 [] UF/B U VF/B V % [0.1%]

MNB

9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !2 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Component Parts No. Description Material Note No.

MNB

9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !2 100 80 63 50 40 32 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 80, 100 80, 100 Description Material Note Component Parts No.

CJ2

D-C7 D-C8 D-C73C D-C80C D-H7 D-H7C D-H7W D-H7BAL D-H7F D-A7/A8 D-A79W Bore B A B A B A B A B A 2 (8.5) B 2 (0.5) A 1 (7.5) B 1 (0) A 6 0 0.5 0 0.5 3 3.5 3 3.5 3.5 4 3.5 4 7.5 8 7.5 8 0.5 1 0.5 1 10 16 2.5 3 2.5 3 1.5 2 1.5 2 ( ) in the table: In case of double rod style, series CJ2W.

CG1

CG1 Low friction B L F G U Basic Axial foot Front flange Rear flange Front trunnion Rear trunnion Clevis MB MB1 Bore size 20 25 32 40 50 63 80 100 T Low friction direction When pressurized on head side When pressurized on rod side F B 20mm 25mm 32mm 40mm 50mm 63mm 80mm 100mm D CP95 Not available for bore sizes 80 and 100. Mounting brackets are included, not mounted.

Aluminum High Vacuum Angle Valve

(b) XLC50, 63, 80, 100, 160/ Air operated D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY J DK XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLC-50 XLC-63 XLC-80 XLC-100 XLC-160 70 183 80 31 10.5 75 52 77 29 10.5 95 88 209 100 39 11 87 70 76.5 36 9 110 90 250 117 45.5 11 114 83 105 44 9 130 108 317.5 154 55 11 134 102 139 58 9 180 138 339 200 65

ZP

N S NBR Silicon rubber 40 50 40 50 57 86 160 224 Pad type 63 63 80 80 U Urethane rubber H Heavy duty F Fluoro rubber 100 100 E EPR Add NBR weight to the table on the right for other materials. 125 125 Dimensions ZP H 40 50 ZP H 63 80 ZP H 100 125 (mm) (mm) (mm) Model A 63 ZP63H B 65 80 ZP80H 82 C 14.5 16.5 D 50 61 Y 3.5 4.5 Model A 40 ZP40H B 42 50 ZP50H 52 C 32 42 Model A 100 ZP100H B 103

5 Port Solenoid Valve Series VQZ1000/2000/3000

B B B B B B B B B + IN + + +++A IN A NI NI B B O T U O T U 2 4 To CYL port To CYL port P.930 P.931 P.932 P.941 Connector assembly SY3000-37-80AHousing (1 set: 8 pcs.)

C95

125 100 Without auto switch 125 C95SD B 100 Number of auto switches A53 S With auto switch 2 pcs. 1 pc. 3 pcs. n pcs.

10

A 24 VDC 5 Size 2 B E A B 4 N.C. Resin B C D E F G H J K L M N P Q R S T U V W 100 VAC Grommet 7 N.O. 110 VAC With surge voltage suppressor 200 VAC Size 3 C F A B 5 N.C.

Single Axis Electric Actuator Series LJ1H

30 Cable entry direction None B contact specification 2 pcs.

CG5-S

(G) T0403 Colour symbol -20 T1075 Colour symbol -100 Black (B) Black (B) Clear (C) Clear (C) 10 7.5 3 White (W) White (W) Orange (YR) Orange (YR) T1209 Colour symbol -100 Black (B) Black (B) Black (B) Black (B) 12 9 White (W) White (W) White (W) White (W) T1613 Colour symbol -100 Red (R) T0604 Black (B) Red (R) Red (R) 16 13 4 TU0604 TU0604 Blue (BU) Colour symbol -20 White (W) Blue (BU)

MLGP

6 50 to 100 80, 100: Over 200 stroke Extension locking (Type F) Retraction locking (Type B) !9 @7 #9 #5 i o @5 #5 #9 @7 !9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !