MGG

9 is type L only. r!1!6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

NCA1

0 1 1/4 4 1/2 1/4 3/8-24 4 1/2 2 1 1/4 1/2 5/8 4.7 1 1/2 1 5/8 7 7/8 1-14 1 3/8 Oversized Rod-Rod Side Flange Style: NCA1F (XB5) P + Stroke Y C 2-EE (NPTF) 4-FB (Hole) AA D across flats KK B MM EA BA E R A W F G J 4-DD TF LF + Stroke WF ZB + Stroke UF Bore size (in) MM KK A AA B BA C D DD E EA EE F FB G J R TF UF W WF LF Y P ZB 200 (2") 1 3/4-16 1 1/8 2.6 1 1/2 1 1/8 1/2 7/8 5/16-24 2.5

NCA1

KK NCM 1/32 R NCA 0.001 0 EA MM BA TD UV E AA B D-X A C FA G TT J LF + Stroke ZB + Stroke R WF TL TM TL E 20Data TD0.001 0 ZB TL TM TT UM UV WF A Y AA LF B P BA XI C D DD E EA EE FA G MM J R KK Bore size (in) 200 (2") 1 5 1/8 1 3 1.18 5 2.56 1 3/8 1 1/8 2.09 2.6 3 5/8 1 1/2 2.40 1 1/8 3.29 1/2 7/8 5/16-24 2 1/2 0.3 3/8 3/8 1 1.26 1.06 1.84 3/4-16 250 (2.5") 1 5 1/4 1 3 1/2 1 1.18 5 1/2 3

Electric Actuator

lock Nil R Left Right Nil S R Without cable Standard cable 2 Robotic cable (Flexible cable) R: Right 1 The standard cable should be used on fixed parts.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

A1 R Photo micro switch Series Without switch/mounting rail Nil 6 8 1 2 3 4 5 6 NPN 1pc.

CXWM/CXWL

For dimensions of 25 stroke, refer to page 8-26-28. 8-26-27 26 Series CXWM 25 With End Lock: CXWM2525 stroke R 2 x 2-M6 x 1.0 thread depth 12 +0.012 0 2 x 2-6H7 depth 8 2-M10 x 1.0 Adjusting bolt 2-Rc 1/8 Plug (R 1/8) (Cylinder port) 4-5.5 through 4-9.5 counterbore depth 5.5 2-Rc 1/8 Cylinder port 2-Rc 1/8 Plug (R 1/8) (Cylinder port) 2-RB1006 shock absorber (Housing installed on single side

2/3 Port Valve

DIN connector: D Conduit terminal: T Measurement for connection Model Conduit terminal Electrical entry P Port size Rc(PT) Grommet Conduit DIN connector H F E D C B A Energized open Energized closed Q M L K J Q R T R R Q S S Q R 40 (47) 47 (57) 55 (65) 40 (47) 47 (57) 55 (65) 40 (47) 47 (57) 55 (65) 84 (91) 94 (104) 48 (55) 56 (66) 63 (73) , , , VX21l2 VX22l2 VX23l2 1 8 1 4 1 4 1 4 3 8 3

45

-51A-N7 VVQ1000-51A-N9 One-touch fitting for 1/4" One-touch fitting for 5/16" Note 1) P and R ports cannot be changed.

Series VQ Base Mounted Metal Seal/Rubber Seal

(1) [EX124-SCS2](2) EX120-SMJ1(-XP)(1) [EX124-SMJ1](2) AXT100-1-P (4) U S w e r U S U S VZ AXT100-1-F (4) U S AXT100-1-GU20 Note 1) Suffix XP for dust-proof SI unit.

Slide Unit Series CX2/CXWM/CXWL

0 @1 @2 @3 @0 e q t y u i r w !1 !8 !9 CX2N15, 25 q w e r t yu i o !0 @1 @2 @3 !2 !4 !5 !6 @0 !3 !7 Description Material Note Parts List Description Material Note Parts List No. No.

Slide Unit Series CX2/CXWM/CXWL

0 @1 @2 @3 @0 e q t y u i r w !1 !8 !9 CX2N15, 25 q w e r t yu i o !0 @1 @2 @3 !2 !4 !5 !6 @0 !3 !7 Description Material Note Parts List Description Material Note Parts List No. No.

&snac

0 n e t o u c h f i t t i n s f o r P U r s e a i r e x h a u s t ( 0 P t i o n : P , P S ) F Y 2 0 s p a c e r I 7 E20t-01,02P i p i n s a d a p t 0 r7 i n o u t e r d l a m e t e r ( 2 0 0 ) ( 1 9 6 ) 0 p t i 0 n : P S ) ft r / 8 , 1 . / 4 N i p p l e 7 I / B : ( 7 7 ) t . / 4 : ( ' 1 3 N o t e : N 0 . 4 , N o . 7 , 6 : O n l Y 8 : O n l V t y p e t y p e M P r t s e I s p a r e a N O P

VHK

C D E F G J K VHK R-01S-01S 13 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 13 17 19 22 VHK R-02S-02S 17 VHK R-03S-03S 19 VHK R-04S-04S 22 5-8-5

VHK

C D E F G J K VHK R-01S-01S 13 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 13 17 19 22 VHK R-02S-02S 17 VHK R-03S-03S 19 VHK R-04S-04S 22 5-8-5

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Resin Body SYJ (A) 2 Aluminum/NBR Spool valve w Pilot valve VK e 1 (P) 3 (R) VQZ100-12A Resin/Aluminum P, R plate r r VZ VT VQZ200/300 VT Metal seal Rubber seal VP r e w q r e w q VG VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

Digital Pressure Switch ( compatible)

Setting range 0 ~ 10 1.0% increments 0x0474 (1140) 0 R/W Cut (Zero-cut) Y U8 0 ECo (Economy mode) Setting of power saving mode 0: oFF 1: on 0x0708 (1800) 0 R/W Y U8 0x00 (0) Pin (use or unused of the security code) Setting of use or unused of the security code 0: Unused 1: Used 0x0712 (1810) 0 R/W Y U8 0x00 (0) 0x0713 (1811) 0 R/W PinCode (Security code) Y U16 0x0 Setting of security code

Digital Pressure Switch ( compatible)

Setting range 0 ~ 10 1.0% increments 0x0474 (1140) 0 R/W Cut (Zero-cut) Y U8 0 ECo (Economy mode) Setting of power saving mode 0: oFF 1: on 0x0708 (1800) 0 R/W Y U8 0x00 (0) Pin (use or unused of the security code) Setting of use or unused of the security code 0: Unused 1: Used 0x0712 (1810) 0 R/W Y U8 0x00 (0) 0x0713 (1811) 0 R/W PinCode (Security code) Y U16 0x0 Setting of security code

Basic type / Direct mount type Series CY3B/CY3R

6 @4 @1 @8 $0 #9 #3 @2 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 #0 @7 #1 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 10 Component Parts Material No. Description Note No.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents No. q w e r t y u i o !0 !1 !2 !3 !

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQZ 0.45 0.6 (A) 4 VQD VZS 1 (P) 5 (R) Except for VQZ1000 N.O.