Wedge Cam Operation Gripper Series MHK2

Lead wire: In-line entry Lead wire: Perpendicular entry L L L Unit: mm In-line Perpendicular Lead wire Auto switch Finger position Air gripper D-F9BV D-F9B D-F9NV D-F9N D-F9BA Open 2 7 MHK2-12 Closed 7 3 12 Open 2 6 MHK2-16 Closed 8 1 1 3 13 Open 1 MHK2-20 Closed 5 1 11 Open MHK2-25 Closed 6 2 12 Open 3 MHKL2-12 Closed 3 7 12 Open 1 MHKL2-16 Closed 1 1 3 8 13 Open MHKL2-20 Closed

Suction cups with flange

ZXP7-PFL1 20 X1 1) Cup series 2) Cup diameter 3) Cup form 4) Cup material 5) Attachment *2 Symbol Cup Series Symbol Cup Symbol Cup form Symbol Material Symbol Attachment diameter ZP Basic 08 8 Flat Nil With (guide) attachment Bellows type for film 10 10 Flat with rib S Silicone rubber (White) *1 M With mesh attachment ZP3P packaging *2 Only applicable to the cup 13 13 B Bellows Urethane

LVQ

Symbol 07 11 13 19 25 1/4 3/8 1/2 3/4 1 Note) Refer to page 540 for How to order fitting parts. Select the fittings of the same size as the one at the valve side.

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

HRX-OM-W069

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure Alarm flag 1 6 Reservation 7 Reservation 8 CH1 abnormal rise of circulating fluid temperature 9

A

-C08 8 13 12 73 22 Notes: To install threaded versions screw in hand tight then wrench tighten 1/ 4 turn only.

Rotary Table/Rack & Pinion Style Series MSQ

1 1 1 1 12 12 12 12 12 12 12 1 1 1 1 4 4 4 Parts included 13 13 13 13 17 17 17 1 1 1 1 4 4 4 in seal kit 17 17 17 17 18 18 18 4 4 4 4 4 4 4 18 18 18 18 27 27 27 4 4 4 4 2 2 2 27 27 27 27 29 29 29 2 2 2 2 4 4 4 A grease pack (10 g) is included.

Thermo-chiller

/Japanese 1 pc.), Anchor bolt fixing brackets 2 pcs.(including four M8 bolts), Cable accessory 1 pc. (For communication cable) Weight*10,*13 kg 134 *1 Use fluid that fulfills the conditions below as the circulating fluid.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Y 7 1 1 0 5 MO C6 VQ Series VQ1000 Cylinder port Connector kit 1 set Manifold base part no. 4 sets Valve part no. (Stations 1 to 4) 4 sets Valve part no.

CEx-OMG0106

N Terminal No. 6 7 8 9 1 0 0 0 0 2 1 0 0 0 3 0 1 0 0 4 1 1 0 0 5 0 0 1 0 6 1 0 1 0 7 0 1 1 0 8 1 1 1 0 9 0 0 0 1 10 1 0 0 1 11 0 1 0 1 12 1 1 0 1 13 0 0 1 1 14 1 0 1 1 15 0 1 1 1 16 1 1 1 1 0Open between IN6~9 and COM 1Short circuit between IN6~9 and COM Set Home When dip switch is set ON, origins signal is inputted. When dip switch is set OFF, origin input is not required.

IP8001 Series

Dead band (D.B) Target value Deviation D.B Stroke 2 0% Time Fig. 29 No.IP8S-OM09 34 Valve opening characteristic can be selected from the following. (700) Valve opening (700) = Lin Linear characteristics setting Y=X (710) = EP25 Equal percentage 1:25 (R=25) Y=(RX-1-0.04)1/0.96 (720) = EP50 Equal percentage 1:50 (R=50) Y=(RX-1-0.02)1/0.98 (730) = qo25 Quick opening 25:1 (R=25) Y=(1-R-X)1/0.96

15

Bore size (mm) Contents 6 Set of the nos. 4, 5, 13, 19, 24, 39 CY1S6-Z-PS 10 Set of the nos. 4, 13, 19, 20, 24, 39 CY1S10-Z-PS 15 CY1S15-Z-PS 20 CY1S20-Z-PS Set of the nos. 4, 5, 6, 13, 19, 20, 24, 39 25 CY1S25-Z-PS CY3B CY3R 32 CY1S32-Z-PS 40 CY1S40-Z-PS CY1S CY1S Note 1) Seal kit includes 4, 5, 13, 19, 24, 39 for 6. 4, 13, 19, 20, 24, 39 for 10. 4, 5, 6, 13, 19, 20, 24, 39 are for 15 to

Electric Actuator

26 (14) 1 Battery included.

SMC Pneumatic Clean Series

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

SMC Pneumatic Clean Series

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

Fieldbus system Digital unit

Signal name Input 1 Input 3 Input 5 Input 7 Input 9 Input 11 Input 13 Input 15 Input signal Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 -30No.EX-OMN0036-B Input signal assignment (EX600-DX F) Group 0 1 2 3 4 5 6 7 Terminal position Pin 2 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 Input signal Pin 3 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 Dimensions EX600-DX B -31No.EX-OMN0036

MHK2

Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.

MHK2

Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.

Rotary Table

Description Qty. 4 Seal 1 4 Seal 1 4 Seal 1 4 Seal 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 Parts included 13 Gasket 1 13 Gasket 1 13 Gasket 1 13 Gasket 1 in seal kit 17 Wear ring 4 17 Wear ring 4 17 Wear ring 4 17 Wear ring 4 18 Piston seal 4 18 Piston seal 4 18 Piston seal 4 18 Piston seal 4 26 Seal washer 2 26 Seal washer 2 26 Seal washer 2 26 Seal washer 2 Description Size 70

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

Note 1) 2 1/8, 1/4 3 3/8 4 1/2 Type Metric size Inch size 2 Elbow 3 Universal Tubing O.D. 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Tubing O.D. 23 3.2 Note 2) 04 4 06 6 08 8 10 10 12 12 16 16 Control type 0 Meter-out 1 Meter-in * Meter-out and meter-in types can be visually identified by color of the knob.