High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

24 30 L Left side parallel (Step motor 24 VDC) A 10 12 16 20 B 5 6 8 10 Stroke1[mm] Motor option Auto switch compatibility (In-line only) 23456 Nil Housing B bottom6 Positioning pin hole Grease application (Seal band part) 50 50 Nil Without option Nil With Nil None B With lock K Body bottom 2 locations N Without (Roller specification) C With (Includes 1 mounting bracket) 1200 1,200 *Refer

VZA200/400

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VR Model VH Flow characteristics (2) 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) C [dm3/(sbar)] Cv Type of actuation Port size Pilot port size b Cv b C [dm3/(sbar)] Valve model Pilot VHS Body ported Body ported Base mounted Base mounted (With sub-plate) VZA212

Safety Instructions

To ensure safety, be sure to observe ISO 4414 Note 1), JIS B 8370 Note 2) and other safety practices. Caution : Operator error could result in injury or equipment damage.

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

L O L ZX G H F K ZR J ZM ZH E D I A ZU B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL 2-4.5 ZY ZQ A B C D E F G H I J K L Model 4 ZFC100-04 ZF 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 ZP 1/4" ZFC101-07 6 ZFC200-06 ZCU 8 ZFC200-

High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

A_HEC-OM-I009

This item is U n i t N u m b e r M O D E < 0 applicable only when multiple units are used. 2. Baud Rate B a u d R a t e M O D E < 1 2 0 0 b / s Setting range : 600, 1200, 2400, 4800, 9600, 19200b/s Indicated content : Baud rate (Ex. : 1200b/s) Function : Sets baud rate for communication. 3.

53

Note 2) 400 V type is provided with an earth leakage breaker -B as standard.

33

W: 800 [W] w Derive the heat generation amount from the power supply output.

MLGC

A B B A B A B 16 (24) A B Hs Hs Hs 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 20 4.5 8 6 10 9 3 24.5 27 27.5 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 16 (24) 25 4.5 8 6 10 9 3 27 29.5 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 17 (25) 32 5.5 9 7 11 10 4 30.5 33 33.5 25 (34) 24 (33) 20 (27) 21 (30) 23 (32) 19.5 (28.5) 40 10 13.5 35 37.5 38

MLGC

A B B A B A B 18 (26) A B 16 (24) A B Hs Hs Hs 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 20 6 9 3 8 10 6.5 4.5 24.5 27 27.5 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 18 (26) 16 (24) 25 6 9 3 8 10 6.5 4.5 27 29.5 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 19 (27) 17 (25) 32 7 10 4 9 11 7.5 5.5 30.5 33 33.5 25 (34) 24 (33) 20 (27) 21 (30)

Silencer Series AN

Construction/Parts/Dimensions AN05/10/20 AN15/30/40 No hexagonal part in AN05 and AN10 B Dimensions (mm) B Port size R, NPT A B D Model Sound absorbing material (Resin sintered body) AN05-M5 AN10-01 AN15-02 AN20-02 AN30-03 AN40-04 6.5 M5 x 0.8 15 Body (Resin) A 1/8 23 11 A 16 14 1/4 32 Hexagonal flats D 16.5 14 1/4 45 20 17 3/8 58.5 Port size 24 21 1/2 68 2 Silencer Compact Resin Type/One-touch

CG1

16 (24) 16 (24) 17 (25) 19.5 (28.5) 24 (36) 24 (36) 32.5 (46.5) 32.5 (46.5) B 20.5 (28. 5) 20.5 (28.5) 21.5 (29.5) 24 (33) 28.5 (40.5) 28.5 (40.5) B 17.5 (25.5) 17.5 (25.5) 18.5 (26.5) 21 (30) 25.5 (37.5) 25.5 (37.5) 34 (48) 34 (48) B 18 (26) 18 (26) 19 (27) 21.5 (30.5) 26 (38) 26 (38) A HS A A A B 19.5 (27.5) 19.5 (27.5) 20.5 (28.5) 23 (32) 27.5 (39.5) 27.5 (39.5) A HS A HS B 15 (22.5) 15

Shuttle Valve/AND Valve with One-Touch Fittings

The output goes OFF when "B" is turned ON in condition 2. Interlock circuit When either "A" or "B" are ON, output 3 does not go ON even if "C" is turned ON. Output 3 goes ON if "C" is turned ON, only when both "A" and "B" are OFF. OR circuit The cylinder operates if either "A" or "B" is ON.

Lightweight and Compact

Note 2) 400 V type is provided with an earth leakage breaker -B as standard.

XL-OMY0003

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 XL-OMY0003 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0003 1.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

(Values at the initial period) VG JIS Symbol VP S070 VQ Model Valve model VKF VS3145 VS3135 P A C [dm3(sb Cv b Cv b Cv b Cv Flow characteristics 6.1 7.3 9.0 0.3 0.2 0.2 1.6 1.8 2.4 0.4 0.2 0.3 1.5 1.8 2.3 1/4 3/8 1/2 3/4 6.1 7.2 9.0 0.27 0.21 4.8 5.1 16 15 0.34 0.46 4.1 4.5 18 20 VZ VS AC DC 30 or less

Serial Network

Y 0 16 IN313-DN1-B, IN313-PR1, IN313-AB1/AB2 Three major protocols are available: DeviceNetTM (IN313-DN1-B), Profibus-DP (IN313-PR1), Allen Bradley RIO (IN313-AB1, & IN313-AB2) Controls up to 16 (32 in case of IN313-AB2), single solenoid valves. (A combination of single and double solenoid valves as long as the maximum number of solenoids does not exceed 16 (32 for IN313-AB2.)

e-Rodless Actuator

Auto Switches/Proper Mounting Position at Stroke End Detection B A (mm) D-A9, D-A9V (mm) D-M9, D-M9V (mm) D-F9W, D-F9WV A A A B B B Operating range Operating range Operating range Nominal size 16 25 Nominal size 16 25 Nominal size 16 25 3 44 116 48 112 48 112 8 8.5 3.5 54 156 58 152 58 152 Auto Switch Mounting When mounting the auto switches, they should be inserted into the actuators switch

Made to Order Specifications:

Port size Dimensions Dimensions A Connection HA B IN OUT AT IN OUT ID A B AMG AFF AM Drain Misc.