HT20020 to 901.0 (at 20C)2.3 (at 20C)?0.10.40/0.60(at 20 l/min)20Approx. 12Approx. 15Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.73/4Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

)1.8 (at 20C)?

)3.0 (at 20C)?

20 to 908.0 (at 20C)3.3 (at 20C)?0.10.45/0.65 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.713/14Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

1.5% F.S. or less (0.7 MPa, at 20C)?1.0% F.S. or less (0.7 MPa, at 20C), ?3.0% of F.S. or less in case of analog output?1.5% F.S. or less (0.1 to 1.5 MPa, based on 0.7 MPa)?

1.5% F.S. or less (0.7 MPa, at 20C)?1.0% F.S. or less (0.7 MPa, at 20C), ?3.0% of F.S. or less in case of analog output?1.5% F.S. or less (0.1 to 1.5 MPa, based on 0.7 MPa)?

1.5% F.S. or less (0.7 MPa, at 20C)?1.0% F.S. or less (0.7 MPa, at 20C), ?3.0% of F.S. or less in case of analog output?1.5% F.S. or less (0.1 to 1.5 MPa, based on 0.7 MPa)?

1.5% F.S. or less (0.7 MPa, at 20C)?1.0% F.S. or less (0.7 MPa, at 20C), ?3.0% of F.S. or less in case of analog output?1.5% F.S. or less (0.1 to 1.5 MPa, based on 0.7 MPa)?

1.5% F.S. or less (0.7 MPa, at 20C)?1.0% F.S. or less (0.7 MPa, at 20C), ?3.0% of F.S. or less in case of analog output?1.5% F.S. or less (0.1 to 1.5 MPa, based on 0.7 MPa)?

1.5% F.S. or less (0.7 MPa, at 20C)?1.0% F.S. or less (0.7 MPa, at 20C), ?3.0% of F.S. or less in case of analog output?1.5% F.S. or less (0.1 to 1.5 MPa, based on 0.7 MPa)?

1.5% F.S. or less (0.7 MPa, at 20C)?1.0% F.S. or less (0.7 MPa, at 20C), ?3.0% of F.S. or less in case of analog output?1.5% F.S. or less (0.1 to 1.5 MPa, based on 0.7 MPa)?

1.5% F.S. or less (0.7 MPa, at 20C)?1.0% F.S. or less (0.7 MPa, at 20C), ?3.0% of F.S. or less in case of analog output?1.5% F.S. or less (0.1 to 1.5 MPa, based on 0.7 MPa)?

1.5% F.S. or less (0.7 MPa, at 20C)?1.0% F.S. or less (0.7 MPa, at 20C), ?3.0% of F.S. or less in case of analog output?1.5% F.S. or less (0.1 to 1.5 MPa, based on 0.7 MPa)?

1.5% F.S. or less (0.7 MPa, at 20C)?1.0% F.S. or less (0.7 MPa, at 20C), ?3.0% of F.S. or less in case of analog output?1.5% F.S. or less (0.1 to 1.5 MPa, based on 0.7 MPa)?

1.5% F.S. or less (0.7 MPa, at 20C)?1.0% F.S. or less (0.7 MPa, at 20C), ?3.0% of F.S. or less in case of analog output?1.5% F.S. or less (0.1 to 1.5 MPa, based on 0.7 MPa)?

(mm)Thickness (mm)BundleStraight pipeColorApplicable fluidMax. operating Note 1)pressure (at 20C)Burst pressure (at 20C)Note 2)radius (mm)Max. operating temperature (Fixed use)MaterialBasic diameterTolerance10 m20 m50 m100 m50 Ft. (16 m)100 Ft. (33 m)2 mInch sizes (Series TIL)TIL011/8andquot;1/8andquot; x 0.086andquot;3.18?0.10.5?0.05?

(mm)Thickness (mm)BundleStraight pipeColorApplicable fluidMax. operating Note 1)pressure (at 20C)Burst pressure (at 20C)Note 2)radius (mm)Max. operating temperature (Fixed use)MaterialBasic diameterTolerance10 m20 m50 m100 m50 Ft. (16 m)100 Ft. (33 m)2 mInch sizes (Series TIL)TIL131/2andquot;1/2andquot; x 3/8andquot;12.7+0.2?0.11.6?

Table of Contents

How to Find the Flow Rate (At air temperature of 20C) Choke flow: (P2 + 0.1)/(P1 + 0.1) 0.5 293 273 + t Q = 120 x S x (P1 + 0.1) x Subsonic flow: when (P2 + 0.1)/(P1 + 0.1) > 0.5 Q = 240 x S x (P1 P2)(P2 + 0.1) x 293 273 + t Q: Air flow rate [ /min (ANR)] S: Effective area (mm2) P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] t: Air temperature [C] Note 1) Formulas above are applied

Electro-pneumatic Proportional Valve Series VEF/VEP 1

Linearity 3% F .S. or less AMR Lubrication Not required (Use turbine oil Class 1, ISO VG32, if lubricated.) 0.9 0.9 1.0 1.4 1.4 Weight (kg) ITV Proportional Solenoid Specifications IC 1 (Applicable power amplifier: VEA25) Proportional solenoid recognition symbol VEA25 VBA Applicable power amplifier VEF3121 (Flow type) VEP3121 (Pressure type) Max. current 1 A VE Coil resistance 13 (20C) Rated

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

LQ2 E 31 32 Different dia. tubing size (B side) Applicable tubing size (A side) Union elbow 17-5-113 18 Series LQ2 Specifications Model Feature LQ230 LQ220 LQ240 LQ250 NEW PFA Material Maximum operating pressure (at 20C) 1.0 MPa Refer to the withstand pressure and heat resistance performance curves.