JXCx-OMU0004

RESET B 8.3 P.41 RESET C OFF I/O STOP OFF OFF 8.5 ONP.44 RESET C D RESET C RESET D 66 No.JXC-OMU0004-A (M24V) RESET D RESET D 3.4 P.14 (C24V) RESET D RESET D ( E ) 67 No.JXC-OMU0004-A E ON E BK RLS E EEPROM EEPROM E 10 CPU CPU E 68 No.JXC-OMU0004-A 13. / 50mm ( ) 5m 5m 10% 15m 20% 69 No.JXC-OMU0004-A 14. / 14.1.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 707 Series ARP20/30/40 Dimensions 2 x P1 (Port size) A Pressure gauge (Option) Q C OUT IN K V P2 (Pressure gauge port size) B R Bleed port F S U D N Bracket (Option) J M T Panel fitting dimension Y W Plate thickness ARP20(K), ARP30(K): Max. 3.5 ARP40(K): Max. 5 OUT IN Z Pressure Gauge Option

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 765 ARP20/30/40 Series Dimensions 2 x P1 (Port size) A Pressure gauge (Option) Q C OUT IN K V P2 (Pressure gauge port size) B R Bleed port F S U D N Bracket (Option) J M T Panel fitting dimension Y W Plate thickness ARP20(K), ARP30(K): Max. 3.5 ARP40(K): Max. 5 OUT IN Z Pressure Gauge Option

Modular Style Regulator with Built-in Pressure Gauge Series ARG

D-DN This catalog is printed on recycled paper with concern for the global environment.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

3 Way,3 Port Solenoid Valve NVZ Series

A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

(V), D-A93(V), D-A96(V) Auto Switch Specifications D-A96 D-A90 D-A90V D-A93 D-A93V In-line D-A96V Auto switch part no.

Micro Mist Separator Series AFD20/30/40

IR : Combination not available : Available only with NPT thread : Combination available : Varies depending on the model Accessory/Optional Specifications Combinations VEX Applicable micro mist separator Optional specifications Accessory Symbol Combination AFD20 B C D 2 6 8 C J R Z W AFD30 to 40 AMR Accessory/Optional specifications B C D Accessory Optional specifications With bracket ITV

LG1H

D: Resting time (0.4sec.)

PF-OMN0009_C

A B C D E F Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008-2014 SMC Corporation All Rights Reserved No.PF-OMN0009CN-F

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Product weight Model LEJS100 Stroke [mm] 200 300 400 500 600 800 1000 1200 1500 Product weight [kg] 17.6 19.7 21.8 23.9 26.0 30.2 34.3 38.5 44.8 -7- 1.3 Construction *Motorless type Component parts Maintenance parts/Grease pack No. Description Material Remarks Apply for Order No.

Gun Type Ionizer

Twists or crushing of connected tubes d. Hardness and deterioration of connected tubes e. Air leakage 192

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 9 Direct Operated Precision Regulator/Modular Style Series ARP20/30/40 Dimensions 2 x P1 Port size A Pressure gauge (Option) Q C OUT IN K V P2 Pressure gauge port size B R Bleed port F S D U N Bracket (Option) J M T Panel fitting dimension Y The dimensions for special applications (not including

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 9 Direct Operated Precision Regulator/Modular Style Series ARP20/30/40 Dimensions 2 x P1 Port size A Pressure gauge (Option) Q C OUT IN K V P2 Pressure gauge port size B R Bleed port F S D U N Bracket (Option) J M T Panel fitting dimension Y The dimensions for special applications (not including

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

D-G

Ejector Valve Unit, Series ZYY/ZYX

Note 2) V, S and R specifications are 45T or 45T1 only.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

R.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

R.

XL-OMV0002

Kalrez R Chemraz R VMQ PLASMA ARMOR R No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro R Kalrez R dupont dupont Chemraz R Greene Tweed & Co ULTIC ARMOR R Nippon Valqua Industries, Ltd. 6 XL-OMV0002 3. 3-1.

XLG Series

Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. 7 XL*-OMI0010-E 3. Specifications 3-1.