Rotary Cylinder Series MRQ

Description No. r i !

3 Port Air Operated Valve Series SYJA300 1

44) (36) 21 28 29 25 27 34 18 X 21 14 1 R P 3.5 40 4 26 40.5 26 34 4 48.7 10 2-M4 x 0.7 2-4.5 54.2 55.5 (3.6) 54.2 (Mounting screw) (For mounting) 8 1 (P, A, R port) 0.8 54.5 P R 1.8 (Breathing hole) 1.8 (Breathing hole) 20 16 14.5 With filter (80 mesh) 12 With filter (80 mesh) 23 15 , 8 1 4 1 48 (P, A, R port) 5-4-8 1 3 Port Air Operated Valve Series VZA200/400 Specifications SA Fluid Air

Rotary Cylinder Series MRQ Size: 32, 40 1

Reed switch: D-A7/A8 Solid state switch: D-F7/J7 ( ) Series MRQ An air cushion is also available.

Thermo-con

Alarm output connector (ALARM) D-sub 9 pin (pin) Holding screw: M2.6 Pin No.

Precision Regulator Series IR1000/2000/3000

1 ARM Diaphragm (B) e w r y Exhaust Bleed w ARP Diaphragm (C) SUP(1) OUT(2) SUP(1) OUT(2) OUT(2) SUP(1) Exhaust Valve IR u !0 !0 !2 t r !

Precision Regulator

point 0.5 0.6 0.200 0.5 0.4 0.4 0.3 0.3 0.198 0.2 0.2 0.1 0.1 0.196 0 200 400 600 800 1000 1200 1400 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 1000 0 200 400 600 800 Flow rate (L/min (ANR)) Supply pressure P1 (MPa) Relief flow rate (L/min (ANR)) 817 IR1000/2000/3000 Series IR3000 Series The operating conditions or external disturbance may affect each of the characteristics.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 707 Series ARP20/30/40 Dimensions 2 x P1 (Port size) A Pressure gauge (Option) Q C OUT IN K V P2 (Pressure gauge port size) B R Bleed port F S U D N Bracket (Option) J M T Panel fitting dimension Y W Plate thickness ARP20(K), ARP30(K): Max. 3.5 ARP40(K): Max. 5 OUT IN Z Pressure Gauge Option

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 765 ARP20/30/40 Series Dimensions 2 x P1 (Port size) A Pressure gauge (Option) Q C OUT IN K V P2 (Pressure gauge port size) B R Bleed port F S U D N Bracket (Option) J M T Panel fitting dimension Y W Plate thickness ARP20(K), ARP30(K): Max. 3.5 ARP40(K): Max. 5 OUT IN Z Pressure Gauge Option

Modular Style Regulator with Built-in Pressure Gauge Series ARG

D-DN This catalog is printed on recycled paper with concern for the global environment.

SMC Pneumatic Clean Series

/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9 D-M9V D-F9W D-F9WV D-F9BAL D-Y59A/Y7P/Y59B

AC Servo Motor Driver (Pulse input type)

7 800 r/min 5.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

Compact Cylinder

D-M9NV D-M9N D-M9B D-M9BV D-M9PV D-M9P Auto switch part no.

SMC Pneumatic Clean Series

/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9 D-M9V D-F9W D-F9WV D-F9BAL D-Y59A/Y7P/Y59B

HEC-OM-Y008

Dec Z yZ ZZ AZ BZ CZ DZ . 400 400 This manual provides the following symbols in addition to Danger, 300 300 This unit does not use parts that meet the SCCR specifications.

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

XL-OMY0001

R R PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 R 1Barrel Perfluoro R Kalrez Chemraz Greene, Tweed Technologies, Inc.

High Vacuum L Type Valve

Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

MXS Series Air Slide Table

22.7 17.7 14.7 12.7 4.7 90.7 82.7 42.7 34.7 65.7 57.7 4.7 9.7 22.9 6 119.6 111.6 36.6 16.6 28.6 26.6 21.6 18.6 16.6 8.6 92.6 84.6 35.6 27.6 63.6 55.6 8.6 13.6 27 6 96.5 104.5 41.5 21.5 33.5 31.5 24.5 23.5 21.5 13.5 89.5 81.5 40.5 32.5 56.5 48.5 13.5 16.5 : D-F9BW, D-F9NW, D-F9PW 2 color indication solid state switch: D-F9BWV, D-F9NWV, D-F9PWV Stroke B Stroke E Model Operating range A 40

IZx-OMR0035

When inserting the air flow adjustment dial, make sure that the D-shaped part of the rotary switch on the body fits into the D-shaped part of the dial mounting part. If the D-shaped part is inserted forcibly while it is not being fit into the appropriate part, the rotary switch or/and air flow adjustment dial may be broken. D-shaped part A Air flow adjustment dial D-shaped part 18 Doc.