CLA

1\:1;1 ,2,3,4. n -2.4.6,8 ... " =2,4 ,6.8 .. n= 2,4,6,8 ...

Fieldbus System

End Plate type N Nil Positive common Negative common Note) Without SI Unit, the symbol is nil.

CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

Modular Type Filter Regulator Series AW

X430 03 BG 30 AW F 2 N X425 Filter regulator Filter regulator For high/low temperature For high pressure Body size 30 40 Body size X430 X440 Low temperature 20 30 40 High temperature Thread type Thread type Nil N Note 1) Rc NPT G Nil N Note 1) Rc NPT G Port size Port size F Note 2) F Note 2) Body size Symbol Body size Port size Port size Note 1) Drain guide is NPT1/4 (applicable to AW30 to

Prevents Micro-Bubbles

A R P PFA PPS PTFE C LVQ Thread type 4 Symbol Nil N Thread type Rc NPT LQ N.C.

High Purity Chemical Valve

A R P PFA PPS PTFE C Thread type 4 Thread type Rc NPT Symbol Nil N N.C. Valve type Port size 0 N.C.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

(mm) Stroke (mm) Vacuum entry direction Vertical Male thread M18 x 1.5 M18 x 1.5 M22 x 1.5 (Rc, NPT, NPTF) 100, 125 25, 50, 75, 100 40 to 80 25, 50, 75 Mounting Connection ZX 40, 50 63, 80 100, 125 0 stroke 6.9 N 11.8 N Full stroke 0 stroke 10 N 15 N Full stroke Thread dia.

Compact Rotary Actuator

u t o s w i t c h A u t o s w i t c h s p e c i f i c a t i o n A u t o s w i t c h i n s t a l l a t i o n A u t o s w i t c h s e t p o s i t i o n I n t e r n a l s t r u c t u r e a n d o p e r a t i o n p r i n c i p l e C u s h i o n s M a i n t e n a n c e I n s p e c t i o n P e r i o d i c i n s p e c t i o n D i sassem ble and reassem bl e C a u t i o n o f d i

Modular F.R.L. Unit

Note 7) When N is specified in the end of part number of auto drain, applicable tube O.D should be 3/8". 5 F.R.L.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

S 1 pc. 22 Vacuum suction type n "n" pcs. Symmetric type Nil Standard Auto switch L Symmetric Nil Without auto switch (Built-in magnet) For the applicable auto switch model, refer to the table below.

Digital Flow Switches

Nil N F Rc NPT G Lead wire (Refer to page 35.)

Precautions 1

(n 2) 2 D-C7 D-C80 15 + 45 10 15 50 50 + 45 (n 2) (n = 2, 4, 6...) D-H7 D-H7W D-H7NF (n 2) 2 15 + 45 10 15 60 60 + 45 (n 2) (n = 2, 4, 6...) D-C73C D-C80C D-H7C (n 2) 2 15 + 50 10 15 65 65 + 50 (n 2) (n = 2, 4, 6...) (n 2) 2 D-B5/B64 D-G5NTL 15 + 50 75 + 55 (n 2) 10 15 75 (n = 2, 4, 6...) (n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6...)

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Load (N) 200 16 16 16 L = 120 mm L = 120 mm L = 120 mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N) 150 100 100 400

Air Slide Table Series MXP

MXP16-30 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N) 300 200 196 Air Slide Table Series MXP Table Accuracy Non-rotating accuracy

Series MXP Precision Air Slide Table

-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N) 300 200 1 N = 0.2248 lbf 165 Series MXP Precision Air Slide Table Construction MXP10,12,16 9 8 1 2 3 11 19 7 10 14 13 15 18 17 16 12 5 4 6 Description Material

Modular Type Lubricators Series AL

Note 3) Bowl assembly for the AL30 to AL60 models comes with a bowl guard (steel band material). 511 Series AL10 to AL60 Dimensions AL10 AL20 J M U T N S D Bracket (Option) A B C R B C Q IN OUT IN OUT OUT 2 x P (Port size) OUT 2 x P (Port size) Clearance for maintenance G Clearance for maintenance A G AL30, AL40 AL50, AL60 Bracket (Option) T N S T M U M U D J D J N S Bracket (Option) R B

Air Slide Table Series MXQ

"n" pcs.

Fluoropolymer Tubing Variations

Length per roll Color Translucent Translucent Symbol N N R BU B N N N N N KM 10 m Red (Translucent) KF 20 m Blue (Translucent) Black (Opaque) Translucent Translucent Translucent Translucent Translucent Roll M 50 m 100 m 16 m ( 50 ft) H/DL L/LL 33 m (100 ft) 2 m Straight KC Metric O.D. size 3.2 O.D. 5/32" is available in 4 metric tubing, and O.D. 5/16" is available in 8 metric tubing.

Microspeed Cylinder

"n" pcs. Nil S n Stroke (mm) 12mm 16mm 20mm 25mm 2 pcs. 1 pc. "n" pcs.

MNB

Double rod type n n pcs. Type of auto switch Mounting bracket Nil Without auto switch B Basic type Select the applicable auto switch type from the table below.