MU

Calculation: (Example 1) MUB40-15S(T) Basic weight 0.62 kg RQ (Example 2) MUC50-5S(T) Basic weight 1.06 Additional weight (Mounting bracket) 0.40 1.06 + 0.40 = 1.46 kg MU Construction DSpring return -X B 20Data B section MU25 Spring extend B A A section MU25 Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !

PFxx-OMS0001CN

(37) 30 (25) -24No.PF-OMS0001CN-A [] 2 [F 0] 2 F99 F1 F0 2 -25No.PF-OMS0001CN-A () () [F 0] [ rEF] [ ANR] 27 [ Uni] 1 [ L] L/min [ oU1] OUT1 [ HYS] [ 1ot] OUT1 [ 1_P] [ 250] 250 L/min(PFMC7501) [ P_1] OUT1 [ 500] 500 L/min(PFMC7102) 29 [F 1] [ 1000] 1000 L/min(PFMC7202) [ 25] 25 L/min(PFMC7501) [ H_1] OUT1 [ 50] 50 L/min(PFMC7102) [ 100] 100 L/min(PFMC7202) [ CoL] OUT1 [SoG]

Thermo-chiller/Rack Mount Type

-W Approx. 2 HRR018-W Approx. 4 HRR024-W Approx. 5 HRR030-W Approx. 6 HRR050-W Approx. 10 Electric conductivity (25C) [S/cm] 100*1 to 300*1 v v Refer to Facility water system in the specifications.

V

Light & Surge Suppressor (SY5000, 7000 Only) LZ Lead Wire w/Light & Surge Suppressor G Grommett (Lead Wire Length: 300mm) H Grommett (Lead Wire Length: 600mm) L L Type Plug with Lead Wire LO L Type Plug without Connector LOZ W/O Lead Wire, w/Light & Surge Suppressor M M Type Plug with Lead Wire MO M Type Plug without Connector MZ M Type Lead Wire w/Light & Surge Suppressor M A N U A L O V

42

Figure shows VV5Q41-08C12SQ-W.

5 Port Solenoid Valve

-19 (M3 x 26) 2 VF Valve + Restrictor spacer (VVQ4000-20A1 5 ) q AXT632-17-10 (M3 x 62) 3 VP4 q w w AXT632-17-19 (M3 x 26) 2 Not necessary when mounting the sub-plate.

PFxx-OMY0005

range 0xFF9C to 0x0258 (-100 to 600) Setting of OUT1 output set value (Hysteresis) S16 250 Y 1 R/W H_1 (Setting of OUT1 hysteresis) OUT1 setting (tEMP) Setting range 0x0 to 0x02BC (0 to 700) Setting of OUT1 hysteresis (Hysteresis) U16 25 Y 2 R/W P1L (n1L) (Lower limit of window comparator) Setting range 0xFF9C to 0x0258 (-100 to 600) Setting of OUT1 output set value (Lower limit of window

I

R E D L E A D W I R E Connect with blue (+) side of the direct current to actuate the switch. W H I T E L E A D W I R E Connect with the inout terminal of the sequence controller or the DC relay or other load since this is the switch output. B L A C K L E A D W I R E Connects with minus (-) side of the direct current to actuate the switch.

HRX-OM-X084

Contents 9.4 Cooling capacity . 9-9 9.4.1 HRR010-A -10. 9-9 9.4.2 HRR010-W-10. 9-9 9.4.3 HRR010-A -20. 9-10 9.4.4 HRR010-W-20. 9-10 9.5 Heating capacity . 9-11 9.5.1 HRR010-A-10. 9-11 9.5.2 HRR010-W-10. 9-11 9.5.3 HRR010-A-20. 9-12 9.5.4 HRR010-W-20. 9-12 9.6 Pump capacity. 9-13 9.6.1 HRR010-A/W-10 . 9-13 9.6.2 HRR010-A/W-10-T1 . 9-13 9.7 Required facility water flow (for water-cooled type

2/3 Port Valve

Power dissipation (W): For AC , W=V/A cos. For DC, W=V/A (Note) cos (Note) cos shows power factor. w Surge voltage The surge voltage is a high voltage generated momentarily when cutting the power supply. e Hum sound The hum sound is a noise generated through repeated adsorption and releasing on an armature adsorption surface.

Vacuum System Peripherals:

Nil DC: 1 W (With indicator light: 1.05 W) None With light/surge voltage suppressor (Possible only solenoid valve connector type.)

SMC Wireless System PROFINET compatible

R/W detection / R/W no-detection button When the NFC reader/writer (R/W) is inserted into the USB port of the PC and the PC detects the NFC reader and writer, "R/W detected" is displayed. When the PC cannot detect it, "R/W undetected" is displayed.

SMC Wireless System EtherNet/IP ® compatible

R/W detection/ R/W no-detection button When the NFC reader/writer (R/W) is inserted into the USB port of the PC and the PC detects the NFC reader and writer, "R/W detected" is displayed. When the PC cannot detect it, "R/W undetected" is displayed.

C85

(40) 51 35 25 32 0.7 64 DSeries CS1 only W Series C85: 20, 25 W 37 24 35 17 22 0.3 47 -X 100.0 T 27 18 26 12 16 0.5 35 2022 14 21 10 13 0.7 28 Foot: L Rod side flange: F Head side flange: G (100) (40) (40) (40) (40) (100) 0.3 Data Lateral load applied to the rod end fR (N) L (40) (40) (40) (40) (100) 89 0.5 W W W F 10.0 (40) (40) (40) 74 36 0.7 93 (40) 54 37 26 33 0.3 69 G 41 27 39 19 25

C85

1 w e !3 !

Fieldbus System

e q w e No.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

(kg) Data Pitch moment Yaw moment Roll moment W L2 A2 L1 A1 L3 A3 Mp Mr Static moment Dynamic moment My W W W L2 A2 L3 A3 L1 A1 Mp Mr My W W W W Mey Mep We We L3 A3 L2 A2 W Note) It is not necessary to consider load factor when using this device vertically perpendicular.

LG1H

Controller type Motor type Power supply voltage S1 S3 S5 S7 LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 AC servo motor (S2) 100 W 200 W 100 W 200 W AC servo motor (S2) 100 to 120 VAC Pulse input type Incremental B Pulse input type 50/60 Hz AC servo motor (S3) AC servo motor (S3) (For absolute encoder) (For incremental AC servo motor (S6) AC servo motor

Air Slide Table Series MXP

(kg) Fig. (2) Overhang: Ln (mm), Correction Values for Moment Center Distance: An (mm) Pitch moment Yaw moment Roll moment W L2 A2 L1 A1 L3 A3 Mp Mr My Static moment Dynamic moment W W W L2 A2 L3 A3 L1 A1 MXH W Mp Mr My MXU W W MXS W W Mey Mep MXQ We We Note) No need to consider this load factor in the case of using perpendicularly in a vertical position.

LEC-OM02704CN

PD09PD11(MBR) 4 39 4 4.12 (PE)( ) (PE) (di/dtdv/dt) EMCEMC(IB()67303) NFB MC CN2 L1 () L2 L3 L11 U U L21 V V M W W CN3 PE PE (PE) PE .