HRX-OM-W038

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-W038 Contents 6.3 Option T [High-pressure pump] . 6-2 6.3.1 Option T [High-pressure pump] . 6-2 6.4 Optional Accessories [Electric resistivity /conductivity

3 Port Solenoid Valve

Note 1.5 m Cable length L Assembly part no. Note 1.5 m V100-DS15-015(N) V100-DS15-030(N) V100-DS15-050(N) V100-DS26-015(N) V100-DS26-030(N) V100-DS26-050(N) Cable 15 cores X23AWG Cable 26 cores X23AWG 3 m 3 m 5 m 5 m Note) For N, the unified thread is used. Note) For N, the unified thread is used.

2-Color Display Digital Flow Switch Series PFM

Note 6) Set to hystresis mode at the time of shipment from the factory.

CJ2X/CUX/CQSX/CQ2X/CM2X

L 5 m Z None N (Example) C73C (Example) C73CL (Example) C73CZ (Example) C73CN Since there are other applicable auto switches than listed, refer to Best Pneumatics Vol. 6 for details.

CJ2X/CUX/CQSX/CQ2X/CM2X

L 5 m Z None N (Example) C73C (Example) C73CL (Example) C73CZ (Example) C73CN Since there are other applicable auto switches than listed, refer to Best Pneumatics Vol. 6 for details.

CEx-OMQ0011

. 2. 2. 2. 50% 50% 50% 50% ( ( ( ( 6 6 6 6 ) ) ) ) 1. 1. 1. 1. () 2. 2. 2. 2. 3. 3. 3. 3. 3. 3. 3. 3. 4. 4. 4. 4

HRX-OM-X037

6.

MXF

M5 x 0.8 thread depth 12 Data 5.5 NN-M5 x 0.8 NN 2 ( 1) x H 13 G Section AA A M 12 Operating port 2-M5 x 0.8 0.5 25 (Table length) N 2 ( 1): The number of pitches 27 7 12 J 3 Z Max. 9.5 ZZ H G 33.5 (mm) 6 Z M J NN H G N ZZ Model 5H9 +0.030 0 depth 5 MXF20-30 91 91 57 4 30 29 4 104 MXF20-50 113 113 77 4 45 36 4 126 MXF20-75 162 162 125 6 45 40 6 175 MXF20-100 211 211 175 6 60 59 6 224 8

Pin Clamp Cylinder Series CKQ/CLKQ

7 @5 #8 #6 #4 @6 @7 @8 @4 Auto switch $1 #5 #9 #8 #2 @3 !9 $0 $2 !1 !8 !6 #7 !0 @9 A @0 !5 A !

CQS

13 14 5 5.5 9.5 11.5 19.5 21.5 25 27 Bore size (mm) Double acting: double rod 3.5[6] 3[5.5] 8[10.5] 10[12.5] 1.5 2 6 7 5.5 5 10 12 1.5 2 6 7 5.5 5 10 12 12 16 20 25 17 19 22.5 24.5 5.5 6 10 11 9.5 9 14 16 0.5 1 4 6 5.5 6 10 11 9.5 9 14 16 19.5 21.5 25 27 Bore size (mm) CU CQS Auto switch model No.

ZQ-OM01401

) (3) (4) 1 (1) 2) 01 1 S () 02 2 P () : 08 8 (3) (PD) 1) 1 B (: P ) 3 (: PD ) C 2) 1) 3)12S 0.5 8 0.7 6 (4) 1.0 4 2) 8 4 A 4) Assy 6 - No.ZQ-OM01401-B ZQ000 U A-K15L B-EA M G-3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (1) U (6) M 6) (2) M SI (kPa) 6) (:psi) P K1 N.C.

13

38.5 75 15.3 4.2 28 7.5 3 38.5 57 12.8 3.2 24 6 6 6 6 6 6 10 10 One-touch and screw-in connection Applicable tubing diameter B Model A 60 6 29.5 16 12.8 28 5 47 60 6 29.5 16 12.8 28 5 47 60 6 29.5 16 12.8 28 5 47 60 6 29.5 16 12.8 28 5 47 63 6 30.5 18 12.8 29 5 50 63 6 30.5 18 12.8 29 5 50 78 8 39 23 13.7 35 7 61 78 8 39 23 13.7 35 7 61 B C D E F G H (Mounting hole) ZH05BS-06-01 ZH05BL-06

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Y m x g m x g Vertical mounting Mounting orientation Ceiling m Wall m Vertical m Note) Horizontal m Static load m M m x g x X m x g x X m x g x Z M Static moment M m x g x Y m x g x Y m x g x Z M z y Y Z m x g x X m x g x Y M m x g Note) m is a mass movable by thrust.

0.01

Piping tubing length 0.4 0.8 Response time (sec) Response time (sec) Piping tubing length 10 m 0.3 0.6 8 m 8 m 5 m 0.2 0.4 5 m 3 m 3 m 0.1 0.2 1 m 0 0 0.35 0.05 0 0 0.16 0.02 0.3 0.25 0.2 0.15 0.1 0.14 0.12 0.1 0.08 0.06 0.04 Detection distance (mm) Detection distance (mm) Piping tubing lengthResponse time Piping tubing lengthResponse time Nozzle Shape Please keep the nozzle shape as illustrated

ISO Standard Hydraulic Cylinder

7 @9 @6 !8 o e @2 @3 @1 !3 !4 @7 @8 !6 !5 CHN CHM CHS CHS CH2 CHA !0 q w !2 !

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

M 2-J, thread depth K 2-J, thread depth K DIN terminal: D Conduit terminal: T D S F Q Cable 6 to 12 Q 2 F 34 G1/2 D 25 T C C R R Width across flats H Width across flats H E E S 2 2-P Port size A B 2-P Port size A B M M 2-J, thread depth K 2-J, thread depth K G1/2 Specifications with bracket Orifice 2, 3, 4.5, 6 Orifice 8, 10 7.5 2.3 Bracket Y 29 Mounting hole 2-5.3 Bracket 22 5.5 52 28

Mist Separator Regulator

Tubing for AD27-D: I.D. 2.5 (3/32") or larger, Length 5 m (200 inch) or shorter Tubing for AD37, 47(N)-D: I.D. 4 (3/16") or larger, Length 5 m (200 inch) or shorter Tubing for AD38, 48(N)-D: I.D. 6.5 (1/4") or larger, Length 5 m (200 inch) or shorter Air Source Warning (1) Use clean air.

Ｍ icro Mist Separator Regulator

Tubing for AD27-D: I.D. 2.5 (3/32") or larger, Length 5 m (200 inch) or shorter Tubing for AD37, 47(N)-D: I.D. 4 (3/16") or larger, Length 5 m (200 inch) or shorter Tubing for AD38, 48(N)-D: I.D. 6.5 (1/4") or larger, Length 5 m (200 inch) or shorter Air Source Warning (1) Use clean air.

e-Rodless Actuator

Auto Switch Internal Circuit D-A90 (V) Contact protection box OUT () Brown Reed switch Unit: g Weight Table CD-P11 OUT () Blue CD-P12 D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V Model Lead wire length: 0.5 m 6 6 6 6 8 8 D-A93 (V) Lead wire length: 3 m 30 30 30 30 41 41 LED diode Brown OUT (+) Brown Contact protection box Resistor Unit: mm Dimensions Reed switch Zener diode CD-P11 D-A90/D-A93/D-A96

Vacuum Pad

Pad diameter: 6 to 32 Attachment 5 m Related Pad Cyclone Pad 4 Made to Order No adsorption mark is left because the vacuum pad does not come into contact with the workpiece. 5 m The above adsorption marks show sample data.