Vacuum Module Series ZX

Ordering example) ZX1051-K15LOZ-EC(-Q) 1 pc. VJ10-20-4A-6 2 pcs. ZY 6 4A 20 VJ10 6 10 15 20 25 30 0.6 m 5A 20 ZS ZF For ZSE3 1 m (For 100 VAC) 1.5 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire with connector part numbers. Ordering example) ZX1051-K15LOECN(-Q) 1 pc. VJ10-20-4A-6 2 pcs.

Solid State Auto Switches

Weight (g) Model D-A90 6 30 D-A90V 6 30 D-A93 6 11 30 47 D-A93V 6 30 47 D-A96 8 41 D-A96V 8 41 0.5 m (Nil) 1 m (M) 3 m (L) 5 m (Z) Lead wire length Dimensions (mm) D-A90/D-A93/D-A96 D-A90V/D-A93V/D-A96V 2 2.8 4.5 2.7 Slotted set screw M2.5 x 4 L 4 24.5 (22) 22 2 6 Slotted set screw M2.5 x 4 L D-A90 without indicator light Indicator light 2.7 D-A90V without indicator light Indicator

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 505 Applicable Fluids Material and fluid compatibility check list for High

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

80 90 75 20 2 Same side 75 55 80 90 Caution 20+35(n2) n=2, 3, 4, 80+35(n2) n=2, 4, 6, 8, 75+35(n2) n=2, 4, 6, 8, 90+35(n2) n=2, 4, 6, 8, Dif. sides D-A44C q Socket wrench should be used when mounting bracket are replaced.

CRQ2

2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

80 90 75 20 2 Same side 75 55 80 90 Caution 20+35(n2) n=2, 3, 4, 80+35(n2) n=2, 4, 6, 8, 75+35(n2) n=2, 4, 6, 8, 90+35(n2) n=2, 4, 6, 8, Dif. sides D-A44C q Socket wrench should be used when mounting brackets are replaced.

MY2

6 Single axis type/MY2H w @2 t @1 @9 #8 MY2H16 MY2HT16 !3 e $2 q $0 #9 !8 u i o y !0 @8 @3 !1 $1 #0 r MY2H16 MY2HT16 $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

6 q o !8 i r t !4 @0 !7 e u @2 !5 @1 !9 w !3 !2 !0 !1 !4 @3 !9 20, 25 Component Parts No. No.

Profile Design ISO/VDMA Air Cylinder Series CP95

Air consumption Q [Nl/min.] 15 20 30 40 50 15 20 30 40 50 1 1 32 2 0.4 0.5 0.5 20 25 0.4 0.3 160 2 10 10 125 12 0.3 16 1.5 2 3 4 5 1.5 2 3 4 5 9 0.2 0.2 100 8 80 63 50 10 7.5 0.1 10 6 1 1 6 5 40 0.05 4 5 0.6 0.5 0.4 0.3 0.2 0.15 0.1 0.04 32 4 1500 2000 3000 4000 5000 0.03 3 25 20 0.02 2 2.5 16 1.5 1 1000 0.01 1 0.05 0.04 0.03 10 1 150 200 300 400 500 0.5 0.4 0.3 0.005 0.02 0.015 0.01 6 0.2

Magnetically Coupled Rodless Cylinder

6 !3 !0 !1 !4 !2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

VK300

VK300-82-2-01 VK300-82-2-03 110 VAC 110V VK300-82-2-02 200 VAC 200V VK300-82-2-04 220 VAC 220V 240 VAC 240V 6 VDC 6V 12 VDC 12V 24 VDC 24VD 48 VDC 48VD VK300-82-2-07 VK300-82-4-51 VK300-82-4-06 VK300-82-3-05 VK300-82-3-53 DIN terminal type Indicator light (Built-in connector) Marking Circuit with indicator light AC circuit diagram 12 VDC or less circuit diagram 24 VDC or more circuit diagram

39

0 q e !1 u !5 !6 !3 !4 o i Without switch !2 @1 @2 w r Description Replaceable kits list Component parts No.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

L L (60) 44 Approx. 10 8 16 14 25 1 13 47.04 55 Multi-core vinyl cable 0.3 mm 2 x 25C 2 x M2.6 x 0.45 Terminal no. Socket side Plug terminal no. (Arrangement as seen from lead wire side) D-sub connector cable assembly Terminal no. q !5 !4 @4 !3 !2 @3 @2 !1 !0 o i @1 !6 !7 w e r !8 Lead wire color Terminal no. Dot marking @5 Black 1 None @6 Brown 2 None !

C95

8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

CXT

5 e r t q w !1 i @3 @0 @9 CL @4 MLGC @2 CNA CXTM/ Guide rod, bearing @8 CB @5 CV/MVG CXW CXS CXTL/ Guide rod, bearing CXT @1 MX @6 MXU !9 MXS @7 !8 o !0 !3 !2 y u !7 !6 MXQ MXF Component Parts Component Parts MXW Description Material Notes Description Material Notes No. No. MXP Aluminum alloy Hard anodized Option Slide block Shock absorber !

CJ2X/CUX/CQSX/CQ2X/CM2X

Model AS1001FM AS2051FM RS Q G Metric size 8 3.2, 4, 6 6 6 4 Tubing O.D. 1/8", 5/32", 3/16" 1/4" Inch size 1/4", 5/16" 3/16", 1/4" 3/16" 5/32" RS H A Air flow (l/min (ANR)) 12 7 38 Controlled flow 0.2 0.1 Effective area (mm2) 0.6 RZQ 100 Flow rate (l/min (ANR)) 460 230 290 130 Free flow MI W S 1.5 Effective area (mm2) 7 3.5 4.5 2 Note) Supply pressure: 0.5 MPa, Temperature: 20C CEP1 Elbow

Air Cylinder Series CA2

3 y e q w !7 r !4 !8 !6 !2 t u !5 o !1 !

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

6 !3 !0 !1 !4 !2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

MXS

2 !3 !4 !5 !6 !7 !8 !