5

, 350, 400, 450, 500 1000 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 1000 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 100 25, 50, 75, 100, 125, 150, 175, 200, 250

JA/JAH/JB/JS

Refer to pages 10-24-3 to 10-24-6 for Safety Instructions and Actuator Precautions. 40 M12 x 1.5 4400 4400 4400 0.75 30, 40 M12 x 1.75 4400 4400 4400 0.75 5 50 M16 x 1.5 11000 11000 9000 1 50, 63 M16 x 2 11000 11000 9000 1 Mounting 80 M20 x 2.5 18000 18000 14000 1.25 Warning JA100-24-300 JA100-27-150 JA125-27-200 JAl160-33-200 100 M24 x 3 28000 28000 22000 2 1.

energy saving effect

HRSH250/300-A-20 (Air-cooled 200 V type) HRSH250/300-A-40 (Air-cooled 400 V type) Ventilation air inlet Ventilation air inlet Ventilation air outlet 1035 Eye bolt M12 (4 places) Operation display panel 850 Handle Handle Dustproof filter Breaker handle Note) Circulating fluid outlet Rc1 Automatic fluid fill port Rc1/2 Overflow port Rc1 Circulating fluid return port Rc1 1720 Contact input/output

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

3/8 1/2 Non-lube Double acting, Up to 1500 25, 50, 75, 100, 125, 150, 200 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied.

ZP

, 340 Reinforced pad to prevent deformation when transferring heavy or large work pieces How to Order ZP2 32 H N Pad unit Pad diameter Pad material Symbol Pad diameter 32 150 250 300 340 Symbol Material NBR Silicone rubber FKM CR N S F C 32 150 250 300 340 Note) Silicone rubber is only applicable to the 32 pad.

JA/JAH/JB/JS

Refer to pages 10-24-3 to 10-24-6 for Safety Instructions and Actuator Precautions. 40 M12 x 1.5 4400 4400 4400 0.75 30, 40 M12 x 1.75 4400 4400 4400 0.75 5 50 M16 x 1.5 11000 11000 9000 1 50, 63 M16 x 2 11000 11000 9000 1 Mounting 80 M20 x 2.5 18000 18000 14000 1.25 Warning JA100-24-300 JA100-27-150 JA125-27-200 JAl160-33-200 100 M24 x 3 28000 28000 22000 2 1.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 Caution Load weight (kg) Load weight (kg) 1.

AC Servo Motor Driver (Pulse input type/Positioning type)

PA07 1 12 6 3 12 6 3 20 10 5 16 8 4 Feel length multiplication (STM) (Multiplier) PE02 0 0 (<1000 stroke)/0001 (>1000 stroke) Home position return type PE03 0010 3 (Stopper type) Home position return direction PE03 0010 1 (Motor side) Home position return Speed (rpm) PE04 500 150 300 600 150 300 600 90 180 360 112 225 450 Home position return/JOG operation Accelerationeration/De celeration

SFOD-OMT0009CN

USB 7. 106 No.SFOD-OMT0009CN-B 7. 7. 4. ( EMG ) 4. 107 No.SFOD-OMT0009CN-B 1. 1.1 LEY/LEYG LEY16/LEYG16 LEY25/LEYG25 LEY32/LEYG32 LEY40/LEYG40 A B C A B C A B C A B C [mm] 10 5 2.5 12 6 3 16 8 4 16 8 4 [mm] 300 300 300 400 400 400 500 500 500 500 500 500 [mm/s] 500 250 125 500 250 125 500 250 125 300 150 75 [mm/s] 15 8 4 18 9 5 24 12 6 24 12 6 () [mm/s] 22 12 6 26 13 7 34 17 9 34

Ionizer Gun

150 300 450 600 750 900 1050 1200 1350 1500 Distance [mm] Distance [mm] 5) 6) Supply pressure 0.4 MPa Consumed flow rate 316 L/min (ANR) Supply pressure 0.5 MPa Consumed flow rate 390 L/min (ANR) 200 200 150 150 2s 1.5s 100 100 50 50 1.5s 1s 0.5s 1s 0.5s 0 0 -50 -50 -100 -100 -150 -150 -200 -200 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 Distance

ML2B

Piston speed (mm/s) 1000 Air cushion RS Q G Adjusting Procedure 500 400 300 Lock nut for adjusting bolt Unit holding bolt RS H A Adjusting bolt 200 RZQ Lock plate holding bolt 0.5 100 10 20 30 4050 100 200 300 400500 MI W S W2 max W1 max W3 max CEP1 Allowable load (N) Shock absorber CE1 ML2B40 Horizontal collision: P = 0.5 MPa Lock plate 2.

AC

Q Model Port size A B C D M P B B E F G H J K L N 22 34.2 42.2 8.5 11 13 23 26 5 7 7 50 70.5 88 AC2041 AC3041 AC4041 248.5 300 187.5 3.5 4 1 5.5 7 9 45 58.5 77 24 35 40 35 29.5 38 30 41 50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 90 117 154 164.5 207.5 259 78 92.5 112 45 55 70 33 Option marks in the dimension diagram show the direction of inclination from port center to gauge center.

3 Port Solenoid Valve Series VQ100 1

AXT661-12A Nil 300 mm 600 mm 1000 mm 2000 mm 3000 mm 6 10 20 30 Plug connector lead wire length Passage Indicator light Single Latching type A-C ON (Set) Indicator light Passage The lead wire length of the valve with lead wire is 300 mm.

Table of Contents

AS3201F -03-10 200 400 200 100 0 0 SV400 AN300 -KM12 T1209 SV300 ANA1 -C12 T1075 800 400 MB 100 MB 80 600 300 Stroke (mm) AS5000-02 AS420-02 AS4000-03 400 200 200 100 0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04 200 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900

Vacuum System Peripherals:

Metal Seal, Rubber Seal 3 port solenoid valve Series VQZ200/300 Piping specifications Solenoid valve Port size Effective area (mm2) (Cv) Flow characteristics C (dm3/(sbar)) VQZ215 VQZ235 VQZ225 VQZ245 VQZ315 VQZ335 VQZ325 VQZ345 1.7 2.3 1.7 2.5 3.0 4.5 2.9 4.4 VQZ 200 1 8 1 4 , Base mounted (With sub-plate) VQZ 300 , 1 4 3 8 Base mounted 3 port solenoid valve Series VK Compact size: Width

VQ

Consult SMC for other voltages. 2.9-12 Series VQ100 Plug Lead Unit Manifold (VV3Q12) L1 10.8 3.5 5 L2 3 P E 8.9 P E 11 Round head screw M1.7 X 14 W (L type) 28.7 26.5 W (M type) 300 33.8 300 2-3.5 Mounting hole 4-M5 SY P, E port Manual override SYJ 11.5 P=10 300 Latching, 100V AC or more VK H (M type) U side D side n 5 4 3 2 1 300 H (L type) VZ VT VT 42.2 L type M type 36.3 VP W

3 Port Solenoid Valve Series VQ100

AXT661-12A Nil 300 mm 600 mm 1000 mm 2000 mm 3000 mm 6 10 20 30 Plug connector lead wire length Passage Indicator light Single Latching type A-C ON (Set) Indicator light Passage The lead wire length of the valve with lead wire is 300 mm.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Note 2) Stations Note 3) 01 1 station 16 16 stations 2-4-82 Body Ported Series VQ1000 Plug Lead Unit: Cassette Type (M plug connector AC, Latching) 43.5 300 (Lead wire length) 38.5 Lead wire 0.2 mm2 (M plug connector) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread Cover 1.4 Lead wire length 300 mm 35.5 (L plug connector

Thermo-con

Heating Capacity HEC001 Circulating fluid: Clear water Circulating fluid: 20% ethylene glycol F 50 70 90 110 130 150 F 50 70 90 110 130 150 600 600 Facility water flow rate: 13. gpm (5 L/min) Facility water flow rate: 1.3 gpm (5 L/min) 500 500 Heating capacity (W) Heating capacity (W) 400 400 Facility water: 86F (30C) 300 300 Facility water: 68F (20C) Facility water: 68F (20C) 200 200 HRG

3 Port Solenoid Valve Series VQ100 1

AXT661-12A Nil 300 mm 600 mm 1000 mm 2000 mm 3000 mm 6 10 20 30 Plug connector lead wire length Passage Indicator light Single Latching type A-C ON (Set) Indicator light Passage The lead wire length of the valve with lead wire is 300 mm.