Possible to transfer a workpiece at low-speed.

1/8 M10 x 1.5 15 M6 x 1 M10 x 1 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 Rc 1/8 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9 5.5 33 5H9 5.5 In addition to Rc 1/ 8, G 1/ 8, NPT 1/ 8 and NPTF 1/ 8 are also available. 338 MSQX Series Low-Speed Rotary Table Rack & Pinion Type Auto Switch Proper Mounting Position

Series HAW Water Cooled Aftercooler 1

Rc 1/2 Rc 11/2 Rc 2 3B flange Rc 11/4 Rc 1 32 67 78 Rc 1/2 Rc 1/2 Rc 3/4 Rc 3/4 Rc 1 Rc 3/4 Weight (kg) Coating color Drain valve (1 pc.) 9.7 11.5 59 95 High efficiency drain Drainage is efficiently removed by built-in drain separator. Visible outlet air temperature Outlet air temperature is easily checked by thermometer, resulting in easy maintenance.

CJ2X/CUX/CQSX/CQ2X/CM2X

1/8 Rc 1/8 Rc 1/4 Rc 1/4 M5 x 0.8 MVGQ Precautions CC RB Be sure to read before handling.

Rotary Table/Rack & Pinion Style Series MSQ

1/8 M10 x 1.5 15 M6 x 1 M10 x 1 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 Rc 1/8 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9 5.5 33 5H9 5.5 In addition to Rc 1/ 8, G 1/ 8 and NPT 1/ 8 are also available. 286 Rotary Table/Rack & Pinion Style Series MSQ Dimensions/Size 70, 100, 200 Basic type/MSQBA WB effective

SYJA3000

31.5 38 (pilot port) 64 3.2 269.5 14 (Non-locking) Manual override (Mounting holes) 35 89 (Non-locking) Manual override 3-Rc(PT)1/8, 1/4 (P, A, Bport) 29 28 25 21 1.6 14 89 18 21.8 (Bleed hole) With filter (80 Mesh) 55 2-1.8 (Bleed hole) With filter (80 Mesh) 40 25.5 20 R1 R2 P 11.5 12 18 22 22 27.2 (R1, R2 port) 2-Rc(PT)1/4 63 5-Rc(PT)1/8 (Piping port) 3.1-21

High Power Cylinder Series RHC

Contents Urethane 12 50 Piston seal RHC50-PS NBR 13 63 Wear ring RHC63-PS Resin 14 Set of nos. 12 to 16 above 80 Cylinder tube gasket RHC80-PS NBR 15 100 Rod seal RHC100-PS NBR 16 Seal kits are sets consisting of items 12 through 16, which can be ordered using the seal kit number for each bore size. 5 High Power Cylinder Series RHC Dimensions/Basic Type 20 to 40 Rc P Rc P GA H2 NN NN GB

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

1/8 Rc 1/4 Rc 1/8 Rc 1/4 Side ported CRA1 Size Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Axial ported CRQ2 Mounting Basic style, Foot style Size: 80 Size: 100 MSQ Volume MRQ (cm 3) Size: 50 Rotating angle Single vane (S) Double vane (D) DClassification CRB1BW50 CRB1BW80 CRB1BW63 CRB1BW100 CRB1BW50 CRB1BW63 CRB1BW80 CRB1BW100 90 30 70 88 186 48 98 136 272 20180 49 94 138 281 Standard 270 66 118 188

CRB2/CRBU2/CRB1

1/8 Rc 1/4 Rc 1/8 Rc 1/4 Size Axial ports Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Basic, Foot Mounting Volume (cm 3) Size: 80 Size: 100 Single vane (S) Double vane (D) Rotation Classification CRB1BW50 CRB1BW80 CRB1BW63 CRB1BW100 CRB1BW50 CRB1BW63 CRB1BW80 CRB1BW100 30 70 88 186 48 98 136 272 90 Size: 50 49 94 138 281 180 Standard 66 118 188 376 270 32 73 93 197 52 104 146 294 100 51 97 143 292 Optional

Table of Contents

1/8 Rc 1/4 Rc 1/8 Rc 1/4 Side ported CRA1 Size Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Axial ported CRQ2 Mounting Basic style, Foot style Size: 80 Size: 100 MSQ Volume MRQ (cm 3) Size: 50 Rotating angle Single vane (S) Double vane (D) DClassification CRB1BW50 CRB1BW80 CRB1BW63 CRB1BW100 CRB1BW50 CRB1BW63 CRB1BW80 CRB1BW100 90 30 70 88 186 48 98 136 272 20180 49 94 138 281 Standard 270 66 118 188

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

1/8 Rc 1/4 Rc 1/8 Rc 1/4 Side ported CRA1 Size Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Axial ported CRQ2 Mounting Basic style, Foot style Size: 80 Size: 100 MSQ Volume MRQ (cm 3) Size: 50 Rotating angle Single vane (S) Double vane (D) DClassification CRB1BW50 CRB1BW80 CRB1BW63 CRB1BW100 CRB1BW50 CRB1BW63 CRB1BW80 CRB1BW100 90 30 70 88 186 48 98 136 272 20180 49 94 138 281 Standard 270 66 118 188

Pilot Operated

Painting and coating Warnings or specifications printed or labeled on the product should not be erased, removed or covered up. 12 to 14 Rc 1/4 22 to 24 Rc 3/8 Rc 1/2 28 to 30 Rc 3/4 36 to 38 Rc 1 5. Connection of piping to products When connecting piping to a product, refer to its instruction manual to avoid mistakes regarding the supply port, etc. 6.

Modular/F.R.L. Units Series AC

No indication is necessary for Rc; however, indicate N for NPT, and F for G. Note 2) Separate interfaces are required for modular unit.

Modular Type Regulators Series AR

125 150 0 0 0 500 1000 1500 5000 10 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) AR20(K) Rc 1/4 AR60(K) Rc 1 AR40(K) Rc 1/2 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 00 0 5000 10 0 0 200 400 600 800 1000 2000 3000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow

Tie-rod Type Hydraulic Cylinder

CHA Series Tie-rod Type Hydraulic Cylinder Double Acting/Single Rod Foot type: CHAL H 2 x Rc P CHQ A MA K F GA T a M GB V Cushion adjustment screw Air release 4 x J CHK R (max.)

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Electrical entry F: Plug-in Option Port size Nil 01 Without sub-plate Rc 1 8 02 Rc 1 4 2 50 01 F Z VZS3 1 Plug-in 5 G 50 VZS3 01 Non plug-in 2 Symbol Coil rated voltage Thread type Option 2 position single 1 2 3 4 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz Nil N T F Standard Rc Nil Z None With light/surge voltage suppressor NPT 1 110 VAC, 50/60 Hz Option NPTF S With surge voltage suppressor 220

HRX-OM-M005

3/4 Rc 3/4 Facility water C / MPa 10 to 35 / 0.3 to 0.7 Required flow of facility water*9 L/min 15 (Facility water at 25C) 15 (Facility water at 25C) Facility water port (inlet/outlet) Rc 1/2 (single system for channels 1,2) Power supply 3-phase 50/60Hz AC200/200 to 208V10% Rated flow*10 L/min 20 20 Max. operating current A 52 Main breaker size A 60 Temperature fuse operating temperature

Adsorption Plate

A B ZCUK AMJ Rc 1/8 Rc 1/8 AFJ AMV P1 P1 ZH -X185 P1 P2 P3 Base part no. Adsorption surface size SP1130 SP1230 SP1330 SP1430 SP1530 SP1630 50 x 50 55 40 10 Related Products 100 x 100 95 50 10 P2 P3 P2 P3 150 x 150 120 75 10 200 x 200 145 100 10 Rc 1/8 Rc 1/8 P3 P3 250 x 250 170 125 10 300 x 300 195 150 10 Square Rc 1/8 Rc 1/8 P1 P2 Base part no.

Clean Regulator/Fluororesin Type

Body size 1 3 5 Nil X401 Standard Rotating the mounting hole 90 Pilot port thread type Integrated fittings (LQ2) Nil N Rc 1/8 NPT 1/8 Applicable tubing size (O.D. x I.D.)

CRQ2

Thread type Port type Port type Nil Nil TF TN TT Size 10, 15 Number of auto switches Port type Nil Nil TF TN TT Size 10, 15 M5 Rc 1/8 G 1/8 NPT 1/8 NPTF 1/8 M5 Rc 1/8 G 1/8 NPT 1/8 NPTF 1/8 Nil S 2 pcs. 1 pc. 20, 30, 40 20, 30, 40 Applicable Auto Switch/Refer to page 11-11-1 for further information on auto switches.

High Power Cylinder:

27 30 5.8 to 8.8 6.8 to 11.3 Axial foot GA Rc(PT)P H GB F Rc(PT)P K F Effective Thread H2 A WH NN I MM H1 NE D LY ND NB 4-LD LH LT NF E 10 E JD N 10 JC N NA X Y X Y S+Stroke LX LZ LS+Stroke ZZ+Stroke (mm) Bore (mm) 20 25 32 40 Stroke range (mm) 200 to 700 200 to 700 200 to 1000 200 to 1000 I 26 31 38 47 F 16 16 19 21 A 18 22 22 24 E 14.5 18 18 20.5 D 10 12 12 16 GB 47.5 49.5 51.5 51.5 GA