Table Accuracy: High Precision, Size: 10, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Standard Cable, Actuator Cable Length: 5, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Option: -, Communication Plug Connector or I/O Cable Length

Table Accuracy: High Precision, Size: 30, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Standard Cable, Actuator Cable Length: 5, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Option: -, Communication Plug Connector or I/O Cable Length

Table Accuracy: High Precision, Size: 10, Max. Rotation Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Standard Cable, Actuator Cable Length: 5, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Option: -, Communication Plug Connector or I/O Cable

Table Accuracy: Basic, Size: 50, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Standard Cable, Actuator Cable Length: 5, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Option: -, Communication Plug Connector or I/O Cable Length for

Main Body Peripheral Component: Peripheral Components, Input Power Supply: AC Single Phase 100-115V, Position Detection: Absolute, Motor Type: AC servo motor (S6), Controller/driver type: Pulse input type

Main Body Peripheral Component: Peripheral Components, Input Power Supply: AC Single-Phase 200-230V, Position Detection: Absolute, Motor Type: AC servo motor (S6), Controller/driver type: Pulse input type

Main Body Peripheral Component: Peripheral Components, Input Power Supply: AC Single Phase 100-115V, Position Detection: Absolute, Motor Type: AC servo motor (S6), Controller/driver type: CC-Link direct input type

Main Body Peripheral Component: Peripheral Components, Input Power Supply: AC Single-Phase 200-230V, Position Detection: Absolute, Motor Type: AC servo motor (S6), Controller/driver type: CC-Link direct input type

Main Body Peripheral Component: Peripheral Components, Input Power Supply: AC Single Phase 100-115V, Position Detection: Absolute, Motor Type: AC servo motor (S6), Controller/driver type: SSCNET III type

Main Body Peripheral Component: Peripheral Components, Input Power Supply: AC Single-Phase 200-230V, Position Detection: Absolute, Motor Type: AC servo motor (S6), Controller/driver type: SSCNET III type

Oscillation Angle A: 310°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: Standard, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 0.22, Size: 10, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Standard cable, Actuator cable length(m): 5, Controller

Oscillation Angle A: 310°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: Standard, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 0.32, Size: 10, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Standard cable, Actuator cable length(m): 5, Controller

Oscillation Angle A: 320°, Torque (Range)(N⋅m): 10 to Less than 20, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 10, Size: 50, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Standard cable, Actuator

IZx-OMX0087

400 2) Flow rate : 60L/min 5) Flow rate : 60L/min 75 50 25 0 25 50 75 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm mm ionizer to workpiece [mm] ionizer to workpiece [mm] Installation distance from Installation distance from 200 200 10m/s 400 400 10m/s 5m/s 600 600 5m/s 800 800 2m/s 2m/s 1000 1000 3) Flow rate : 250L/min 6) Flow rate : 180L/min 75 50 25 0 25 50

AC Servo Motor Driver (Pulse input type/Positioning type)

The highest value in the past 15 seconds is displayed relative to the rated torque of 100%. 0 to 400 % 9 Instantaneous torque Torque that occurred instantaneously is displayed. The value of the torque that occurred is displayed in real time relative to the rated torque of 100%. 0 to 400 % 10 Within one-revolution position Position within one revolution is displayed in encoder pulses.

MGP

MGP(kg) MGPM12100 (mm) (mm) 10 20 25 30 40 50 75 100 125 150 175 200 250 300 350 400 12 MGPM12 0.24 0.28 0.31 0.35 0.39 0.50 0.59 0.70 0.79 0.89 0.98 1.17 16 MGPM16 0.33 0.38 0.43 0.48 0.53 0.68 0.80 0.97 1.09 1.22 1.35 1.60 20 MGPM20 0.67 0.75 0.83 0.91 1.17 1.37 1.57 1.76 1.96 2.16 2.63 3.03 3.42 3.82 25 MGPM25 0.95 1.05 1.16 1.27 1.65 1.92 2.19 2.47 2.74 3.01 3.67 4.21 4.76 5.30 32 MGPM32

LEF-OM007xx

S4 40 400 S4 100 to 120VAC 100 to 120VAC LECSB1 LECSB1 B1 B1 25 100 S6 25 100 S6 Motor option 32 200 S7 AC servo motor (Absolute encoder 32 200 S7 AC servo motor (Absolute encoder LECSB2 LECSB2 200 to 230VAC B2 200 to 230VAC B2 B1,B2 B1,B2 Without lock Nil Without lock Nil 400 400 40 40 S8 S8 Cable length With lock B With lock B Without cable Without cable Nil Nil Ball screw lead Stroke

LEY-OM007

30 50 100 150 200 250 300 350 400 450 500 (kg) 0.580.62 0.73 0.87 0.98 1.09 1.20 1.181.25 1.42 1.68 1.86 2.03 2.21 2.382.56 2.09 2.20 2.49 2.77 3.17 3.46 3.74 4.03 4.32 4.60 4.89 LEY 16 D LEY 25 D LEY 32 D [mm] 1) 30 50 100 150 200 250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg) 0.580.62 0.73 0.87 0.98 1.09 1.20 1.17 1.24 1.41 1.67 1.85 2.02 2.20

HEC_001W-E

C 10 20 30 800 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. Fig. 5-6 Cooling capacity *The Radiating water flow rate of 1L/min is for reference. Radiating water Temp.20 Ambient Temp.20 Fluid water 1000 Cooling capacity W 5 Radiating water flow rate L/min 800 1 3 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Bore (mm) Standard stroke (mm) Nylon tarpaulin 60C 110C Neo plain cloth 25, 50, 75, 100, 125, 150, 175, 200, 250, MG 40 Maximum ambient temperature for the rod boot itself. 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, MGP 50, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, MGQ 80, 100 300, 350, 400, 450, 500, 600, 700 MGG Minimum stroke of