High-precision Digital Pressure Switch ( compatible)

P_1(n_1) (Selection of output set value) Setting range ISE79S0x03200x1450 Setting of OUT1 output set value 1012 0x03F4 0 R/W U16 3000 Y (8005200) H_1 (Setting of OUT1 hysteresis) Setting range ISE79S0x03E80x1518 OUT1 setting Setting of OUT1 hysteresis 1013 0x03F5 0 R/W U16 1200 Y (10005400) P1L(n1L) (Lower limit of window comparator) Setting range ISE79S0x03200x1450 Setting of OUT1 output

RHC

250 63 1500 up to 1200 250 80 1500 up to 1400 250 100 1500 up to 1500 250 Note 1) Strokes shorter than the recommended minimum stroke (1 to 249 st) can be manufactured, but cushion capability may not be satisfied since the effective cushion stroke for this cylinder is long.

C95

Standard Stroke Standard stroke (mm) Bore size (mm) Max. stroke 32 700 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 40 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 Made to Order Specifications (For details, refer to page 6-17-19.) 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50,

Refrigerated Air Dryer Series IDF/IDU

(Except for 1E to 3E) (Except for 1E to 3E) Refrigerant Coefficient of ozone depletion-Zero Model Air flow capacity Outlet air pressure dew point Rated inlet condition l/min(ANR) 50Hz 60Hz 100 200 310 500 740 1200 1650 310 500 740 110 220 350 570 810 1300 1820 350 570 810 IDF1E IDF2E IDF3E IDF4E IDF6E IDF8E IDF11E IDU3E IDU4E IDU6E Inlet air of normal temperature 35C Saturation 0.7MPa 10C

Rotary One-touch Fittings Series KS/KX

Rotating Torque/Permissible Number of Rotations Applicable tube O.D. 5/32/4 1/4/6 5/16/8 3/8/10 12 Rotating torque in-lbf (Nm)NOTE 1) 0.053 0.106 0.124 0.177 0.195 (0.006) (0.012) (0.014) (0.020) (0.022) Permissible number Series KS 500 500 400 300 250 of rotations Series KX 1500 1200 1200 1000 1000 Note) Value under pressure 73psi (0.5MPa).

Single Axis Electric Actuator Series LJ1

Mitsubishi Electric Corporation Yaskawa Electric Corporation LJ1H202PA-K 100W to 500 LJ1H202NA-K 100W to 500 LJ1H303PA-K 200W to 500 LJ1H303NA-K 200W to 500 Standard stroke (mm) and Speed (mm/s) Model Motor type 200 300 400 500 600 700 800 900 1000 1200 1500 Capacity 100 LG1H202SC 100W to 500 LG1H202PA 100W to 500 Standard motor LG1H202NA 100W to 500 [Tamagawa Seiki Co., Ltd.]

High Power Cylinder Series RHC

80 84 (840) 1500 63 63 to 1200 80 127 (1270) 1500 80 80 to 1400 80 Symbol 196 (1960) 1500 100 100 to 1500 80 Note 1) When the standard stroke is exceeded, it is outside the guaranteed range.

Refrigerated Air dryer Series IDU/IDF

based on conditions , and 1 1 C = 1.00 based on condition C = 0.90 based on condition 2 2 Based on condition , A and B Based on condition , B-1 and C 3 3 Corrected air flow = 350 (0.85 x 1.00) = 412 l/min (ANR) Corrected air flow = 1200 (0.95 x 0.90) = 1400 l/min (ANR) 4 4 Based on condition ; Based on condition ; IDU4D is selected as the model to process an air flow larger than 412 l/

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

Air Cylinder Series MB

Order Made 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 Symbol Specifications/Descriptions 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 XA 100 Change of rod end shape 1500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450,

Electric Actuators

Mitsubishi Electric 30 guide 100W 0.02 Ground ball screw Corporation 1000 Yaskawa Electric 100W 0.05 Rolled ball screw Corporation Features 1 Simplified Selection Flow Chart Series LJ1/LG1 Page Standard stroke (mm) and Speed (mm/s) Nonstandard motor Model Standard motor Clean room Dust seal Deflection TSUBAKI 100 200 300 400 500 600 700 800 900 1000 1200 1500 CABLEVEYOR LJ1S101SC 88

High-precision Digital Pressure Switch ( compatible)

Setting range ISE70: 0x0244 ~ 0x1450 P_1(n_1) (Selection of output set value) Setting of OUT1 output set value U16 3000 Y 1012 0x03F4 0 R/W (580 ~ 5200) ISE71: 0x02E2 ~ 0x1450 (738 ~ 5200) Setting range ISE70: 0x03E8 ~ 0x15F4 H_1 (Setting of OUT1 hysteresis) Setting of OUT1 hysteresis U16 1200 Y 1013 0x03F5 0 R/W (1000 ~ 5620) ISE71: 0x03E8 ~ 0x1556 OUT1 setting (1000 ~ 5462) Setting range

High-precision Digital Pressure Switch

ISE75G0x03160x1450 (7905200) P_1(n_1) (Selection of output set value) Setting of OUT1 output set value ISE76G0x03200x1450 OUT1 setting U16 3000 Y 1012 0x03F4 0 R/W (8005200) ISE77G0x03200x1450 (8005200) ISE78G0x03200x1450 (8005200) Setting range ISE70G0x03E80x15F4 (10005620) ISE75G0x03E80x1522 (10005410) H_1 (Setting of OUT1 hysteresis) Setting of OUT1 hysteresis ISE76G0x03E80x1518 U16 1200

5

or less 1200 or less 1600 or less -XC68 Made of stainless steel (with hard chrome plated piston rod) -XC86 With rod end bracket Accessories/For details, refer to page 221.

Precision Regulator

/min (ANR)) Supply pressure P1 (MPa) Relief flow rate (L/min (ANR)) IR2020-02 IR2020-02 IR2020-02 Supply pressure: 1.0 MPa Back pressure: 1.0 MPa IC 1.0 0.8 0.204 ITVH 0.9 Set pressure P2 (MPa) Set pressure (MPa) 0.7 Set pressure (MPa) 0.8 0.6 ITVX 0.202 0.7 Set point 0.5 0.6 PVQ 0.200 0.5 0.4 0.4 0.3 VY1 0.3 0.198 0.2 0.2 VBA VBAT 0.1 0.1 0.196 0 200 400 600 800 0 200 400 600 800 1000 1200

Industrial Filters

23 46 50 56 50 63 06 FGDFB FGESA Note 2) 410 3000 45 90 120 140 100 160 10 FGELA Note 2) 410 3600 50 120 140 170 110 210 20 FGETA FGESB Note 2) 800 3300 70 140 150 160 120 170 10 FGELB Note 2) 800 4200 90 170 180 210 140 230 20 FGETB FGESC Note 2) 1100 3400 83 150 160 170 120 170 10 FGELC Note 2) 1200 4400 120 190 200 220 150 230 20 FGETC FGGSB 160 270 300 320 290 360 FGGLB FGGSC 200

CLA

I , ~ R. t:l' t y X BN N X Y 1 S + Stroke H LS + Stroke ZZ + Stroke Long Stroke Bore size Stroke ) (mm) range (mm) RT RV 40 501-800 50 601 1000 1001 1200 30 76 , 63 601-1000 1001-1200 40 92 80 751-1000 1001 1400 45 112 100 7511000 . . .

AZ1000

AZ1300 150 psig (1.0 MPa) 75 psig (0.52 MPa) Inlet pressure: 100 psig (0.69 MPa) 40 0.28 140 0.97 35 0.24 120 0.83 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 30 0.21 100 0.69 25 0.17 80 0.55 20 0.14 60 0.41 15 0.10 40 0.28 10 0.07 20 0.14 5 0.03 0 0.00 0 0.00 0 100 200 300 400 500 600 700 Flow rate (slpm, N2) 0 200 400 600 800 1000 1200

C95Series

1200 1 ,4QO , 80 25, 50, 7~ 100, 1 25, 150. 1 7~20~ 250,300, 350, 400,450.500, 600, 700, 800 100 1500 25, 50.75, 100, 125, 150,175,200, 250,300, 350,400,450,500,600,700,800 Intermediate strokes are available.

CP95

25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 Intermediate strokes are available.