Booster Regulator/Air Tank

VBAT10A1 S Note) A safety valve port is provided only when option R or S is selected.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Seal Metal seal Rubber seal Coil voltage 0 1 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Function 1 2 3 Stations U side Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) D side (2) Note 1) Applicable to DC specifications. Note 2) Refer to page 2-5-39 for external pilot specification.

Air Slide Table/Long Stroke Type Series MXY

0 100 200 300 400 500 280 560 10 4 8 7 6 5 MXY12 3 2.0 Shock absorber Rubber stopper screw 2 4 Load mass W kg 1.5 Metal stopper screw 3 1.0 1 100 50 200 300 400 560 2 100 50 200 300 400 500 Average speed Va mm/s Collision speed V mm/s 0.5 Average speed Va mm/s 0.0 Collision speed V mm/s 0 100 200 300 400 500 280 560 Note) Use the average speed when calculating static moment.

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(mm ) . 100 125 150 I 50 75 100 125 150 75 ~ 50 I 75 50 100 125 150 107 40 70 B3 83 97 11 5 128 128 194 52 62 204 212 225 225 1 83 107 50 70 83 ! 97 115 128 I 128 52 62 204 19' 212 2.?

XL-OMY0002

S 6-2. XLD-63 XLD-80 XLD-25 XLD-40 XLD-50 XLD-100 XLD-160 0.08 Nm 0.3 Nm 6-3.S S S S 6-4.M M M S 6-5./ S M S M 12 XL-OMY0002 7.

JXCx-OMY0008

Movement Speed Position Acceleration Deceleration Force Value Area 1 Area 2 In pos force speed force mode mm/s (mm) mm/s2 mm/s2 (mm) (mm) (mm) mm/s 0 1 Absolute 100 100.00 1000 1000 50 40 10 100 0 0 5 2 Absolute 50 50.00 1000 1000 0 0 0 100 0 0 0, 1 (E.g.) Flow chart Controller (1) Select Step No.1.

JXCx-OMX0009

Then, the actuator should move from the position where the pushing operation was completed (where INP turned ON) to a point 50 mm away at 50 mm/s. (Step Data No.2 is used for this operation).

MU

66 82 102 126 148 FX 14 16 18 22 30 FV 76 94 118 144 168 FT 8 8 9 12 14 FD 5.5 7 9 11 13 Model MUWF25 MUWF32 MUWF40 MUWF50 MUWF63 2.4-9 Plate Cylinder/Single Acting Spring Return/Extend Series MU 25, 32, 40, 50, 63 How to Order Standard MU B 25 10 S M MDU B 25 10 S M A73 S With auto switch Built-in magnet Number of auto switches Mounting S n 2 1 n B L F G C D Basic Axial foot Front flange

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

are attached. 50 50 mm Bore size Port Port D F Port thread type Clamping height (Refer to the below figure.)

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

Note 1) Perpendicular electrical entry is not available for 50 and 63.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Maximum Speed: Up to 600 (mm/s) Graph (6) Maximum Speed: Up to 500 (mm/s) 0.3 30 40 50 0.2 20 10 0.1 2 3 4 5 Mass W (kg) Mass W (kg) 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 8 0.02 16 20 12 0.01 5 10 20 30 0.1 5 10 20 30 50 100 40 200 Overhang L (mm) Overhang L (mm) Graph (7) Maximum Speed: Up to 800 (mm/s) 30 40 50 20 10 2 3 4 5 Mass W (kg) 40 32 D1 0.5 0.4 0.3 0.2 -X 16 25 20 12 Individual

High Vacuum L Type Valve

Step 4 Step 5 O ring S valve M valve Needle S valve seal assembly seat (XLD-40,50,160) (XLD-25) S valve seal assembly (XLD-63,80,100) Wipe off the dust of the S valve and around it. Remove dust from the needle seat or S valve seal assembly. For size 25, 40, 50, and 160, remove the dust from the initial pumping valve seal O ring.

Series AK1000

(psig) 35 0.24 70 0.48 30 0.21 60 25 0.17 0.41 20 0.14 50 0.34 15 0.10 10 0.07 40 0.28 0 5 0.00 0.03 30 0.21 0 100 200 300 400 500 600 700 800 900 1000 Flow rate (slpm, N2) 0 50 100 150 200 250 300 350 400 450 500 550 600 650 700 Flow rate (slpm, N2) AK1200HF 150 psig (1.0 MPa) 50 psig (0.34 MPa) Inlet pressure: 100 psig (0.69 MPa) AK1200FC Inlet pressure: 150 psig (1.0 MPa) 3/4 inch connections

RZQ

CE2 50 631 41 355.5 396.5 ML2B 63 631 44.5 357.5 402 C J G5-S qA port pressurization at initial (retracted) position.

Stopper Cylinder

D Lever type models Caution RS (D) 32/40/50-L RS (D) 32/40/50-B RS (D) 32/40/50-C RS (D) 32/40/50-D RS (D) 32/40/50-E Mounting base 1. Do not allow a pallet to collide with the cylinder when the lever is upright.

Cylinder with Lock Series MNB

B2 H S + Stroke ??

mlu

Allowable kinetic energy Extension locking direction Retraction locking direction 100 100 50 50 Load weight kg Load weight kg 10 10 50 W 50 5 5 40 40 B 32 32 0.5MPa 0.4MPa 0.5MPa 0.4MPa A A 25 25 1 1 100 500 100 500 B W Maximum speed mm/s Maximum speed mm/s B: Retraction locking direction F: Extension locking direction 18 Series MLU Specific Product Precautions 2 Be sure to read before handling

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

(S)A 8 13.2 23.9 33.2 (33.3) 14.2 18 (19) AS22l1FG-02-10(S)A 10 15.9 26.9 36.2 (36.3) 15.6 19 (20) AS32l1FG-02-06(S)A 6 1/4 17 (17.5) 13 13.3 40 (40) AS32l1FG-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS32l1FG-02-10(S)A 10 15.9 26.7 37 35.7 15.6 42 (42) AS32l1FG-02-12(S)A 12 18.5 29.7 40 34.5 17 43 (43) AS32l1FG-03-06(S)A 6 10.4 21.8 32.1 36.4 50 48.4 44.5 42.9 1/4 19 16.6 13.3 29 (30) AS32l1FG

Compact Cylinder with Lock Series CLQ

FZ FX B 71 78.5 19.5 22.5 61 68.5 A A B 29.5 32.5 5 to 50 5 to 50 20 25 Bore size (mm) FV G FX FZ L L1 S L1 Rod end nut 39 42 48 52 60 64 27 31 14.5 15 28.5 32.5 40.7 44.2 20 25 Rear flange type: CLQG/CDLQG FV S Rear flange type (mm) Stroke range Without auto switch With auto switch Bore size (mm) 2-6.6 A + Stroke B + Stroke L G 8 FZ FX B A A B 5 to 50 5 to 50 29.5 32.5 69 76.5 19.5 22.5

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

+ Stroke F F ZZ + Stroke H B E G Mounting nut NN NA F N CY3B15 (mm) Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x