Electronic Pressure Switch Series (Separate Type)

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Due to its small size, the sensor can be installed close to a pad.

ZSE2/ISE2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 IF Data Can be integrated with ZX or ZR ejector system.

VCB

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Compact: Single valve volume reduced by 15% (Class 3) VX3 VXA Clip type VN Ease of maintenance has been improved. Changing of the coil is made easy by means of clip design.

VXZ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Compact, lightweight and large valve capacity Diaphragm VX3 ! VXA VN Wide variations enables a wide range of fluids control.

XL

1000 800 800 Smooth exhaust valve T msec 600 600 400 400 200 200 0 0 25 40 50 63 80 25 40 50 63 80 Size Size Response time when closed (including pneumatic valve) Operation time when closed (vacuum valve only) Response time when open (including pneumatic valve) Operation time when open (vacuum valve only) 35 Series XL High Vacuum Angle Valve 2 As a function of pilot pressure 1MPa = 145 psi

Accuracy: H (High Precision Type), Size: 63, Motor Type: S3 (200W Output, Incremental Encoder), Lead [mm]: B (LEJS40, 8mm; LEJS63, 10mm), Stroke: 600mm, Motor Option: B (w/Lock), Vacuum Port: Left, Cable Type: S (Standard Cable), Cable Length: 5 (5m), Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input), I/O Connector: H (w/Connector)

Size: 32, Motor Mounting: Top Mounting Position, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: A [LEY25, 12mm; LEY32, 16(20)mm], Stroke: 500mm, Motor Option: w/Lock, Rod End Thread: Rod End Female Thread, Mounting: Body Bottom Tapped, Cable Type: Standard Cable, Cable Length: 5m, Driver: LECSA1, 100 to 120V, I/O Connector: w/Connector

Accuracy: Basic Type, Size: 32, Motor Mounting: Top Mounting Position, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 350mm, Motor Option: B (w/Lock), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped (Standard), Cable Type: S (Standard Cable), Cable Length: 5m, Driver: A1 (LECSA1-S, 100

Accuracy: Basic Type, Size: 32, Motor Mounting: Top Mounting Position, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 350mm, Motor Option: w/o Lock, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped (Standard), Cable Type: S (Standard Cable), Cable Length: 5m, Driver: A1 (LECSA1-S, 100~

Accuracy: Basic Type, Size: 32, Motor Mounting: Top Mounting Position, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: A [LEY25, 12mm; LEY32, 16(20)mm], Stroke: 500mm, Motor Option: B (w/Lock), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Cable Type: S (Standard Cable), Cable Length: 5m, Driver: A1 (LECSA1-S, 100~120V, Incremental, Pulse

Accuracy: Basic Type, Size: 32, Motor Mounting: D (In-line Type), Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: B [LEY25, 6mm; LEY32, 8(10)mm], Stroke: 200mm, Motor Option: w/o Lock, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: F (Rod Flange), Cable Type: S (Standard Cable), Cable Length: 5m, Driver: A1 (LECSA1-S, 100~120V, Incremental

Accuracy: Basic Type, Size: 32, Motor Mounting: Top Mounting Position, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: B [LEY25, 6mm; LEY32, 8(10)mm], Stroke: 500mm, Motor Option: w/o Lock, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped (Standard), Cable Type: S (Standard Cable), Cable Length: 5m, Driver: A1 (LECSA1-S, 100

Accuracy: Basic Type, Size: 32, Motor Mounting: Top Mounting Position, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 350mm, Motor Option: w/Lock, Rod End Thread: Rod End Male Thread, 1 Rod End Nut Included, Mounting: Ends Tapped (Standard), Cable Type: Standard Cable, Cable Length: 5m, Driver: LECSA1-S, 100~120V, Incremental

Accuracy: Basic Type, Size: 32, Motor Mounting: Top Mounting Position, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 350mm, Motor Option: w/o Lock, Rod End Thread: Rod End Male Thread, 1 Rod End Nut Included, Mounting: Ends Tapped (Standard), Cable Type: Standard Cable, Cable Length: 5m, Driver: LECSA1-S, 100~120V, Incremental

Accuracy: Basic Type, Size: 32, Motor Mounting: Top Mounting Position, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: A [LEY25, 12mm; LEY32, 16(20)mm], Stroke: 500mm, Motor Option: w/Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Cable Type: Standard Cable, Cable Length: 5m, Driver: LECSA1-S, 100~120V, Incremental, Pulse Input, I

Accuracy: Basic Type, Size: 32, Motor Mounting: In-line Type, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: B [LEY25, 6mm; LEY32, 8(10)mm], Stroke: 200mm, Motor Option: w/o Lock, Rod End Thread: Rod End Male Thread, 1 Rod End Nut Included, Mounting: Rod Flange, Cable Type: Standard Cable, Cable Length: 5m, Driver: LECSA1-S, 100~120V, Incremental, Pulse Input,

Accuracy: Basic Type, Size: 32, Motor Mounting: Top Mounting Position, Motor Type: S3 [AC Servo Motor, (Incremental Encoder), Output 200W], Lead: B [LEY25, 6mm; LEY32, 8(10)mm], Stroke: 500mm, Motor Option: w/o Lock, Rod End Thread: Rod End Male Thread, 1 Rod End Nut Included, Mounting: Ends Tapped (Standard), Cable Type: Standard Cable, Cable Length: 5m, Driver: LECSA1-S, 100~120V, Incremental

AZ1000

When the source pressure is 1700 psig (11.7 MPa), achievable delivery pressure is around 125 psig (0.86 MPa ) (HF and FC option 120 psig (0.83 MPa)). 2) 250 psig outlet pressure preset at 800 psig (5.5MPa) inlet pressure. Custom inlet/outlet pressure settings available.

C95Series

1200 1 ,4QO , 80 25, 50, 7~ 100, 1 25, 150. 1 7~20~ 250,300, 350, 400,450.500, 600, 700, 800 100 1500 25, 50.75, 100, 125, 150,175,200, 250,300, 350,400,450,500,600,700,800 Intermediate strokes are available.

CL

to 400 301 to 450 301 to 800 GB GB TB GB ZZ ZZ 210 227.5 230.5 255 ZZ ZZ 206 223 226 250 ZZ ZZ 206 223 226 250 20 25 32 40 186 201 204 230 149 159 162 178 12 12 12 13 20 25 32 40 190 205.5 208.5 235 149 159 162 178 12 12 12 13 125 135 136 151 186 201 204 230 149 159 162 178 12 12 12 13 14 14 14 15 201 to 350 301 to 400 301 to 450 301 to 800 11 11 11 12 20 25 32 40 9-2-32 Series CLG1 Fine