Electric Actuators

side PLC side LEC CK4 (16) Cable length(L)[m] 1 3 5 (10) (11) (30) (60) 1.5 3 5 (L) Conductor size: AWG26 Terminal no.

energy saving effect

When deionized water is used, the electric conductivity should be 1 mS/cm or higher (Electric resistivity: 1 Mcm or lower). 30 min 20 min 14 min 10 min 6 min 4 min Facility Water Supply 2 min 1 min Warning Operating time 30 s 20 s Max. 1. The water-cooled refrigeration type thermo-chiller radiates heat to the facility water.

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;.i Flat type Flat w~h rib (mm) ZPT02 1:6 y H Rat FIalwith rib M_I 1>A 1>8 C 0 E F G 1:4 H ZPT08 ZPno ZPTlOg 10 12 12 21 32.5 56.5 68.5 BaS B9 3 1.7 ZPT13 30 30 30 30 30 30 ZPT13g 13 15 12 21 32.5 56.5 68.5 188.5 89 3 1.8 .

25

cartridge) 6 6 5 5 Discharge time (s) Discharge time (s) 4 4 30 Hz 1 Hz 30 Hz 3 3 1 Hz 2 2 1 1 Sensing AC Sensing AC 0 0 2,000 0 500 1,000 1,500 0 500 1,000 1,500 2,000 Installation distance (mm) Installation distance (mm) 418 Technical Data IZS40/41/42 Series IZS IZS IZS42 1) Without air purge IZN 0 2 4 6 8 10 12 14 16 18 20 IZF 1 Hz 30 Hz Discharge time (s) ZVB IZD IZE IZH 0 50 100 150

Electric Actuator

) B 30 +0.030 +0.030 0 6H9 ( ) depth 4 11 n x 5.5 114 64 200 E 20 C x 200 (=D) Note 1) Distance within which the table can move when it returns to origin.

Water-cooledThermo-chiller

Breaker Operating Characteristics Common for all models 4 h 2 h 1 h 5 s 10 s 20 s 30 s 1 min 2 min 4 min 6 min 10 min 14 min 20 min 30 min Max.

Electric Rotary Table

side PLC side LEC CK4 (16) Cable length (L) [m] (10) (11) (30) (60) 1 3 5 1.5 3 5 (L) Conductor size: AWG26 Terminal no.

HRX-OM-R005

40 50 0 10 20 30 40 50 Circulating fluid temperature Circulating fluid temperature 60Hz 50Hz Fig. 9-4 Cooling capacity(HRS060--20-(BJM)) 1. 5 1. 5 1. 5 1. 5 1. 5 1. 5 kW kW kW kW kW kW 1 1 1 1 1 1 0. 5 0. 5 0. 5 0. 5 0. 5 0. 5 0 0 0 0 0 0 9.5 Heating capacity 0 2 0 2 0 2 0 1 2 0 1 2 0 1 2 HRS060-A-2050Hz HRS060-A-2050Hz HRS060-A-2050Hz HRS060-A-2060Hz HRS060-A-2060Hz HRS060-A-2060Hz

MTS

For detailed specifications, refer to page 8-30-1.

e

Load Mass Allowable Moment E-MY2H/M1 E-MY2H/M3 E-MY2H/M2 E-MY2H/m3 60 60 50 60 60 50 50 50 40 40 30 30 30 30 q r w et 20 20 20 20 Load Mass (kg) Moment (NNm) Moment (NNm) Moment (NNm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 MY2H16 4 4 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400 500 1000 1500 1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200

HRX-OM-R016

HRX-OM-R016 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.3.3 Types of hazard labels . 1-3 1.3.4 Locations of Hazard Labels . 1-4 1.4 Other Labels . 1-5 1.4.1 Product Label . 1-5 1.5 Safety Measures . 1-5 1.5.1 Safety

SQ1000/2000

2 4 2 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) Double (double solenoid): SQ2230D Double (double solenoid): SQ2231D e e q w y e e q w y SQ2231D SQ2230D (A)(B) (A)(B) 4 2 4 2 5 1 3 5 1 3 (R1)(P)(R2) (R1) (P)(R2) u u 3 position: SQ2 30 3 4 5 3 position: SQ2 31 3 4 5 SQ2330 SQ2331 (A)(B) (A)(B) 4 2 4 2 y e e q w y e e q w 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) SQ2430 SQ2431 (A)(B) (A)(B) 4 2 4 2

Floating Joint

100 100 125 160 1000 2000 2000 4400 4400 4400 9000 9000 14000 22000 22000 28000 55000 11.5 14 14 17.5 17.5 17.5 23 23 28 35 35 38 55 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 30 42 42 52 52 52 56 56 70 80 80 88 116 8 9 9 13 13 13 15 15 18 24 24 24 42 19 25 25 30 30 30 38 38 47 58 58 69 89 44 52 52 67 67 67 82.5 82.5 98.5 123 123 155 213 12 16 16 19 19 19 22 22 25 32 32 70 90 1 1.5 1 1.25

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

HRL

Cooling Capacity HRL100-Am-40 (CH1)*1 HRL200-Am-40 (CH1)*1 30 14 12 Ambient temperature 32C 25 Ambient temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 20 8 15 6 10 4 Ambient temperature 45C Ambient temperature 45C 5 2 0 0 5 20 10 15 25 30 35 5 20 10 15 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRL300-Am-40 (CH1)*1 HRL100/200/300-Am-40 (CH2

VDW Series

) Lead wire l approx. 300 SMC SMC 30 40 1 1 Rectifying device AC type 45 25 34 28 Bracket assembly part number.

HRX-OM-Y098

This produuct Your system Circulating fluid temperature 30 Serial communication Discharge temperature 31 Circulating fluid display temperature 30 Heat radiation Circulating fluid set 1 temperature 30 Offset temperature 30 1 Pump operation mode 4. Pump operation mode can be set up.

Bernoulli Gripper

ZNC20 Aluminum 1 to 1.5 ZNC20P Resin 0.5 to 1 3.7 ZNC20S Stainless steel 1 to 1.5 ZNC(30, 40, 60) Aluminum M5 x 0.8 1 to 1.5 ZNC(30, 40, 60)P Resin 0.5 to 1 ZNC(30, 40, 60)S Stainless steel 1 to 1.5 ZNC80 Aluminum 4 7 ZNC80P Resin 3 ZNC80S Stainless steel 7 R1/8 Workpiece size Bernoulli gripper size Workpiece size Bernoulli gripper size 15 ZNC Series Specific Product Precautions 2 Be sure

One-touch Fittings

Connection Female Thread: Rc, NPT, NPTF Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection Female Thread: G Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 45 3 to 4 1/4 15 to 30 4 to 5 3/8 15 to 30 8 to

Modular Type Filter Regulator Series AW

Symbol Note 1) Drain guide is NPT1/4 (applicable to AW30 to 40) Note 2) Drain guide is G1/4 (applicable to AW30 to 40). 20 30 40 30 40 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 02 03 04 06 1/4 3/8 1/2 3/4 Option Note 3) Option Note 3) Description With bracket Applicable model AW30, 40 AW30, 40 AW30, 40 Symbol Nil B G Note 4) H Description With bracket Applicable model AW20 to 40 AW20 to 40 AW20